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Recently, the thermal management of electronic devices has become paramount because the power density of semiconductor elements is rapidly increasing with the rapid miniaturisation of electronic devices. Boiling heat transfer (BHT) is an effective technique to achieve high cooling systems, and micro-structures are expected to enhance the BHT. In this study, copper, a hydrophobic surface, was used as a heat transfer surface, and microstructure was applied to the surface to investigate the effect of hydrophobic microstructured surfaces on the enhancement of BHT, and the effects of changing flow velocity from laminar (Reynolds number = 1,220) to the turbulent (Reynolds number = 6,640) were investigated. Comparing the boiling curves of smooth and microstructured surfaces, we confirmed that the heat flux on the microstructured surface was higher than that on the smooth surface at the same superheating, attributable to the increase in the number of bubble points caused by the cavities of the microstructured surface, which facilitated heat transfer. For the effect of changing the flow velocity, the critical heat flux (CHF) increased with the flow velocity for the smooth surface, but no significant improvement was observed for the microstructured surface. The prediction of the relationship between heat flux and bubble population density was found to be reasonable because the difference between the experimental values and the theoretical values obtained from a well-known prediction equation was small. Using this equation to predict the bubble population density on the microstructured surfaces, it was estimated that a small fraction of the number of cavities was activated, even near the CHF condition. In the future, it will be necessary to investigate the cause of the small number of activated cavities of the microstructured surfaces in detail.

The thermal chemical vapor deposition (CVD) process was utilized to fabricate 6H-structured SiC coating dies with carbon control. The carbon-rich clusters along the SiC grain boundaries acted as a pinning site to suppress irregular crystal growth and to homogenize the fine-grained structure. These massive carbon-supersaturated (MCSed) SiC dies with a thickness of 4 mm were utilized for upsetting pure titanium bars in dry and cold conditions. Under a stress gradient from the contact interface to the depth of the SiC coating, the carbon solute isolated from these carbon clusters diffused through the grain boundaries and formed free carbon agglomerates on the contact interface to the pure titanium bars. These in situ-formed free carbon agglomerates acted as a solid lubricant to sustain the friction coefficient at 0.09 at the hot spots on the contact interface and to protect the dies and bars from severe adhesive wearing.

With the aim of achieving a sustainable society with green manufacturing, every metal-forming process has been changed to a dry process with the use of limited lubricants via regulation. In parallel, die materials must have sufficient wear resistance to prolong the die life even when forming active metals. A massively nitrogen-supersaturated (MNSed) superalloy was selected as a galling-free die substrate to forge oxygen-free copper wires and bars in dry conditions. A plasma immersion nitriding system was utilized to induce nitrogen supersaturation in CoCrMo, forging dies at 723 K for 21.6 ks with a high nitrogen solute content. Microstructure analyses and microhardness testing proved that the MNSed CoCrMo die had a multilayered structure from the top surface to the depth and that the surface hardness increased up to 1300 HV. Dry, cold forging experiments demonstrated that the oxygen-free copper bar was upset, with a reduction in thickness of 70% in a single stroke under low friction. No fresh copper work debris adhered onto the MNSed CoCrMo die surface. The loading–stroke relationship was used to describe the forging behavior, with low friction and without galling.

The two-step PM (powder metallurgy)-route procedure was proposed to fabricate a super-engineering plastic gear directly from powder feedstock. Its lightweight, fully dense integrity and high-stiffness has been found to be suitable for reducers in robotics and electric vehicles, as they work even in severe environmental conditions. In this study, the green compaction and sinter-forging processes were used to consolidate the polyimide powder feedstock and to sinter forge the solid preform into the final products. To demonstrate the high density of preforms and sinter-forged gears, a hardness measurement and X-ray computer tomography were employed. The gear-grade balancing was also evaluated to describe the effect of fine sinter-forging conditions on the dimensional quality of polyimide gears. High gear grade with JIS-2 class proved that the polyimide was useful as a matrix of lightweight and high-strength gears.

