Future astronomical projects on large space x-ray imaging telescopes require novel substrates and technologies for the construction of their reflecting mirrors. The mirrors must be lightweight and precisely shaped to achieve large collecting area with high angular resolution. The new materials and technologies must be cost-effective. Currently, the most promising materials are glass or silicon foils. We focused on precise shaping these foils by thermal forming process. We studied free and forced slumping in the temperature region of hot plastic deformation and compared the shapes obtained by the different slumping processes. We measured the shapes and the surface quality of the foils. In the experiments, we varied both heat-treatment temperature and time following our experiment design. The obtained data and relations we can use for modeling and optimizing the thermal forming procedure., {"references":["Q. D. Wang, E. V. Gotthelf and C. C. 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