1. Production and characterization of [Tm.sup.3+]/[Yb.sup.3+] codoped pedestal-type Pbo-Ge[O.sub.2] waveguides
- Author
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de Assumpcao, T.A.A., Alvarado, M.A., Alayo, M.I., and Kassab, L.R.P.
- Subjects
Thin films -- Usage ,Lead compounds -- Usage ,Waveguides -- Design and construction ,Engineering design -- Methods ,Dielectric films -- Usage ,Germanium -- Usage ,Physics - Abstract
This work explores the production and characterization of pedestal-type active waveguides based on PbO-Ge[O.sub.2] (PGO) thin films codoped with [Tm.sup.3+]/[Yb.sup.3+] rare earth ions. Silicon wafers containing around 1.7 µm of Si[O.sub.2] thickness were used as substrate, and the pedestal structure was obtained by conventional photolithography and plasma etching in a reactive ion etching reactor. Plasma etching procedures were made in steps to reduce roughness at the laterals and sidewalls of waveguides. Around 0.5 µm of [Tm.sup.3+]/[Yb.sup.3+] codoped PGO thin film was obtained by radio frequency magnetron sputtering deposition after etching procedures. Results of scanning electron microscopy confirmed the waveguide pedestal profile. Optical propagation losses around 4, 5, and 20 dB/cm were observed at 1050, 633, and 543 nm, respectively, for waveguide width in the 30-100 µm range. Near field profiles at these wavelengths and also at 980 nm are also reported and confirmed the multimode coupling behavior. The present results corroborate the possibility of using [Tm.sup.3+]/[Yb.sup.3+] codoped PGO thin films as active waveguides for photonic applications. PACS Nos.: 78.66.Jg, 42.82.Et, 81.15.Cd. Nous etudions ici la production et la caracterisation de guides d'onde actifs sur socle, bases sur des films minces de PbO-Ge[O.sub.2] (PGO) co-dopes aux ions de terres rares [Tm.sup.3+]/[Yb.sup.3+]. Des plaques de silicium avec une couche de Si[O.sub.2] de 1.7 µm sont utilisees comme substrats et le socle est obtenu par photolithographie conventionnelle et par gravure dans un reacteur de type reactive ion etching. Les procedures de gravure au plasma se font par etapes, afin de reduire la rugosite de surface des murs du guide d'onde. Suivant les procedures de gravure, le co-dopage autour de 0.5 µm du film de PGO par [Tm.sup.3+]/[Yb.sup.3+], est depose par pulverisation dans un magnetron a radio frequence. Le microscope electronique a balayage confirme le profile de guide d'onde sur socle. Nous observons des pertes de 4,5 et 20 dB/cm a 1050, 633 et 543 nm respectivement, pour un guide d'onde d'une largeur de 30 a 100 µm. Nous rapportons des profiles de champ proche a ces longueurs d'onde et confirmons le couplage multimode. Nos resultats corroborent la possibilite d'utiliser des films minces de PGO co-dopes avec [Tm.sup.3+]/[Yb.sup.3+] comme guides d'onde actifs en photonique. [Traduit par la Redaction], 1. Introduction Pedestal-type waveguides show promising applications in integrated optics and photonics because their characteristics are favorable for high confinement of optical field and fabrication of laser microcavities [1-3]. They [...]
- Published
- 2014
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