A new solid lubrication method was proposed for dry forging of pure titanium with high reduction in thickness. A free-carbon tribofilm was formed in situ at the hot spots on the contact interface to protect the die surfaces from severe adhesion of work materials. This film consisted of the free carbon, which isolated from the carbon supersaturated die substrate materials, diffused to the contact interface and agglomerated to a thin film. Two different routes of carbon supersaturation process were developed to prepare carbon supersaturated ceramic and metal dies for the dry forging of pure titanium wires. A pure titanium bar was utilized as an easy-to-adherent work material for upsetting in dry and cold. The round bar was upset up to 70% in reduction in thickness with a low friction coefficient from 0.05 to 0.1 in a single stroke. Work hardening was suppressed by this low friction. SEM-EDX, EBSD and Raman spectroscopy were utilized to analyze the contact interface and to understand the role of in situ formed free-carbon films on the low friction and low work hardening during forging. Precise nanostructure analyses were utilized to describe low friction forging behavior commonly observed in these two processes. The in situ solid lubrication mechanism is discussed based on the equivalence between the nitrogen and carbon supersaturation processes.

The carbon-supersaturated SKD11 punch was proposed as a green, or, a galling-free, long-life and low energy-consuming forging tool of pure titanium and β-titanium alloy that works with low friction and less work hardening and without galling. The reduction in thickness was increased up to 50% to investigate the friction process on the contact interface and the work-hardening behavior. The nitrogen-supersaturated SKD11 punch was utilized as a reference tool for this forging experiment. Three-dimensional finite element analysis was employed to derive the regression curve between the contact interface width and the friction coefficient. The friction coefficient was estimated in forging the pure titanium wires by using the regression curves. The work-hardening process was analyzed by the hardness mapping on the cross-section of forged wires. The SEM-EDX analysis on the contact interface proved that no adhesion of fresh metallic titanium and titanium oxide debris was seen on the interface between the carbon-supersaturated SKD11 punch and the titanium work. In particular, the work hardening is suppressed without shear localization in forging the β-titanium. Finally, the uniform carbon layer was derived from the supersaturated carbon solute from the punch matrix and wrought as a friction film on the contact interface to reduce the friction and the work hardening as well as suppress the chemical galling. This in situ carbon lubrication must be essential in green forging to highly qualify the titanium and titanium alloy products and to prolong the punch-and-die lives in practical operation.

Austenitic stainless steel gears were fabricated via the fine blanking process that can be used for mass production. A carbon-supersaturated (CS)-matrix high-speed steel punch was prepared to minimize the adhesive and abrasive wear damage. Its edge profile was tailored and finished to control the local metal flow around the punch edges and edge corners. This CS punch was utilized in fine blanking the AISI304 austenitic stainless steel gears. Ball-on-disc (BOD) testing was first employed to describe the frictional behavior of the CS tool steel disc against the AISI304 stainless steel balls. SEM-EDX analysis on the wear track revealed that a free-carbon tribofilm was formed in situ in the wear track to prevent adhesive wear via galling on the tool steel disc. No significant adhesive or abrasive wear was detected on the punch edges and punch edge corners after continuously fine blanking with 50 strokes. AISI304 gears were produced to have fully burnished surfaces. Their pitches, widths and circles were measured to evaluate their gear-grade balancing during the fine blanking process. The stabilized gear-grade balancing in JIS-9 to JIS-10 grades was attained for these as-blanked AISI304 gears without finishing processes.

Fine-grained austenitic stainless steels (FGSS) were plasma nitrided below 700 K to describe their microstructure evolution during the nitrogen supersaturation process and to investigate the post-stressing effect on the microstructure and mechanical properties of nitrided FGSS. Normal- and fine-grained AISI304 plates were nitrided at 623 K and 673 K to investigate the grain size effect on the nitrogen supersaturation process as well as the microstructure evolution during the nitriding process. Fine-grained AISI316 (FGSS316) wires were nitrided at 623 K to demonstrate that their outer surfaces were uniformly nitrided to have the same two-phase, refined microstructure with high nitrogen solute content. This nitrided FGSS316 wire had a core structure where the original FGSS316 core matrix was bound by the nitrided FGSS316 layer. The nitrided wire had higher stiffness, ultimate strength, and elongation in the uniaxial tensile testing than its un-nitrided wires. The core microstructure was refined and homogenized by this applied loading together with an increase of nitrided layer hardness.

An acicular microtextured sheet was developed as a heat radiation device from the high-temperature source to the cooling medium in the infrared (IR) spectrum. The copper surface was modified by acicular micro-texturing to place a semi-regular micro-/nano-cone structure onto it. FT-IR (Fourier transformation IR) spectroscopy was utilized to measure the transmittance diagram in near-IR to far-IR wavelengths. The wavelength (λ) of 6.7 μm, where the highest absorbance valley was detected in the diagram, was equivalent to the doubled size of the micro-cone average height, with Have = 3.3 μm; λ ~ 2 × Have. The electromagnetic waves in the far-IR wavelength were emitted by acicular micro-textured metallic sheets. The heat radiation transfer experiment was performed to describe this low-temperature heat radiation behavior. No temperature rise was detected on the black-colored polycarbonate (BC-PC) plate away from the bare copper sheet without textures, located on the high-temperature source. The temperature increased by 4 K on the BC-PC plate using the acicular textured copper sheet device. The emitter temperature also decreased significantly by 50 K or 50% of the heat source temperature.

