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Plasma etching is a crucial step in semiconductor manufacturing. High cleanliness and wafer‐to‐wafer reproducibility in the etching chamber are essential in order to successfully achieve nanometer‐sized integrated functions on the wafer. The trend toward the application of more aggressive plasma compositions leads to higher demands on the plasma resistance of the materials used in the etching chamber. Due to its excellent etch resistance, yttrium aluminum garnet Y3Al5O12 (YAG) is starting to replace established materials like SiO2 or Al2O3 in this kind of application. In this study, reactive spark plasma sintering (SPS) was used to manufacture highly dense YAG ceramics from the respective oxides. In addition, yttrium was replaced with heavier lanthanoids (Er, Lu), intending to investigate the role of the A‐site cation in the garnet type structure on the plasma erosion behavior. The produced materials were exposed to fluorine‐based etching plasmas mimicking the conditions in the semiconductor manufacturing apparatus and the erosion behavior was characterized by atomic force microscopy (AFM), secondary ion mass spectrometry (SIMS), transmission electron microscopy (TEM), and profilometry. The induced chemical gradient in the samples is limited to a few nanometers below the surface, which makes its characterization challenging. For advanced analysis, we developed a correlative characterization method combining SIMS and scanning TEM (STEM)–energy‐dispersive spectroscopy (EDS) enabling us to examine the structural and chemical changes in the reaction layer locally resolved. In the case of lanthanoid aluminates, an altered reaction layer and reduced fluorine penetration compared to YAG were found. However, a correlation between the characteristics of the induced chemical gradient and the determined physical erosion rates was not evident. [ABSTRACT FROM AUTHOR]

Using the well known Rn ratio method, a protocol has been elaborated for determining the lattice direction for the 15 most common cubic zone axis spot patterns. The method makes use of the lengths of the three shortest reciprocal‐lattice vectors in each pattern and the angles between them. No prior pattern calibration is required for the method to work, as the Rn ratio method is based entirely on geometric relationships. In the first step the pattern is assigned to one of three possible pattern types according to the angles that are measured between the three reciprocal‐lattice vectors. The lattice direction [uvw] and possible Bravais type(s) and Laue indices of the corresponding reflections can then be determined by using lookup tables. In addition to determining the lattice direction, this simple geometric analysis allows one to distinguish between the P, I and F Bravais lattices for spot patterns aligned along [013], [112], [114] and [233]. Moreover, the F lattice can always be uniquely identified from the [011] and [123] patterns. [ABSTRACT FROM AUTHOR]

The efficiency and robustness of selective catalytic reduction (SCR) by NH3 catalysts for exhaust gas purification, especially of heavy-duty diesel engines, will continue to play a major role, despite the increasing electrification of powertrains. With that in mind, the effect of the synthesis scale on commercially available Cu-exchanged chabazite catalysts for SCR was investigated through physicochemical characterizations and catalytic tests. During hydrothermal aging, both industrial and lab-scale prepared catalysts underwent structural dealumination of the zeolite framework and redistribution of the Al sites. Although both catalysts demonstrated similar NO conversion activity under SCR conditions, the lab-scale catalyst showed higher selectivity and lower activity in NH3 oxidation. Variations in N2O formation and NH3 oxidation rate were found to correlate with the formation of different copper species, and the compositions become less controllable in industrial-scale process. This case study focused on routes of ion exchange, and the results provide new insights into catalytic performance of the industrially-produced zeolites. [ABSTRACT FROM AUTHOR]

In displaying accelerated oxygen diffusion along extended defects, (La,Sr)MnO3+δ is an atypical acceptor‐doped perovskite‐type oxide. In this study, 18O/16O diffusion experiments on epitaxial thin films of La0.8Sr0.2MnO3+δ and molecular dynamics (MD) simulations are combined to elucidate the origin of this phenomenon for dislocations: Does diffusion occur along dislocation cores or along space‐charge tubes? Transmission electron microscopy studies of the films revealed dislocations extending from the surface. 18O penetration profiles measured by secondary ion mass spectrometry indicated (slow) bulk diffusion and faster diffusion along dislocations. Oxygen tracer diffusivities obtained for temperatures 873 ≤ T [K] ≤ 973 were over two orders of magnitude higher for dislocations than for the bulk. The activation enthalpy of oxygen diffusion along dislocations, of (2.95 ± 0.21) eV, is surprisingly high relative to that for bulk diffusion, (2.67 ± 0.13) eV. This result militates against fast diffusion along dislocation cores. MD simulations confirmed no accelerated migration of oxide ions along dislocation cores. Faster diffusion of oxygen along dislocations in La0.8Sr0.2MnO3+δ is thus concluded to occur within space‐charge tubes in which oxygen vacancies are strongly accumulated. Reasons for and the consequences of space‐charge zones at extended defects in manganite perovskites are discussed. [ABSTRACT FROM AUTHOR]

The washcoat composition and the catalytic properties of two commercially available lean NOx traps (LNTs) were investigated. Both catalysts contained nominally the same NOx storage and catalytic materials but differed strongly in their amount and activity as well as in the composition of their layered washcoat architecture. In lean‐rich cycle experiments under realistic engine‐out gas compositions using a laboratory gas test bench, the LNTs showed comparable NOx storage behavior. At temperatures below 250 °C, the lean phase durations last up to 300 s until 50 % of the NOx storage capacity is reached. The simultaneously calculated NOx storage efficiencies drop rapidly below 35 %, resulting in a high NOx slip. Strong variations were observed in N2O and NH3 selectivity and in CO slip during regeneration of both LNTs caused by the different oxygen storage capacity (OSC), water gas shift (WGS) activity and rhodium distribution in the catalytic layers. Based on the obtained results, proposals were made to optimize the storage and regeneration performance, leading to highly efficient LNT catalysts for coupling with a downstream SCR catalyst. [ABSTRACT FROM AUTHOR]

The existence of a polishing-induced damaged zone at the surface of standard, nominally undoped, single-crystal SrTiO3 is exploited in diffusion studies in order to investigate the interaction between oxygen vacancies and dislocations. Tracer diffusion profiles for such crystals are proposed to exhibit three features: a short feature arising from a surface space-charge layer; an intermediate, longer feature arising from the high density of dislocations in the damaged zone; and finally, a much longer feature corresponding to diffusion in the homogeneous bulk crystal. Quantitative information is provided by finite-element-method calculations. First, the distribution of oxygen vacancies in a sample in which space-charge zones depleted of oxygen vacancies form at dislocations and at the sample surface is calculated; subsequently, oxygen tracer diffusion profiles for such vacancy distributions are simulated. The proposed model is experimentally validated by performing conventional oxygen isotope exchange and depth-profiling experiments on commercial single-crystal SrTiO3. In this way, we confirm directly that arrays of dislocations in acceptor-doped SrTiO3, by virtue of the attendant space-charge tubes, hinder the diffusion of oxygen. Finally, in order to aid the prediction of oxygen tracer diffusion profiles in polished perovskite single-crystal substrates, we suggest a one-dimensional continuum approach that takes account of the complex, three-dimensional diffusion problem posed by dislocation arrays with depletion space-charge tubes. [ABSTRACT FROM AUTHOR]