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High-fidelity qubit measurement is a critical element of all quantum computing architectures. In superconducting systems, qubits are typically measured by probing a readout resonator with a weak microwave tone which must be amplified before reaching the room temperature electronics. Superconducting parametric amplifiers have been widely adopted as the first amplifier in the chain, primarily because of their low noise performance, approaching the quantum limit. However, they require isolators and circulators to route signals up the measurement chain, as well as to protect qubits from amplified noise. While these commercial components are wideband and very simple to use, their intrinsic loss, size, and magnetic shielding requirements impact the overall measurement efficiency while also limiting prospects for scalable readout in large-scale superconducting quantum computers. Here we demonstrate a parametric amplifier that achieves both broadband forward amplification and backward isolation in a single, compact, non-magnetic circuit that could be integrated on chip with superconducting qubits. It relies on a nonlinear transmission line which supports traveling-wave parametric amplification of forward propagating signals, and isolation via frequency conversion of backward propagating signals. This kind of traveling-wave parametric amplifier and converter is poised to reduce the readout hardware overhead when scaling up the size of superconducting quantum computers.

Parametric amplifiers have become a workhorse in superconducting quantum computing, however research and development of these devices has been hampered by inconsistent, and sometimes misleading noise performance characterization methodologies. The concepts behind noise characterization are deceptively simple, and there are many places where one can make mistakes, either in measurement or interpretation and analysis. In this article we cover the basics of noise performance characterization, and the special problems it presents in parametric amplifiers with limited power handling capability. We illustrate the issues with three specific examples: a high-electron mobility transistor amplifier, a Josephson traveling-wave parametric amplifier, and a Josephson parametric amplifier. We emphasize the use of a 50-$\Omega$ shot noise tunnel junction (SNTJ) as a broadband noise source, demonstrating its utility for cryogenic amplifier amplifications. These practical examples highlight the role of loss as well as the additional parametric amplifier `idler' input mode.

Future quantum information processors require tunable coupling architectures that can produce high fidelity logical gates between two or more qubits. Parametric coupling is a powerful technique for generating tunable interactions between many qubits. Here, we present a highly flexible parametric coupling scheme with superconducting qubits that provides complete removal of residual $ZZ$ coupling and the implementation of driven SWAP or SWAP-free controlled-$Z$ (c$Z$) gates. Our fully integrated, 2D on-chip coupler design is only weakly flux tunable, cancels static linear coupling between the qubits, avoids internal coupler dynamics or excitations, and is extensible to multi-qubit circuit-QED systems. Exploring gate fidelity versus gate duration allows us to maximize two-qubit gate fidelity, while providing insights into possible error sources for these gates. Randomized benchmarking over several hours reveals that the parametric SWAP c$Z$ gate achieves an average fidelity of $99.44\pm 0.09$\% in a gate duration of 70~ns and a dispersively driven parametric SWAP-free c$Z$ gate attains an average fidelity of $99.47\pm 0.07$\% in only 30~ns. The fidelity remained above this value for over 8~hours and peaked twice with a maximum of $99.67\pm 0.14$\%. Overall, our parametric approach combines versatility, precision, speed, and high performance in one compact coupler design.

Cavity quantum electrodynamics (QED) with in-situ tunable interactions is important for developing novel systems for quantum simulation and computing. The ability to tune the dispersive shifts of a cavity QED system provides more functionality for performing either quantum measurements or logical manipulations. Here, we couple two transmon qubits to a lumped-element cavity through a shared dc-SQUID. Our design balances the mutual capacitive and inductive circuit components so that both qubits are highly decoupled from the cavity, offering protection from decoherence processes. We show that by parametrically driving the SQUID with an oscillating flux it is possible to independently tune the interactions between either of the qubits and the cavity dynamically. The strength and detuning of this cavity QED interaction can be fully controlled through the choice of the parametric pump frequency and amplitude. As a practical demonstration, we perform pulsed parametric dispersive readout of both qubits while statically decoupled from the cavity. The dispersive frequency shifts of the cavity mode follow the expected magnitude and sign based on simple theory that is supported by a more thorough theoretical investigation. This parametric approach creates a new tunable cavity QED framework for developing quantum information systems with various future applications, such as entanglement and error correction via multi-qubit parity readout, state and entanglement stabilization, and parametric logical gates., Comment: 7 pages, 4 figures

