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2. New palladium(II) β-ketoesterates for focused electron beam induced deposition: synthesis, structures, and characterization.

Author

Butrymowicz-Kubiak, A., Muzioł, T. M., Kaczmarek-Kędziera, A., Jureddy, C. S., Maćkosz, K., Utke, I., and Szymańska, I. B.

Subjects
ELECTRON beam deposition, MOLECULAR structure, THERMAL analysis, INFRARED spectroscopy, SUBSTRATES (Materials science)
Abstract

We report the synthesis and characterization of new palladium(II) β-ketoesterate complexes [Pd(CH3COCHCO2R)2] with alkyl substituents R = tBu, iPr, Et. These compounds can have potential use in focused electron beam induced deposition (FEBID), which is a direct write method for the growth of structures at the nanoscale. However, it is still a major challenge to obtain deposits with a high metal content, and new precursor molecules are needed to overcome this. Single crystal X-ray diffraction, infrared spectroscopy, nuclear magnetic resonance spectroscopy, and density-functional theory calculations were used to confirm the compounds' composition and structure. Using thermal analysis and sublimation experiments, we investigate their thermal stability and volatility. These studies show that the palladium complexes sublimate over the range 348–353 K under 10−2 mbar pressure. The electron-induced decomposition of the complex molecules in the gas phase and their thin layers on silicon substrates were analysed using electron impact mass spectrometry (EI MS) and microscopy studies (SEM/EDX). They confirm that the precursor electron-induced fragmentation depends on the molecular structure. The obtained results reveal that [Pd(CH3COCHCO2tBu)2] with cis-positioned tert-butyl groups may be a promising FEBID precursor, and we carried out preliminary deposition experiments using this compound. [ABSTRACT FROM AUTHOR]

Published
2024
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5. Roadmap for focused ion beam technologies

Author

Höflich, K., Hobler, G., Allen, F.I., Wirtz, T., Rius, G., Krasheninnikov, A.V., Schmidt, Matthias, Utke, I., Klingner, N., Osenberg, M., McElwee-White, L., Córdoba, R., Djurabekova, F., Manke, I., Moll, P.J.W., Manoccio, M., De Teresa, J.M., Bischoff, L., Michler, J., De Castro, O., Delobbe, A., Dunne, P., Dobrovolskiy, O.V., Freese, N., Gölzhäuser, A., Mazarov, P., Möller, W., Pérez-Murano, F., Philipp, P., Vollnhals, F., Hlawacek, G., Höflich, K., Hobler, G., Allen, F.I., Wirtz, T., Rius, G., Krasheninnikov, A.V., Schmidt, Matthias, Utke, I., Klingner, N., Osenberg, M., McElwee-White, L., Córdoba, R., Djurabekova, F., Manke, I., Moll, P.J.W., Manoccio, M., De Teresa, J.M., Bischoff, L., Michler, J., De Castro, O., Delobbe, A., Dunne, P., Dobrovolskiy, O.V., Freese, N., Gölzhäuser, A., Mazarov, P., Möller, W., Pérez-Murano, F., Philipp, P., Vollnhals, F., and Hlawacek, G.

Abstract

The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques and applications. By viewing FIB developments through the lens of the various research communities, we aim to identify future pathways for ion source and instrumentation development as well as emerging applications, and the scope for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interests and will support future fruitful interactions connecting tool development, experiment and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

Published
2023

15. Gold elliptical nanoantennas as probes for near field optical microscopy.

Author

Sqalli, O., Utke, I., Hoffmann, P., and Marquis-Weible, F.

Subjects
*GOLD, *MICROSCOPY, *RESONANCE, *LIGHT
Abstract

We investigate the light scattering by individual nanometer-sized gold particles attached at the apex of fiber-based probes for near field optical microscopy. The dependence of the light scattering by the gold nanoparticle on the wavelength, the shape, and the surrounding medium dielectric profile are theoretically described and experimentally investigated, demonstrating that the tuning of the particle's size and shape plays a crucial role in the light scattering process. In the case of gold spherical nanostructures, the plasmon resonance occurs at 540 nm in air, and 600 nm in water. A higher surrounding medium refraction index leads to a redshift of the plasmon resonance in the gold particle. Moreover, for elliptical structures, the orientation of the polarization of the incident field, as well as the relative ratio of the ellipse dimensions along its main axis, govern the position of the plasmon resonances. The light transmission spectrum for several probes where a single elliptical gold particle has been grafted exhibits at least one resonance in the range 600-650 nm. Surface plasmon resonances are of importance for the field enhancement at the end of the modified tip, thus leading to improvement of the achievable resolution for near field optical microscopy. An optimized design of the metallic nanostructure deposited at the apex of the near field probe is needed to maximize the resonance and would therefore lead to a high-performance probe for scanning near field optical microscopy. [ABSTRACT FROM AUTHOR]

Published
2002
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19. Continuum models of focused electron beam induced processing

