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The numerical simulation and selection of optimal parameters of the diffraction grating for a newly developed technology for the manufacture of plane waveguide systems are performed. In contrast to the use of ready-made silicon wafers on an insulator, the new technology has been developed for the manufacture of a fully autonomous radiation input system, a coupling element and the waveguide itself. A general description of the technology of the ‘radiation input – propagation – radiation output’ system is given. Concrete fabrication parameters of the lattice height, the substrate and coating layers are found. The coupling efficiency of radiation input into the waveguide is found to be 30%.