The act of observing a quantum object fundamentally perturbs its state, resulting in a random walk toward an eigenstate of the measurement operator. Ideally, the measurement is responsible for all dephasing of the quantum state. In practice, imperfections in the measurement apparatus limit or corrupt the flow of information required for quantum feedback protocols, an effect quantified by the measurement efficiency. Here we demonstrate the efficient measurement of a superconducting qubit using a nonreciprocal parametric amplifier to directly monitor the microwave field of a readout cavity. By mitigating the losses between the cavity and the amplifier we achieve a measurement efficiency of $72\%$. The directionality of the amplifier protects the readout cavity and qubit from excess backaction caused by amplified vacuum fluctuations. In addition to providing tools for further improving the fidelity of strong projective measurement, this work creates a testbed for the experimental study of ideal weak measurements, and it opens the way towards quantum feedback protocols based on weak measurement such as state stabilization or error correction.

Delivering on the revolutionary promise of a universal quantum computer will require processors with millions of quantum bits (qubits). In superconducting quantum processors, each qubit is individually addressed with microwave signal lines that connect room temperature electronics to the cryogenic environment of the quantum circuit. The complexity and heat load associated with the multiple coaxial lines per qubit limits the possible size of a processor to a few thousand qubits. Here we introduce a photonic link employing an optical fiber to guide modulated laser light from room temperature to a cryogenic photodetector, capable of delivering shot-noise limited microwave signals directly at millikelvin temperatures. By demonstrating high-fidelity control and readout of a superconducting qubit, we show that this photonic link can meet the stringent requirements of superconducting quantum information processing. Leveraging the low thermal conductivity and large intrinsic bandwidth of optical fiber enables efficient and massively multiplexed delivery of coherent microwave control pulses, providing a path towards a million-qubit universal quantum computer.

The measurement of a quantum system is often performed by encoding its state in a single observable of a light field. The measurement efficiency of this observable can be reduced by loss or excess noise on the way to the detector. Even a \textit{quantum-limited} detector that simultaneously measures a second non-commuting observable would double the output noise, therefore limiting the efficiency to $50\%$. At microwave frequencies, an ideal measurement efficiency can be achieved by noiselessly amplifying the information-carrying quadrature of the light field, but this has remained an experimental challenge. Indeed, while state-of-the-art Josephson-junction based parametric amplifiers can perform an ideal single-quadrature measurement, they require lossy ferrite circulators in the signal path, drastically decreasing the overall efficiency. In this paper, we present a nonreciprocal parametric amplifier that combines single-quadrature measurement and directionality without the use of strong external magnetic fields. We extract a measurement efficiency of $62_{-9}^{+17} \%$ that exceeds the quantum limit and that is not limited by fundamental factors. The amplifier can be readily integrated with superconducting devices, creating a path for ideal measurements of quantum bits and mechanical oscillators., Comment: 12 pages, 9 figures

We present a new optomechanical device where the motion of a micromechanical membrane couples to a microwave resonance of a three-dimensional superconducting cavity. With this architecture, we realize ultrastrong parametric coupling, where the coupling rate not only exceeds the dissipation rates in the system but also rivals the mechanical frequency itself. In this regime, the optomechanical interaction induces a frequency splitting between the hybridized normal modes that reaches 88% of the bare mechanical frequency, limited by the fundamental parametric instability. The coupling also exceeds the mechanical thermal decoherence rate, enabling new applications in ultrafast quantum state transfer and entanglement generation., Comment: 12 pages, 8 figures