Author

Toth, M, Lobo, C, Friedli, V, Szkudlarek, A, Utke, I, Toth, M, Lobo, C, Friedli, V, Szkudlarek, A, and Utke, I

Abstract

© 2015 Toth et al. Focused electron beam induced processing (FEBIP) is a suite of direct-write, high resolution techniques that enable fabrication and editing of nanostructured materials inside scanning electron microscopes and other focused electron beam (FEB) systems. Here we detail continuum techniques that are used to model FEBIP, and release software that can be used to simulate a wide range of processes reported in the FEBIP literature. These include: (i) etching and deposition performed using precursors that interact with a surface through physisorption and activated chemisorption, (ii) gas mixtures used to perform simultaneous focused electron beam induced etching and deposition (FEBIE and FEBID), and (iii) etch processes that proceed through multiple reaction pathways and generate a number of reaction products at the substrate surface. We also review and release software for Monte Carlo modeling of the precursor gas flux which is needed as an input parameter for continuum FEBIP models.

Published
2015

20. ALD/ECD Enabled Urchin-Inspired Architectures for Solar Cells

Author

Elias, J., Utke, I., Yoon, S., Bechelany, Mikhael, Weidenkaff, Anke, Johann, Michler, Philippe, Laëtitia, FALQUE, Philippe, Institut Européen des membranes (IEM), Centre National de la Recherche Scientifique (CNRS)-Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Université Montpellier 2 - Sciences et Techniques (UM2)-Institut de Chimie du CNRS (INC)-Université de Montpellier (UM), Empa, Swiss Fed Labs Mat Sci & Technol, Lab Solid State Chem & Catalysis, CH-8600 Dubendorf, Switzerland, Swiss Federal Laboratories for Materials Science and Technology [Thun] (EMPA), and Swiss Federal Laboratories for Materials Testing and Research

Subjects
[CHIM] Chemical Sciences, [CHIM]Chemical Sciences, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2013

22. Grippers and surfaces structuring for micro and nanomanipulation

Author

Bechelany, Mikhael, Philippe, L., Utke, I., Michler, J., Institut Européen des membranes (IEM), Centre National de la Recherche Scientifique (CNRS)-Ecole Nationale Supérieure de Chimie de Montpellier (ENSCM)-Université Montpellier 2 - Sciences et Techniques (UM2)-Institut de Chimie du CNRS (INC)-Université de Montpellier (UM), Ecole Polytechnique Fédérale de Lausanne (EPFL), Swiss Federal Laboratories for Materials Science and Technology [Thun] (EMPA), and FALQUE, Philippe

Subjects
[CHIM] Chemical Sciences, [CHIM]Chemical Sciences, ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2010

24. Spectral analysis in the visible range of light transmission through sub-wavelenght annular apertures arrays in gold films

Author

Salvi, J., Poujet, Y., Roussey, M., Baida, F.I, Van Labeke, D., Perentes, A., Utke, I., Hoffmann, P., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Institute of Atomic Physics, and Université de Roumanie

Published
2005

25. Supertransmission through an annular aperture array : explanation of the transmission and first experimental results

Author

Baida, F.I., Salvi, J., Bernal, M.-P., Vanlabeke, D., Guizal, B., Roussey, M., Perentes, A., Utke, I., Leutenegger, M., Sandu, C., Hoffmann, P., Dwir, B., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), and Université libre de Bruxelles (ULB)

Subjects
[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
Published
2004

26. Optical spectroscopy of rare-earth ions doped KY(WO4)2 thin films

Author

García-Revilla, S., Valiente, R., Romanyuk, Y.E., Utke, I., and Pollnau, Markus

Subjects
IR-70263, EWI-17645, IOMS-APD: Active Photonic Devices
Abstract

KY(WO4)2 thin films doped with Dy3+, Tb3+, Yb3+, were grown onto KY(WO4)2 substrates using liquid-phase epitaxy. Spectroscopic investigations of the grown layers were performed. Obtained results were compared with spectra given for bulk crystals. Upconversion experiments after direct Yb3+ excitation in Dy3+-Yb3+ and Tb3+-Yb3+ codoped layers will be also presented.

Published
2004

27. Fabrication of periodic sub–wavelength nano–structures in a 150 nm thick gold layer on glass slides for optical studies

Author

Perentes, A., Utke, I., Leutenegger, M., Sandu, C., Hoffmann, P., Dwir, B., Baida, F.I, Bernal, M.-P., Roussey, M., Salvi, J., Van Labeke, D., Institute of Atomic Physics, Université de Roumanie, Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Published
2004

28. Tamis à photons à cavités coaxiales sub–longueurs d'onde

Author

Baida, F.I, Salvi, J., Bernal, M.-P., Van Labeke, D., Guizal, B., Roussey, M., Perentes, A., Utke, I., Sandu, C., Dwir, B., Hoffmann, P., Lesuffleur, A., Assime, A., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)

Published
2004

29. Analyse spectrale de la lumière à travers une matrice d'ouvertures coaxiales sub longueur d'onde

Author

Roussey, M., Salvi, J., Baida, F.I, Bernal, M.-P., Van Labeke, D., Heinis, D., Perentes, A., Utke, I., Hoffmann, P., Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Institut de théorie des phénomènes physiques (EPFL), and Ecole Polytechnique Fédérale de Lausanne (EPFL)

Published
2004

30. Low-temperature liquid phase epitaxy of rare-earth-ion doped KY(WO4)2 thin layers

Author

Romanyuk, Y.E., Utke, I., Ehrentraut, D., Pollnau, Markus, Garcia-Revilla, S., Valiente, R., and Kuleshov, N.V.

