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A novel composite control method for actuated chamber air pressure of pneumatic microfluidic chip via a three-way electromagnetic microvalve is presented in this paper. The purpose of the control methods is to improve air pressure controlling precision for pneumatic control. By using the Bang-Bang (on-off) controller for pneumatic control, the step-response time, air pressure steady-state accuracy, and air pressure fluctuations are performed with different maximum thresholds and minimum thresholds. Moreover, by using the k (proportional ) plus PWM (Pulse-Width Modulation) control method for pneumatic control, the step-response time, air pressure steady-state accuracy, and air pressure fluctuations are performed with different carrier frequencies and carrier amplitudes. Both advantages and disadvantages of the two control methods are compared and analyzed based on the experimental data. According to the variable volume of the actuated chamber and the response characteristics of the three-way electromagnetic microvalve, the composite control method of the Bang-Bang plus k plus PWM is developed to control the actuated chamber air pressure. The experimental results show that when the absolute air pressure of the actuated chamber is set to 150kPa, the rising time is 69.3ms, which is about 8.0ms shorter than that of the k+PWM control method alone. The steady-state error is reduced from 0.90kPa to 0.65kPa, and the air pressure steady-state fluctuation is reduced from 1.60kPa to 0.90kPa, compared with the Bang-Bang control method alone.

The compact, simple, and fast-reaction pneumatic microactuator is significant for the integration and high efficiency of pneumatic systems. In this work, the structure, working principle, and multiphysical model of an on-chip pneumatic microactuator are presented. The on-chip pneumatic microactuator is mainly composed of two parts: a polydimethylsiloxane (PDMS) thin membrane and an actuated chamber. The air pressure in the actuated chamber drives the thin elastic membrane to deformation. Dynamic response mathematical models of the actuated chamber for charging and exhaust with variable volume are established, and the deformation characteristics of the polydimethylsiloxane (PDMS) actuated membrane, the capacity of the actuated chamber, and the valve opening of the on-off membrane microvalve are simulated and analyzed to explore the response characteristics of the proposed pneumatic microactuator. Samples valving analysis of the on-chip membrane microvalve and mixing performance of the micromixer integrated with the pneumatic microactuator are tested to evaluate the driving capability of the pneumatic microactuator, and the results show that the response performance of the actuated time fully satisfies the needs of a pneumatic microfluidic chip for most applications.

A compact, rapid, and portable off-chip pneumatic control valve is significant for the miniaturization and integration of external pneumatic systems for microfluidic chips. In this work, an off-chip microvalve with a high-speed electromagnetic switch actuator and a polydimethylsiloxane (PDMS) material valve body has been designed to be easily encapsulated, simulated using MATLAB/Simulink software, and tested in a micromixer. Multi-physical coupling mathematical models are developed based on the elastic deformation force of the valve membrane, the driving force of the valve core, and the fluid force in the microchannel. Two single microvalves are used to form a three-way microvalve, which can control the air pressure in a pneumatic microchannel on the microfluidic chip. The relationship between the flow–duty cycle, the flow–pressure difference of the single electromagnetic microvalve, and the load pressure of the three-way microvalve is simulated and analyzed. Sample mixing performance controlled by the proposed off-chip three-way microvalve was tested to evaluate the pneumatic control capability, and the results show that the undertaking can fully satisfy the needs of a pneumatic microfluidic chip for most applications.