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We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recently used to reconstruct ICs at the 130 nm technology node, but to increase imaging speed to more practical levels, the detector efficiency needs to be improved. For this reason, we are building a spectrometer that will eventually contain 3,000 TES microcalorimeters read out with microwave superconducting quantum interference device (SQUID) multiplexing, and we currently have commissioned a 1,000 TES subarray. This still represents a significant improvement from the 240-pixel system and allows us to begin characterizing the full spectrometer performance. Of the 992 maximimum available readout channels, we have yielded 818 devices, representing the largest number of TES x-ray microcalorimeters simultaneously read out to date. These microcalorimeters have been optimized for pulse speed rather than purely energy resolution, and we measure a FWHM energy resolution of 14 eV at the 8.0 keV Cu K$\alpha$ line., Comment: 5 pages, 4 figures, submitted to IEEE Transactions on Applied Superconductivity

Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer. Our approach uses the highly focused SEM electron beam to generate a small x-ray generation region in a carefully designed target layer that is placed over the sample being tested. With the high collection efficiency and resolving power of a TES spectrometer, we can isolate x-rays generated in the target from background and trace their paths through regions of interest in the sample layers, providing information about the various materials along the x-ray paths through their attenuation functions. We have recently demonstrated our approach using a 240 Mo/Cu bilayer TES prototype instrument on a simplified test sample containing features with sizes of $\sim$1 $\mu$m. Currently, we are designing and building a 3000 Mo/Au bilayer TES spectrometer upgrade, which is expected to improve the imaging speed by factor of up to 60 through a combination of increased detector number and detector speed., Comment: 5 pages, 3 figures, published in IEEE Transactions on Applied Superconductivity

Superconducting transition-edge sensor (TES) microcalorimeters have great utility in x-ray applications owing to their high energy resolution, good collecting efficiency and the feasibility of being multiplexed into large arrays. In this work, we develop hard x-ray TESs to measure the absolute energies of muonic-argon ($\mu$-Ar) transition lines around 44 keV and 20 keV. TESs with sidecar absorbers of different heat capacities were fabricated and characterized for their energy resolution and calibration uncertainty. We achieved ~ 1 eV absolute energy measurement accuracy at 44 keV, and < 12 eV energy resolution at 17.5 keV.

We report measurements of the 103-keV and 159-keV gamma ray signatures of 242Pu using microcalorimetry. This is the first observation of these gamma rays in a non-destructive measurement of an unprepared sample, and so represents an important advance in nuclear material accountancy. The measurement campaign also serves as the first demonstration of a field campaign with a portable microcalorimeter gamma-ray spectrometer. For the 103-keV gamma ray we report an improved centroid energy and emission probability., Comment: 6 pages, 7 figures

With the high resolution of microcalorimeter detectors, previously unresolvable gamma-ray lines are now clearly resolvable. A careful measurement of Am-241 decay with a large array of gamma-ray microcalorimeters has revealed never before seen or predicted gamma lines at 207.72 +/- 0.02 keV and 208.21 +/- 0.01 keV. These results were made possible by new microwave-multiplexing readout to increase the array size and improved analysis algorithms to eliminate spectral artifacts. We suggest nuclear levels from which these gamma-rays might originate and calculate branching ratios for these transitions from measurements of both mixed Pu-Am standards and a pure Am-241 source. These results have implications for nuclear material safeguards and accounting, particularly for microcalorimeter gamma spectrometers, which are now being adopted in nuclear safeguards analytical laboratories., Comment: 7 pages, 4 figures, 2 tables

Photon branching ratios are critical input data for activities such as nuclear materials protection and accounting because they allow material compositions to be extracted from measurements of gamma-ray intensities. Uncertainties in these branching ratios are often a limiting source of uncertainty in composition determination. Here, we use high statistics, high resolution (~60-70eV full-width-at-half-maximum at 100 keV) gamma-ray spectra acquired using microcalorimeter sensors to substantially reduce the uncertainties for 11 plutonium (238Pu,239Pu,241Pu) and 241Am branching ratios important for material control and accountability and nuclear forensics in the energy range of 125 keV to 208 keV. We show a reduction in uncertainty of over a factor of three for one branching ratio and a factor of 2{3 for four branching ratios., Comment: 25 pages, 6 figures, 7 tables

The Lynx x-ray microcalorimeter (LXM) is an imaging spectrometer for the Lynx satellite mission, an x-ray telescope being considered by NASA to be a new flagship mission. Lynx will enable unique astrophysical observations into the x-ray universe due to its high angular resolution and large field of view. The LXM consists of an array of over 100,000 pixels and poses a significant technological challenge to achieve the high degree of multiplexing required to read out these sensors. We discuss the details of microwave superconducting quantum interference device (SQUID) multiplexing and describe why it is ideally suited to the needs of the LXM. This case is made by summarizing the current and predicted performance of microwave SQUID multiplexing and describing the steps needed to optimize designs for all the LXM arrays. Finally, we describe our plan to advance the technology readiness level (TRL) of microwave SQUID multiplexing of the LXM microcalorimeters to TRL-5 by 2024.