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This work represents a comparative study of gas‐phase parameters and reactive‐ion etching kinetics for Si and Si and SiO2 in CF4 + O2 and C6F12O + O2 plasmas. An interest to the C6F12O gas is because it combines the low global warming potential (low environmental impact) and weakly studied dry etching performance. It was shown that the investigated gas systems showed similar effects of processing conditions on electron‐ and ion‐related plasma parameters as well as on the densities of F and O atoms. Etching experiments showed identical behaviors of Si and SiO2 etching rates as well as very similar SiO2/Si etching selectivities. The notable feature of the C6F12O + O2 plasma is only the systematically lower absolute etching rates that correlate with lower in F atom densities. [ABSTRACT FROM AUTHOR]

This study explores how urban middle-aged education program participants can increase their agricultural entrepreneurship volition (AEV) during the COVID-19 pandemic in South Korea. We examined the direct and indirect effects of formal learning experiences (FLE) and informal learning experiences (ILE) on AEV. Multiple regression, mediation, moderation, and moderated mediation methods using Process Macro were conducted with 411 samples. ILE and outcome expectancy had direct positive effects on volition, while FLE and social networking did not. Both learning experiences had indirect effects on AEV through social networking and outcome expectancy. The group who spent above 100 hours in formal learning had a moderating effect on the relationship between FLE and outcome variables compared to those who spent less than 50 hours. Considering the limited middle-aged adults' digital accessibility, developing user-friendly distance education guidelines, supporting social networking and ILE, and tailoring programs to individual expectations are required to encourage agricultural entrepreneurship. Combining career transition perspective and migration perspective, this article contributes to a theoretical framework explaining urban middle-aged adults' agricultural entrepreneurship. This paper approaches middle-aged adults' agricultural entrepreneurship as a career transition event for their old stage of life and quantifies determinants of AEV during COVID-19. [ABSTRACT FROM AUTHOR]