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3. Fabrication of Low Cost and Low Temperature Poly-Silicon Nanowire Sensor Arrays for Monolithic Three-Dimensional Integrated Circuits Applications

Author

Tang, Siqi, primary, Yan, Jiang, additional, Zhang, Jing, additional, Wei, Shuhua, additional, Zhang, Qingzhu, additional, Li, Junjie, additional, Fang, Min, additional, Zhang, Shuang, additional, Xiong, Enyi, additional, Wang, Yanrong, additional, Yang, Jianglan, additional, Zhang, Zhaohao, additional, Wei, Qianhui, additional, Yin, Huaxiang, additional, Wang, Wenwu, additional, and Tu, Hailing, additional

Published
2020
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