The ability to engineer nonreciprocal interactions is an essential tool in modern communication technology as well as a powerful resource for building quantum networks. Aside from large reverse isolation, a nonreciprocal device suitable for applications must also have high efficiency (low insertion loss) and low output noise. Recent theoretical and experimental studies have shown that nonreciprocal behavior can be achieved in optomechanical systems, but performance in these last two attributes has been limited. Here we demonstrate an efficient, frequency-converting microwave isolator based on the optomechanical interactions between electromagnetic fields and a mechanically compliant vacuum gap capacitor. We achieve simultaneous reverse isolation of more than 20 dB and insertion loss less than 1.5 dB over a bandwidth of 5 kHz. We characterize the nonreciprocal noise performance of the device, observing that the residual thermal noise from the mechanical environments is routed solely to the input of the isolator. Our measurements show quantitative agreement with a general coupled-mode theory. Unlike conventional isolators and circulators, these compact nonreciprocal devices do not require a static magnetic field, and they allow for dynamic control of the direction of isolation. With these advantages, similar devices could enable programmable, high-efficiency connections between disparate nodes of quantum networks, even efficiently bridging the microwave and optical domains., Comment: 9 pages, 6 figures

We convert propagating qubits encoded as superpositions of zero and one photons to the motion of a micrometer-sized mechanical resonator. Using quantum state tomography, we determine the density matrix of both the propagating photons and the mechanical resonator. By comparing a sufficient set of states before and after conversion, we determine the average process fidelity to be $F_{\textrm{avg}} = 0.83\substack{+0.03-0.06}$ which exceeds the classical bound for the conversion of an arbitrary qubit state. This conversion ability is necessary for using mechanical resonators in emerging quantum communication and modular quantum computation architectures., Comment: 22 pages, 14 figures (including Supplementary Information)

We report on the design and implementation of a Field Programmable Josephson Amplifier (FPJA) - a compact and lossless superconducting circuit that can be programmed \textit{in situ} by a set of microwave drives to perform reciprocal and nonreciprocal frequency conversion and amplification. In this work we demonstrate four modes of operation: frequency conversion ($-0.5~\mathrm{dB}$ transmission, $-30~\mathrm{dB}$ reflection), circulation ($-0.5~\mathrm{dB}$ transmission, $-30~\mathrm{dB}$ reflection, $30~\mathrm{dB}$ isolation), phase-preserving amplification (gain $>20~\mathrm{dB}$, $1~\mathrm{photon}$ of added noise) and directional phase-preserving amplification ($-10~\mathrm{dB}$ reflection, $18~\mathrm{dB}$ forward gain, $8~\mathrm{dB}$ reverse isolation, $1~\mathrm{photon}$ of added noise). The system exhibits quantitative agreement with theoretical prediction. Based on a gradiometric Superconducting Quantum Interference Device (SQUID) with Nb/Al-AlO$_x$/Nb Josephson junctions, the FPJA is first-order insensitive to flux noise and can be operated without magnetic shielding at low temperature. Due to its flexible design and compatibility with existing superconducting fabrication techniques, the FPJA offers a straightforward route toward on-chip integration with superconducting quantum circuits such as qubits or microwave optomechanical systems., Comment: 17 pages, 10 figures

We report the observation of efficient and low-noise frequency conversion between two microwave modes, mediated by the motion of a mechanical resonator subjected to radiation pressure. We achieve coherent conversion of more than $10^{12}~\mathrm{photons/s}$ with a $95\mathrm{\%}$ efficiency and a $14~\mathrm{kHz}$ bandwidth. With less than $10^{-1}~\mathrm{photons \cdot s^{-1}\cdot Hz^{-1}}$ of added noise, this optomechanical frequency converter is suitable for quantum state transduction. We show the ability to operate this converter as a tunable beam splitter, with direct applications for photon routing and communication through complex quantum networks.