A carbon-supersaturated (CS-) high-speed steel punch was prepared using low-temperature plasma carburizing for fine blanking of pure titanium plates. The bare high-speed steel punch was also prepared as a reference to describe the adhesion and abrasive galling in the fine blanking of the titanium plates, even in a single shot. The CS-punch was free from severe chemical galling, even after repeatedly fine-blanking the pure titanium plates. A microstructure analysis, element mapping and a chemical composition analysis demonstrated that titanium debris fragments slightly deposited at the CS-punch edges in the presence of agglomerated free-carbon film due to the CS-punch. This galling-free fine-blanking behavior came from the in situ formation of free carbon tribofilms. This in situ lubrication resulted in the completely burnished surfaces of pure titanium blanks.

PIG (Pin-Injection-Gate) die-casting and hot stamping was developed for fabrication of small-sized and thin-walled aluminum alloy parts from the recycled feedstock. The pure aluminum and aluminum alloy granules were utilized as a feedstock model of recycled materials. The measured mass of granules with the estimated weight from 3D-CAD (Computer Aided Design) of products was poured into the PIG-nozzles before injection. After quickly melting by induction heating inside the PIG-nozzle units, the aluminum melts were injected into a die cavity through the PIG-nozzle. No furnaces and no crucibles were needed to store the melt aluminum stock in different from the conventional die-casting system. No clamping mechanism with huge loading machine was also needed to significantly reduce the energy consumption in casting. Much less wastes were yielded in these processes; the ratio of product to waste, or, the materials efficiency was nearly 100%. Nitrogen supersaturation and TiAlN coating were used to protect the PIG-nozzle and the stamping die surfaces from severe adhesion from aluminum melt. The pure aluminum gears and thin-walled mobile phone case were fabricated by this process. X-ray tomography proved that both products had no cavities, pores and shrinkages in their inside. Using the hot stamping unit, the micro-pillared pure aluminum heatsink was fabricated to investigate the holding temperature effect on the aspect ratio of micro-pillar height to width.

Vertically aligned graphite substrate (VGS)-copper packaging was renowned for improving the robustness against the thermal gradient loading by using micro texturing. The micro-groove array with a line width of 50 μm and a pitch of 100 μm was formed into the VGS by controlling the line depth with the use of fast-rate oxygen plasma etching. Three micro-grooved VGS specimens were wet-plated to fill these microgrooves with copper deposits and to cover the VGS surfaces. The nearly full-deposited VGS-Copper specimens were subjected to a severe thermal transient loading test. The simply Cu-covered package and shallow rib-structured VGS-Cu packages were damaged to delaminate at their interfaces. The VGS-Cu package with the copper rib structure with a height of 50 μm experienced no delamination. This rib-structured VGS-copper package with high rib height had sufficient robustness against the severe thermal transients even with the proof of homogeneous thermal spreading capacity.

A new near-net forging procedure of titanium and titanium alloys was proposed by using a carbon-supersaturated punch and die. Due to the in situ formation of carbon-based tribofilm on the contact interface between the dies and work materials, a low frictional state was sustained through the forging process even in a high reduction in thickness. The work hardening was suppressed during forging; an additional annealing process was unnecessary through the whole process of near-net forging. Pure titanium and β-phase titanium alloy wires were utilized to describe their galling-free forging behavior when increasing the reduction in thickness. Wires with a diameter of 3 mm were upset in a single-shot forging. The reduction in thickness reached 58% when upsetting the pure titanium wire and 45% when upsetting the β-phase titanium alloys, without lubricating materials or oils at room temperature. The friction coefficient on the contact interface was estimated to be 0.05 by inverse analysis. The work-hardening behavior was described by the hardness mapping on the work cross section. The formation of carbon tribofilms was explained by microstructural analysis, element mapping, and Raman spectroscopy. This tribofilm was formed from the isolated carbon solute from the carbon-supersaturated punch and die to sustain the in situ solid lubrication on the contact interface.

