1. Coalescence as a key process in wafer-scale diamond heteroepitaxy.
- Author
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Lebedev, Vadim, Kustermann, Jan, Engels, Jan, Weippert, Jürgen, Cimalla, Volker, Knittel, Peter, Kirste, Lutz, Giese, Christian, Quellmalz, Patricia, Graff, Andreas, and Jeske, Jan
- Subjects
DIAMOND thin films ,CRYSTAL grain boundaries ,CHEMICAL vapor deposition ,DIAMOND crystals ,CRYSTAL orientation ,DIAMONDS ,EPITAXY ,CARBON nanotubes - Abstract
Due to fascinating physical properties powered by remarkable progress in chemical vapor deposition of high-quality epilayers, diamond thin films attract great attention for fabrication of nitrogen-vacancy-based solid-state spin systems capable of operating in ambient conditions. To date, diamond heteroepitaxy via bias-enhanced nucleation is an unavoidable method for reliable wafer-scale film manufacturing. In this work, we analyze the coalescence phenomena in nitrogen doped, heteroepitaxial diamond epilayers, with a particular focus on their specific role in the annihilation of macroscopic crystal irregularities such as grain boundaries, non-oriented grains, and twinned segments. Here, we also report on the growth mechanism for the "primary" crystal orientation along with a predominant formation of two different types of boundaries highlighting the {011}-type as a main source of the crystal lattice irregularities. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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