While quantum mechanics exquisitely describes the behavior of microscopic systems, one ongoing challenge is to explore its applicability to systems of larger size and mass. Unfortunately, quantum states of increasingly macroscopic objects are more easily corrupted by unintentional measurements from the classical environment. Additionally, even the intentional measurements from the observer can further perturb the system. In optomechanics, coherent light fields serve as the intermediary between the fragile mechanical states and our inherently classical world by exerting radiation pressure forces and extracting mechanical information. Here we engineer a microwave cavity optomechanical system to stabilize a nonclassical steady-state of motion while independently, continuously, and nondestructively monitoring it. By coupling the motion of an aluminum membrane to two microwave cavities, we separately prepare and measure a squeezed state of motion. We demonstrate a quantum nondemolition (QND) measurement of sub-vacuum mechanical quadrature fluctuations. The techniques developed here have direct applications in the areas of quantum-enhanced sensing and quantum information processing, and could be further extended to more complex quantum states., Comment: 9 pages, 6 figures

We measure the fundamental noise processes associated with a continuous linear position measurement of a micromechanical membrane incorporated in a microwave cavity optomechanical circuit. We observe the trade-off between the two fundamental sources of noises that enforce the standard quantum limit: the measurement imprecision and radiation-pressure backaction from photon shot noise. We demonstrate that the quantum backaction of the measurement can overwhelm the intrinsic thermal motion by 24 dB, entering a new regime for cavity optomechanical systems., Comment: 4 pages, 3 figures

Electromagnetic waves are ideal candidates for transmitting information in a quantum network as they can be routed rapidly and efficiently between locations using optical fibers or microwave cables. Yet linking quantum-enabled devices with cables has proved difficult because most cavity or circuit quantum electrodynamics (cQED) systems used in quantum information processing can only absorb and emit signals with a specific frequency and temporal envelope. Here we show that the temporal and spectral content of microwave-frequency electromagnetic signals can be arbitrarily manipulated with a flexible aluminum drumhead embedded in a microwave circuit. The aluminum drumhead simultaneously forms a mechanical oscillator and a tunable capacitor. This device offers a way to build quantum microwave networks using separate and otherwise mismatched components. Furthermore, it will enable the preparation of non-classical states of motion by capturing non-classical microwave signals prepared by the most coherent circuit QED systems., Comment: 15 pages and 10 figures; includes supplementary information

In superconducting quantum information, machined aluminum superconducting cavities have proven to be a well-controlled, low-dissipation electromagnetic environment for quantum circuits such as qubits. They can possess large internal quality factors, $Q_{int}>10^8$, and present the possibility of storing quantum information for times far exceeding those of microfabricated circuits. However, in order to be useful as a storage element, these cavities require a fast "read/write" mechanism--- in other words, they require tunable coupling between other systems of interest such as other cavity modes and qubits, as well as any associated readout hardware. In this work, we demonstrate these qualities in a simple dual cavity architecture in which a low-Q "readout" mode is parametrically coupled to a high-Q "storage" mode, allowing us to store and retrieve classical information. Specifically, we employ a flux-driven Josephson junction-based coupling scheme to controllably swap coherent states between two cavities, demonstrating full, sequenced control over the coupling rates between modes.

Heisenberg's uncertainty principle results in one of the strangest quantum behaviors: an oscillator can never truly be at rest. Even in its lowest energy state, at a temperature of absolute zero, its position and momentum are still subject to quantum fluctuations. Resolving these fluctuations using linear position measurements is complicated by the fact that classical noise can masquerade as quantum noise. On the other hand, direct energy detection of the oscillator in its ground state makes it appear motionless. So how can we resolve quantum fluctuations? Here, we parametrically couple a micromechanical oscillator to a microwave cavity to prepare the system in its quantum ground state and then amplify the remaining vacuum fluctuations into real energy quanta. Exploiting a superconducting qubit as an artificial atom, we measure the photon/phonon-number distributions during these optomechanical interactions. This provides an essential non-linear resource to, first, verify the ground state preparation and second, reveal the quantum vacuum fluctuations of the macroscopic oscillator's motion. Our results further demonstrate the ability to control a long-lived mechanical oscillator using a non-Gaussian resource, directly enabling applications in quantum information processing and enhanced detection of displacement and forces., Comment: 21 pages, 11 figures

