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Your search keyword '"Wronosky, John B."' showing total 13 results
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13 results on '"Wronosky, John B."'

1. System integration and performance of the EUV engineering test stand

Author

Tichenor, Daniel A., Ray-Chaudhuri, Avijit K., Replogle, William C., Stulen, Richard H., Kubiak, Glenn D., Rockett, Paul D., Klebanoff, Leonard E., Jefferson, Karen L., Leung, Alvin H., Wronosky, John B., Hale, Layton C., Chapman, Henry N., Taylor, John S., Folta, James A., Montcalm, Claude, Soufli, Regina, Spiller, Eberhard, Blaedel, Kenneth, Sommargren, Gary E., Sweeney, Donald W., Naulleau, Patrick, Goldberg, Kenneth A., Gullikson, Eric M., Bokor, Jeffrey, Batson, Phillip J., Attwood, David T., Jackson, Keith H., Hector, Scott D., Gwyn, Charles W., Yan, Pei-Yang, and Yan, P.

Subjects
Materials science, quantum chaos photoionization helium advanced light source als
Published
2001

2. Development of a Wafer Positioning System for the Sandia Extreme Ultraviolet Lithography Tool

Author

Wronosky, John B, Smith, Tony G, and Darnold, Joel R

Subjects
Instrumentation And Photography
Abstract

A wafer positioning system was recently developed by Sandia National Laboratories for an Extreme Ultraviolet Lithography (EUVL) tool. The system, which utilizes a magnetically levitated fine stage to provide ultra-precise positioning in all six degrees of freedom, incorporates technological improvements resulting from four years of prototype development. This paper describes the design, implementation, and functional capability of the system. Specifics regarding control system electronics, including software and control algorithm structure, as well as performance design goals and test results are presented. Potential system enhancements, some of which are in process, are also discussed.

Published
1996

3. System and process learning in a full-field, high-power EUVL alpha tool

Author

Ballard, William P., primary, Tichenor, Daniel A., additional, O'Connell, Donna J., additional, Bernardez II, Luis J., additional, Lafon, Robert E., additional, Anderson, Richard J. M., additional, Leung, Alvin H., additional, Williams, Kenneth A., additional, Haney, Steven J., additional, Perras, Yon E., additional, Jefferson, Karen L., additional, Porter, Therese L., additional, Knight, Daniel, additional, Barr, Pamela K., additional, Van de Vreugde, James L., additional, Campiotti, Richard H., additional, Zimmerman, Mark D., additional, Johnson, Terry A., additional, Klebanoff, Leonard E., additional, Grunow, Philip A., additional, Graham, Jr., Samuel, additional, Buchenauer, Dean A., additional, Replogle, William C., additional, Smith, Tony G., additional, Wronosky, John B., additional, Darnold, Joel R., additional, Blaedel, Kenneth L., additional, Chapman, Henry N., additional, Taylor, John S., additional, Hale, Layton C., additional, Sommargren, Gary E., additional, Gullikson, Eric M., additional, Naulleau, Patrick P., additional, Goldberg, Kenneth A., additional, Lee, Sang Hun, additional, Shields, Harry, additional, St. Pierre, Randall J., additional, and Ponti, Samuel, additional

Published
2003
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4. Performance upgrades in the EUV engineering test stand

Author

Tichenor, Daniel A., primary, Replogle, William C., additional, Lee, Sang Hun, additional, Ballard, William P., additional, Leung, Alvin H., additional, Kubiak, Glenn D., additional, Klebanoff, Leonard E., additional, Graham, Jr., Samual, additional, Goldsmith, John E. M., additional, Jefferson, Karen L., additional, Wronosky, John B., additional, Smith, Tony G., additional, Johnson, Terry A., additional, Shields, Harry, additional, Hale, Layton C., additional, Chapman, Henry N., additional, Taylor, John S., additional, Sweeney, Donald W., additional, Folta, James A., additional, Sommargren, Gary E., additional, Goldberg, Kenneth A., additional, Naulleau, Patrick P., additional, Attwood, Jr., David T., additional, and Gullikson, Eric M., additional

Published
2002
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5. Lithographic evaluation of the EUV engineering test stand

Author

Lee, Sang Hun, primary, Tichenor, Daniel A., additional, Ballard, William P., additional, Bernardez II, Luis J., additional, Goldsmith, John E. M., additional, Haney, Steven J., additional, Jefferson, Karen L., additional, Johnson, Terry A., additional, Leung, Alvin H., additional, O'Connell, Donna J., additional, Replogle, William C., additional, Wronosky, John B., additional, Blaedel, Kenneth L., additional, Naulleau, Patrick P., additional, Goldberg, Kenneth A., additional, Gullikson, Eric M., additional, Chapman, Henry N., additional, Wurm, Stefan, additional, Panning, Eric M., additional, Yan, Pei-yang, additional, Zhang, Guojing, additional, Bjorkholm, John E., additional, Kubiak, Glenn D., additional, Sweeney, Donald W., additional, Attwood, Jr., David T., additional, and Gwyn, Charles W., additional

Published
2002
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6. Current Status of the EUV Engineering Test Stand.