Subjects
EWI-17686, IOMS-APD: Active Photonic Devices, IR-70414
Abstract

Rare-earth-ion doped KY(WO4)2 (hereafter KYW) is a promising material for novel solid-state lasers. Low laser threshold, high efficiency, high output powers, and third-order nonlinear effects have stimulated research towards miniaturized thin-film waveguide lasers and amplifiers for future photonic devices. Active films can be fabricated by liquid-phase epitaxy (LPE), pulsed laser deposition, ion implantation, and diffusion bonding. We report here on the low-temperature liquid-phase epitaxy of KYW:RE3+ single crystalline layers (RE = Tb, Dy, Yb). Undoped KYW crystals grown by a modified Czochralski method with laser-grade polished (010) faces were used as substrates. The ternary chloride eutectic NaCl-KCl-CsCl with a melting temperature of 482oC was employed as a solvent. This flux dissolves all the solute components, possesses low viscosity and volatility, is non-toxic and available in high purities. The layers were grown at start temperatures as low as 540°C, which is favorable in order to decrease the thermal stress due to the differences in thermal expansion coefficients of substrate and layer [4]. However, at high RE-dopant concentrations elastic stress due to the lattice parameter misfit between substrate and layer is often released by formation of a crack network along certain cleavage planes. Typically, the growth started with the nucleation of 3D islands, which then coalesced into a uniform epitaxial layer with areas of up to 1 cm2. X-ray diffraction measurements confirmed that the epilayers were strictly oriented in [010] direction. Elemental composition, nano-hardness, and elastic constants of the layers were determined. RE-ion incorporation into the KYW host decreases in the series Dy3+>Yb3+>Tb3+ according to the increasing misfit between the ion radii of RE and replaced Y3+ ion. The influence of solute concentration, growth temperature, and doping level was investigated in order to produce layers up to 20-µm thick and with low defect concentration, which can be suitable as optically activated waveguides.

Published
2004

31. Continuum modeling of electron beam induced processes

Author

Utke, I, Moshkalev, SA, Russell, P, Lobo, C, Toth, M, Utke, I, Moshkalev, SA, Russell, P, Lobo, C, and Toth, M

Abstract

Gas-mediated focused electron beam induced etching (FEBIE) and deposition (FEBID), collectively referred to here as FEBIED, permit nanoscale modification of surface material via chemical reactions involving electron-dissociated precursor molecules. Electrons crossing the solid-vacuum interface usually possess a wide range of energies, are capable of breaking most bonds in typical precursor adsorbates and dissociation products, and can therefore generate a wide range of mobile, chemically active species. Adsorption, desorption, diffusion, and dissociation of these species all contribute to the development of nanostructures fabricated by FEBIED processes. Furthermore, these nanostructures are often electron-sensitive, and thus their structure evolves during deposition. The wide range of processes behind FEBIED yields very complex behavior that is yet to be modeled realistically fifty years after Christy first proposed a simple analytical model of deposition induced by a broad (defocused) electron beam [1]. A complete description of FEBIED requires a realistic model of electron-gas and electron-solid interactions, the spatial and energy distributions of secondary and backscattered electrons, electron interactions with adsorbates, and the behavior of adsorbates and dissociation products at the solid-vacuum interface.

Published
2012

33. Nanohand: micro-nano system for automatic handling of nano-objects

Author

Fatikow, S., Eichhorn, V., Sill, A., Steinecker, A., Meyer, C., Occhipinti, L., Fahlbusch, S., Utke, I., Bøggild, Peter, Breguet, J. M., Kaufmann, R., Zadrazil, M., Barth, W., Fatikow, S., Eichhorn, V., Sill, A., Steinecker, A., Meyer, C., Occhipinti, L., Fahlbusch, S., Utke, I., Bøggild, Peter, Breguet, J. M., Kaufmann, R., Zadrazil, M., and Barth, W.

Published
2007

40. NanoHand: micro/nano system for automatic handling of nano-objects

Author

Fatikow, S., primary, Eichhorn, V., additional, Sill, A., additional, Steinecker, A., additional, Meyer, C., additional, Occhupinti, L., additional, Fahlbusch, S., additional, Utke, I., additional, Bøggild, P., additional, Breguet, J.-M., additional, Kaufmann, R., additional, Zadrazil, M., additional, and Barth, W., additional

Published
2007
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