We describe a tunable-cavity QED architecture with an rf SQUID phase qubit inductively coupled to a single-mode, resonant cavity with a tunable frequency that allows for both microwave readout of tunneling and dispersive measurements of the qubit. Dispersive measurement is well characterized by a three-level model, strongly dependent on qubit anharmonicity, qubit-cavity coupling and detuning. A tunable cavity frequency provides a way to strongly vary both the qubit-cavity detuning and coupling strength, which can reduce Purcell losses, cavity-induced dephasing of the qubit, and residual bus coupling for a system with multiple qubits. With our qubit-cavity system, we show that dynamic control over the cavity frequency enables one to avoid Purcell losses during coherent qubit evolutions and optimize state readout during qubit measurements. The maximum qubit decay time $T_1$ = 1.5 $\mu$s is found to be limited by surface dielectric losses from a design geometry similar to planar transmon qubits., Comment: 17 pages, 10 figures

We identify signatures of the intrinsic nonlinear interaction between light and mechanical motion in cavity optomechanical systems. These signatures are observable even when the cavity linewidth exceeds the optomechanical coupling rate. A strong laser drive red-detuned by twice the mechanical frequency from the cavity resonance frequency makes two-phonon processes resonant, which leads to a nonlinear version of optomechanically induced transparency. This effect provides a new method of measuring the average phonon number of the mechanical oscillator. Furthermore, we show that if the strong laser drive is detuned by half the mechanical frequency, optomechanically induced transparency also occurs due to resonant two-photon processes. The cavity response to a second probe drive is in this case nonlinear in the probe power. These effects should be observable with optomechanical coupling strengths that have already been realized in experiments., Comment: 5 pages, 3 figures + short supplement

Recently, macroscopic mechanical oscillators have been coaxed into a regime of quantum behavior, by direct refrigeration [1] or a combination of refrigeration and laser-like cooling [2, 3]. This exciting result has encouraged notions that mechanical oscillators may perform useful functions in the processing of quantum information with superconducting circuits [1, 4-7], either by serving as a quantum memory for the ephemeral state of a microwave field or by providing a quantum interface between otherwise incompatible systems [8, 9]. As yet, the transfer of an itinerant state or propagating mode of a microwave field to and from a mechanical oscillator has not been demonstrated owing to the inability to agilely turn on and off the interaction between microwave electricity and mechanical motion. Here we demonstrate that the state of an itinerant microwave field can be coherently transferred into, stored in, and retrieved from a mechanical oscillator with amplitudes at the single quanta level. Crucially, the time to capture and to retrieve the microwave state is shorter than the quantum state lifetime of the mechanical oscillator. In this quantum regime, the mechanical oscillator can both store and transduce quantum information.

