1. Temperature Sensing Diode in InP-Based Photonic Integration Technology
- Author
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Wenjing Tian, Bart Bas, Dylan Harmsen, Kevin Williams, and Xaveer Leijtens
- Subjects
Diodes ,photonic integrated circuits ,temperature sensor ,thermal management ,Applied optics. Photonics ,TA1501-1820 ,Optics. Light ,QC350-467 - Abstract
The integration of temperature sensors directly onto photonic platforms facilitates the thermal management of advanced photonic integrated circuits. This paper presents monolithic temperature sensors on the indium-phosphide-based photonic integration technology. Two distinct sensors were developed using p-i-n diode junctions with different waveguide core layers, one composed of multiple quantum wells and the other of bulk indium gallium arsenide phosphide. Introducing these sensors to an indium-phosphide-based generic foundry platform required zero process modifications. Theoretical, simulation, and measurement results consistently reveal a linear relationship between the forward voltage of the sensors and temperature under constant current biasing. The measurement results highlight that the compact sensors with dimensions of 30 × 10 $\mu$m achieve the highest sensitivity of $-$2.1 mV/K. These sensors boast a simple structure, easy operation, straightforward temperature interpretation, and high compatibility with the foundry process. They present immunity to on-chip (stray) light, a critical feature when operating alongside integrated lasers. The results demonstrate the feasibility of local temperature measurement and monitoring of photonic integrated circuits.
- Published
- 2024
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