Author

Leung, Alvin H., primary, Tichenor, Daniel A., additional, Replogle, William C., additional, Goldsmith, John E. M., additional, Kubiak, Glenn D., additional, Stulen, Richard H., additional, Ballard, William P., additional, Jefferson, Karen L., additional, Klebanoff, Leonard E., additional, O'Connell, Donna J., additional, Wronosky, John B., additional, Taylor, John S., additional, Folta, James A., additional, Hale, Layton C., additional, Chapman, Henry N., additional, Sweeney, Donald W., additional, Lee, Sang H., additional, Attwood, David T., additional, Goldberg, Kenneth A., additional, and Naulleau, Patrick, additional

Published
2002
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7. Initial results from the EUV engineering test stand

Author

Tichenor, Daniel A., primary, Ray-Chaudhuri, Avijit K., additional, Lee, Sang Hun, additional, Chapman, Henry N., additional, Replogle, William C., additional, Berger, Kurt W., additional, Stulen, Richard H., additional, Kubiak, Glenn D., additional, Klebanoff, Leonard E., additional, Wronosky, John B., additional, O'Connell, Donna J., additional, Leung, Alvin H., additional, Jefferson, Karen J., additional, Ballard, William P., additional, Hale, Layton C., additional, Blaedel, Kenneth L., additional, Taylor, John S., additional, Folta, James A., additional, Spiller, Eberhard A., additional, Soufli, Regina, additional, Sommargren, Gary E., additional, Sweeney, Donald W., additional, Naulleau, Patrick P., additional, Goldberg, Kenneth A., additional, Gullikson, Eric M., additional, Bokor, Jeffrey, additional, Attwood, Jr., David T., additional, Mickan, Uwe, additional, Hanzen, Ralph M., additional, Panning, Eric M., additional, Yan, Pei-yang, additional, Bjorkholm, John E., additional, and Gwyn, Charles W., additional

Published
2001
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8. System integration and performance of the EUV engineering test stand

Author

Tichenor, Daniel A., primary, Ray-Chaudhuri, Avijit K., additional, Replogle, William C., additional, Stulen, Richard H., additional, Kubiak, Glenn D., additional, Rockett, Paul D., additional, Klebanoff, Leonard E., additional, Jefferson, Karen J., additional, Leung, Alvin H., additional, Wronosky, John B., additional, Hale, Layton C., additional, Chapman, Henry N., additional, Taylor, John S., additional, Folta, James A., additional, Montcalm, Claude, additional, Soufli, Regina, additional, Spiller, Eberhard A., additional, Blaedel, Kenneth L., additional, Sommargren, Gary E., additional, Sweeney, Donald W., additional, Naulleau, Patrick P., additional, Goldberg, Kenneth A., additional, Gullikson, Eric M., additional, Bokor, Jeffrey, additional, Batson, Phillip J., additional, Attwood, Jr., David T., additional, Jackson, Keith H., additional, Hector, Scott D., additional, Gwyn, Charles W., additional, and Yan, Pei-yang, additional

Published
2001
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9. Lithographic evaluation of the EUV engineering test stand.

Author

Lee, Sang Hun, Tichenor, Daniel A., Ballard, William P., Bernardez II, Luis J., Goldsmith, John E. M., Haney, Steven J., Jefferson, Karen L., Johnson, Terry A., Leung, Alvin H., O'Connell, Donna J., Replogle, William C., Wronosky, John B., Blaedel, Kenneth L., Naulleau, Patrick P., Goldberg, Kenneth A., Gullikson, Eric M., Chapman, Henry N., Wurm, Stefan, Panning, Eric M., and Yan, Pei-yang

Published
2002
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11. EUV engineering test stand.

Author

Tichenor, Daniel A., Kubiak, Glenn D., Replogle, William C., Klebanoff, Leonard E., Wronosky, John B., Hale, Layton C., Chapman, Henry N., Taylor, John S., Folta, James A., Montcalm, Claude, Hudyma, Russell M., Goldberg, Kenneth A., and Naulleau, Patrick P.

Published
2000
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12. Recent advances in the Sandia EUV 10x microstepper

Author

Goldsmith, John E. M., primary, Barr, Pamela K., additional, Berger, Kurt W., additional, Bernardez II, Luis J., additional, Cardinale, Gregory F., additional, Darnold, Joel R., additional, Folk, Daniel R., additional, Haney, Steven J., additional, Henderson, Craig C., additional, Jefferson, Karen J., additional, Krenz, Kevin D., additional, Kubiak, Glenn D., additional, Nissen, Rodney P., additional, O'Connell, Donna J., additional, Perras, Yon E., additional, Ray-Chaudhuri, Avijit K., additional, Smith, Tony G., additional, Stulen, Richard H., additional, Tichenor, Daniel A., additional, Ver Berkmoes, Alfred A., additional, and Wronosky, John B., additional

Published
1998
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13. Recent results in the development of an integrated EUVL laboratory tool

Author

Tichenor, Daniel A., primary, Kubiak, Glenn D., additional, Haney, Steven J., additional, Nissen, Rodney P., additional, Berger, Kurt W., additional, Arling, Richard W., additional, Ray-Chaudhuri, Avijit K., additional, Nguyen, Khanh B., additional, Stulen, Richard H., additional, Wronosky, John B., additional, Jordan, Jay D., additional, Smith, Tony G., additional, Darnold, Joel R., additional, Kahle, P. M., additional, Jojola, A. A., additional, Kohler, Stewart M., additional, Urenda, Ruben S., additional, Wheeler, David R., additional, Bjorkholm, John E., additional, Wood II, Obert R., additional, Taylor, Gary N., additional, and Hutton, Richard S., additional

Published
1995
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