The advent of laser cooling techniques revolutionized the study of many atomic-scale systems. This has fueled progress towards quantum computers by preparing trapped ions in their motional ground state, and generating new states of matter by achieving Bose-Einstein condensation of atomic vapors. Analogous cooling techniques provide a general and flexible method for preparing macroscopic objects in their motional ground state, bringing the powerful technology of micromechanics into the quantum regime. Cavity opto- or electro-mechanical systems achieve sideband cooling through the strong interaction between light and motion. However, entering the quantum regime, less than a single quantum of motion, has been elusive because sideband cooling has not sufficiently overwhelmed the coupling of mechanical systems to their hot environments. Here, we demonstrate sideband cooling of the motion of a micromechanical oscillator to the quantum ground state. Entering the quantum regime requires a large electromechanical interaction, which is achieved by embedding a micromechanical membrane into a superconducting microwave resonant circuit. In order to verify the cooling of the membrane motion into the quantum regime, we perform a near quantum-limited measurement of the microwave field, resolving this motion a factor of 5.1 from the Heisenberg limit. Furthermore, our device exhibits strong-coupling allowing coherent exchange of microwave photons and mechanical phonons. Simultaneously achieving strong coupling, ground state preparation and efficient measurement sets the stage for rapid advances in the control and detection of non-classical states of motion, possibly even testing quantum theory itself in the unexplored region of larger size and mass., Comment: 13 pages, 7 figures

Demonstrating and exploiting the quantum nature of larger, more macroscopic mechanical objects would help us to directly investigate the limitations of quantum-based measurements and quantum information protocols, as well as test long standing questions about macroscopic quantum coherence. The field of cavity opto- and electro-mechanics, in which a mechanical oscillator is parametrically coupled to an electromagnetic resonance, provides a practical architecture for the manipulation and detection of motion at the quantum level. Reaching this quantum level requires strong coupling, interaction timescales between the two systems that are faster than the time it takes for energy to be dissipated. By incorporating a free-standing, flexible aluminum membrane into a lumped-element superconducting resonant cavity, we have increased the single photon coupling strength between radio-frequency mechanical motion and resonant microwave photons by more than two orders of magnitude beyond the current state-of-the-art. A parametric drive tone at the difference frequency between the two resonant systems dramatically increases the overall coupling strength. This has allowed us to completely enter the strong coupling regime. This is evidenced by a maximum normal mode splitting of nearly six bare cavity line-widths. Spectroscopic measurements of these 'dressed states' are in excellent quantitative agreement with recent theoretical predictions. The basic architecture presented here provides a feasible path to ground-state cooling and subsequent coherent control and measurement of the quantum states of mechanical motion., Comment: 8 pages, 4 figures

We report on a method for detecting weakly coupled spurious two-level system fluctuators (TLSs) in superconducting qubits. This method is more sensitive that standard spectroscopic techniques for locating TLSs with a reduced data acquisition time., Comment: 3 pages, 4 figures.

We demonstrate coherent tunable coupling between a superconducting phase qubit and a lumped element resonator. The coupling strength is mediated by a flux-biased RF SQUID operated in the non-hysteretic regime. By tuning the applied flux bias to the RF SQUID we change the effective mutual inductance, and thus the coupling energy, between the phase qubit and resonator . We verify the modulation of coupling strength from 0 to $100 MHz$ by observing modulation in the size of the splitting in the phase qubit's spectroscopy, as well as coherently by observing modulation in the vacuum Rabi oscillation frequency when on resonance. The measured spectroscopic splittings and vacuum Rabi oscillations agree well with theoretical predictions., Comment: 4 pages, 4 figures submitted to PRL

Nanomechanical oscillators are at the heart of ultrasensitive detectors of force, mass and motion. As these detectors progress to even better sensitivity, they will encounter measurement limits imposed by the laws of quantum mechanics. For example, if the imprecision of a measurement of an oscillator's position is pushed below the standard quantum limit (SQL), quantum mechanics demands that the motion of the oscillator be perturbed by an amount larger than the SQL. Minimizing this quantum backaction noise and nonfundamental, or technical, noise requires an information efficient measurement. Here we integrate a microwave cavity optomechanical system and a nearly noiseless amplifier into an interferometer to achieve an imprecision below the SQL. As the microwave interferometer is naturally operated at cryogenic temperatures, the thermal motion of the oscillator is minimized, yielding an excellent force detector with a sensitivity of 0.51 aN/rt(Hz). In addition, the demonstrated efficient measurement is a critical step towards entangling mechanical oscillators with other quantum systems., Comment: 5 pages, 4 figures

