1. Hydrodynamic simulation of laser ablation with electronic entropy effects included.
- Author
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Watanabe, Shuto, Akashi, Ryosuke, Ishikawa, Takahiro, Tanaka, Yuta, and Tsuneyuki, Shinji
- Subjects
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ULTRA-short pulsed lasers , *POLAR effects (Chemistry) , *HOT carriers , *MELTING points , *LASER ablation , *ULTRASHORT laser pulses - Abstract
In this paper, we present a methodology of laser ablation simulation including electronic entropy effects. Ablation by ultrashort laser pulses is suitable for micromachining because of its small thermal damage. To further enhance its effectiveness, it is crucial to explore both theoretically and experimentally the desirable conditions for processing. The density functional theory calculations predict that hot electrons make crystalline lattice thermodynamically unstable at electronic temperature roughly above 20 000 K due to the electronic entropy-driven mechanism. In our simulations, equations combining hydrodynamic equations and the two-temperature model are modeled and are numerically solved, where the electronic entropy effects are included as the electronic temperature-dependent latent heat, boiling point, and melting point. For metal targets, Al and Cu, the calculated ablation rates for 100 fs laser pulses agree with the experimental one at laser fluences up to 10 J/cm 2. The heat-affected zone (HAZ) is numerically evaluated from the thickness of the molten layer. Short pulses produce a high ablation rate and small HAZ because of the suppression of diffusion of the deposited pulse energy. Electronic entropy effects make a clear difference between 100 fs and 10 ps pulses. The calculation method presented in this paper serves as a useful tool for exploring nonequilibrium between electrons and ions in the equation of states for metals such as Al and Cu. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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