22 results on '"Voloshin, D. G."'
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2. H − production in hydrogen DC glow discharge.
3. Construction and validation of C3F8 electron impact and heavy particle reaction scheme for modeling plasma discharges.
4. Simulation of an Inductive Discharge in Argon with the Gas Flow and Inhomogeneous Gas Temperature
5. Determination of plasma density from data on the ion current to cylindrical and planar probes
6. Plasmachemical and heterogeneous processes in ozonizers with oxygen activation by a dielectric barrier discharge
7. Vibrationally Excited Ozone in Kinetics of O/N/Ar Mixtures after Ozone Photolysis.
8. Ozone production and losses in N2/O2 mixtures in an ozone generator
9. Nonstationary effects in ozone generation by barrier discharges in N2/O2 mixtures
10. Measurements of the populations of metastable and resonance levels in the plasma of an RF capacitive discharge in argon
11. Dynamics of Ar metastable and resonance states in pulsed capacitively coupled plasmas
12. ICP argon discharge simulation: The role of ion inertia and additional RF bias
13. Determination of the excited argon states densities in high-frequency capacitive discharge
14. Interaction of O and H Atoms with low-k SiOCH films pretreated in He plasma
15. The effect of He plasma treatment on properties of organosilicate glass low-k films.
16. Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films
17. Low-kfilms modification under EUV and VUV radiation
18. Two modes of capacitively coupled rf discharge in CF4
19. Interaction of O and H Atoms with low-k SiOCH films pretreated in He plasma
20. Interaction of O and H Atoms with low- k SiOCH films pretreated in He plasma.
21. Low-k films modification under EUV and VUV radiation.
22. Development of the electron impact cross section set for CHF3. Monte Carlo simulation of the swarm experiments in pure CHF3 and CHF3/Ar mixtures.
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