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8. The photolysis of pure and mixed palladium acetate thin films

Author

Töpper, M., Stolle, T., Wäsche, M., and Publica

Abstract

The photochemical features of pure Palladium acetate thin films, thin films of BCB prepolymers, mixtures of both and mixtures of Palladium acetate with 2.6-Bis have been investigated by UV-Vis- and XPS-spectrometry. The Pd2+-ions of these films show no change of their oxidation level by exposition to light of 222 or 254nm. In contrast to laser exposition, the organic part of the Palladium acetate molecule is not destroyed, but cross-linked. The components of mixed layers with Palladium acetate mentioned above show an activation effect to light of wavelengths up to 365 snf 436 nm. A process for maufacturing metallic microstructures by use of standard aligner technology used in microelectronics is described.

Published
1996

13. Thermoluminescence and ESCA investigations in polymer resist layers.

Author

Kilian, H.-G., Lagaly, G., Chudáček, I., Kunze, R., Wäsche, M, and Linke, E.

Abstract

Radiation chemical processes in poly(methacrylate) and chlorinated polyphenylmethacrylate after ion- and electron-beam irradiation are analyzed by means of TL- and ESCA-measurements. The results are in accordance with proposed models for degradation and crosslinking mechanisms of the polymers. A correlation is found between the TL intensity and the sensitivity of positive resists based on poly(methacrylates). [ABSTRACT FROM AUTHOR]

Published
1988
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