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Specular-mode spectroscopic ellipsometry is applied to analyze the optical response of gratings fabricated on a thick transparent plate substrate. The principles of the optical response of the gratings are described by employing incoherent contributions due to backreflections in the finite transparent substrate medium.

Analytical representations of Jones matrices for the magneto-optic (MO) reflection in (a) a magnetic film on a magnetic substrate separated by a nonmagnetic spacer and (b) two ultrathin magnetic films separated by a nonmagnetic spacer, sandwiched between a nonmagnetic cover and a nonmagnetic substrate with arbitrary and independent orientations of magnetization, are provided. Originally isotropic media subjected to a uniform magnetization are considered. The discussion of MO response is restricted to the terms linear in the off-diagonal permittivity tensor elements, and typical situations are illustrated numerically. The results are useful for the analysis of the experiments in MO ellipsometry and MO magnetometry of exchange-coupled magnetic ultrathin-film structures. OCIS codes: 240.0310, 210.3810, 260.2130.

We propose a matrix method for the description of light reflection and transmission by an anisotropic multilayer system consisting of thin and thick layers. A method based on partial-wave matrix summations is applicable in the field of reflection and transmission photometry and ellipsometry. In the case of a thin anisotropic film, the interference effects were described by use of a coherent summation of Jones matrices. Incoherent intensity summations for a thick weakly anisotropic layer were characterized by use of the coherency vector formalism. Observable quantities or Mueller matrix components were obtained from the matrix describing transformation of the coherence vectors. OCIS codes: 260.1180, 260.1440, 260.2130, 313.6860, 120.2130.

Spectroscopic ellipsometry (SE) in the visible/near-UV spectral range is applied to monitor optical critical dimensions of quartz, Si, and Ta gratings, namely, the depth, linewidth, and period. To analyze the SE measurements, the rigorous coupled-wave theory is applied, whose implementation is described in detail, referred to as the Airy-like internal reflection series with the Fourier factorization rules taken into account. It is demonstrated that the Airy-like series implementation of the coupled-wave theory with the factorization rules provides fast convergence of both the simulated SE parameters and the extracted dimensions. The convergence properties are analyzed with respect to the maximum Fourier harmonics retained inside the periodic media and also with respect to the fineness of slicing imperfect Ta wires with paraboloidally curved edges. [ABSTRACT FROM AUTHOR]