We measure the response and thermal motion of a high-Q nanomechanical oscillator coupled to a superconducting microwave cavity in the resolved-sideband regime where the oscillator's resonance frequency exceeds the cavity's linewidth. The coupling between the microwave field and mechanical motion is strong enough for radiation pressure to overwhelm the intrinsic mechanical damping. This radiation-pressure damping cools the fundamental mechanical mode by a factor of 5 below the thermal equilibrium temperature in a dilution refrigerator to a phonon occupancy of 140 quanta., Comment: 4 pages, 4 figures

Recent theoretical work has shown that radiation pressure effects can in principle cool a mechanical degree of freedom to its ground state. In this paper, we apply this theory to our realization of an opto-mechanical system in which the motion of mechanical oscillator modulates the resonance frequency of a superconducting microwave circuit. We present experimental data demonstrating the large mechanical quality factors possible with metallic, nanomechanical beams at 20 mK. Further measurements also show damping and cooling effects on the mechanical oscillator due to the microwave radiation field. These data motivate the prospects for employing this dynamical backaction technique to cool a mechanical mode entirely to its quantum ground state., Comment: 6 pages, 6 figures

In recent years microfabricated microwave cavities have been extremely successful in a wide variety of detector applications. In this article we focus this technology on the challenge of quantum-limited displacement detection of a macroscopic object. We measure the displacement of a nanomechanical beam by capacitively coupling its position to the resonant frequency of a superconducting transmission-line microwave cavity. With our device we realize near state-of-the-art mechanical force sensitivity (3 $\rm{aN/\sqrt{Hz}}$) and thus add to only a handful of techniques able to measure thermomechanical motion at 10's of milliKelvin temperatures. Our measurement imprecision reaches a promising 30 times the expected imprecision at the standard quantum limit, and we quantify our ability to extract measurement backaction from our results as well as elucidate the important steps that will be required to progress towards the full quantum limit with this new detector., Comment: Minor changes and corrections to text and figures; 7 pages, 6 figures

For high resolution imaging and spectroscopy in the FIR and submillimeter, space observatories will demand sensitive, fast, compact, low-power detector arrays with 104 pixels and sensitivity less than 10(exp -20) W/Hz(sup 0.5). Antenna-coupled superconducting tunnel junctions with integrated rf single-electron transistor readout amplifiers have the potential for achieving this high level of sensitivity, and can take advantage of an rf multiplexing technique. The device consists of an antenna to couple radiation into a small superconducting volume and cause quasiparticle excitations, and a single-electron transistor to measure current through junctions contacting the absorber. We describe optimization of device parameters, and results on fabrication techniques for producing devices with high yield for detector arrays. We also present modeling of expected saturation power levels, antenna coupling, and rf multiplexing schemes.

Antenna-coupled superconducting tunnel junction detectors have the potential for photon-counting sensitivity at sub-mm wavelengths. The device consists of an antenna structure to couple radiation into a small superconducting volume and cause quasiparticle excitations, and a single-electron transistor to measure currents through tunnel junction contacts to the absorber volume. We will describe optimization of device parameters, and recent results on fabrication techniques for producing devices with high yield for detector arrays. We will also present modeling of expected saturation power levels, antenna coupling, and rf multiplexing schemes.

This paper will describe the fabrication of small aluminum tunnel junctions for applications in astronomy. Antenna-coupled superconducting tunnel junctions with integrated single-electron transistor readout have the potential for photon-counting sensitivity at sub-millimeter wavelengths. The junctions for the detector and single-electron transistor can be made with electron-beam lithography and a standard self-aligned double-angle deposition process. However, high yield and uniformity of the junctions is required for large-format detector arrays. This paper will describe how measurement and modification of the sensitivity ratio in the resist bilayer was used to greatly improve the reliability of forming devices with uniform, sub-micron size, low-leakage junctions.