A pair of punch and die was often fabricated using subtractive manufacturing processes such as milling and other machining processes. However, additive manufacturing could be used to perform the same processes. This study explored this possibility. In particular, this study fabricated a pair of T-shaped punch and die made of AISI316L austenitic stainless steel using an additive manufacturing process called plasma-assisted 3D printing. Accordingly, T-shaped negative and positive 2D patterns were screen-printed onto the mirror-polished surfaces of the substrates made of AISI316L austenitic stainless steel. The printed film worked like a mask to prevent the printed substrate surfaces from nitriding. In order to form a thick nitrided layer, the unprinted substrate surfaces were selectively nitrided at 673 K for 14.4 ks. The un-nitrided segments of the substrates were uniformly removed by sand-blasting that involved shooting silica particles on the substrate’s surfaces. As a result, the substrates printed with negative and positive T-shaped patterns were transformed into the punch head and die cavity. In order to see the efficacy of the fabricated punch and die pair, this pair was used for piercing the electrical steel sheets under a controlled clearance. Scanning Electron Microscopy with Energy Dispersive X-ray (SEM-EDX) was used to measure surface topography after piercing. In addition, SEM and a 3D profilometer were used to measure the punch and die profiles after piercing. The abovementioned measurement results showed that the fabricated punch and die exhibited highly accurate piercing behavior. Thus, the plasma-assisted 3D printing was useful for punch and die fabrication.

This paper is concerned with plasma diagnosis on a N2-H2 gas mixture to determine the optimum parameters for the nitriding process. Plasma parameters such as pressure, RF-voltage, and DC-bias were varied for optimization. The active species such as N2+ and NH were identified in plasma diagnosis. In the N2-H2 gas mixture, hydrogen imposed a great influence on plasma generation. The small addition of a hydrogen molecule into the gas mixture resulted in the highest yield of N2+ ions and NH radicals; the optimum hydrogen content was 20% in the mixture. The austenitic stainless-steel type AISI304 was nitrided at 673 K and 623 K to experimentally demonstrate that hydrogen gas content optimization is necessary to improve the surface hardness and to describe low temperature nitriding under high nitrogen flux at the surface.

An iron loss in the motor core was often enhanced by formation of plastically affected zones in piercing the electrical steel sheets. A platform methodology to carry out quantitative evaluation of these affected zones in the pierced electrical steel sheets was proposed to search for the way to minimize the affected zone widths. A coarse-grained electrical steel sheet was employed as a work material for a fine piercing experiment under the narrowed clearance between the plasma-nitrided SKD11 punch and core-die. The shearing behavior by the applied loading for piercing was described by in situ measurement of the load-stroke relationship. The plastic straining in the single-crystal electrical steel sheet was characterized by SEM (scanning electron microscopy) and EBSD (electron back-scattering diffraction) to define the affected zone size and to analyze the rotation of crystallographic orientations by the induced plastic distortion during piercing. Integral and differentiation of spin rotation measured the affected zones. The effect of punch edge sharpness on these spin-rotation measures was also discussed using the nitrided and ion-milled SKD11 punch and core-die.

A new data transformation method for micro-manufacturing using a topological model for a micro-/nano-texture was proposed for a surface-decorated product. Femtosecond laser printing was utilized to form the micro-/nano-textures into the hardened thick layer of dies by plasma nitriding. At first, the plasma-nitrided AISI316L flat substrate was laser-printed as a punch to imprint the tailored nano-textures onto the AA1060 aluminum plate for its surface decoration with topological emblems. Second, the plasma-nitrided SKD11 cylindrical punch was laser-trimmed to form the nanostructures on its side surface. This nano-texture was imprinted onto the hole surface concurrently with piercing a circular hole into electrical steel sheet. The fully burnished surface had a shiny, metallic quality due to the nano-texturing. The plasma nitriding, the laser printing and the CNC (computer numerical control) imprinting provided a way of transforming the tailored textures on the metallic product.

A CVD (Chemical Vapor Deposition) diamond coated tungsten carbide (WC) and cobalt (Co) sintered alloy punch was trimmed by the femtosecond laser machining to sharpen its edge with about 2 μm and to simultaneously make nanostructuring to its side surface. In addition to the sharpened edge, its edge profile was formed to be homogeneous enough to reduce the damage layer width by piercing the electrical amorphous steel sheet stack. Each brittle sheet in the stacked work was damaged to have three kinds of defects by piercing; e.g., the droop-like cracking in the thickness and at the vicinity of hole, the wrinkling in peak-to-valley with partial cracking on the peaks, and the circumferential cracking. When using the WC (Co) punch with the inhomogeneous edge profile in the sharpened edge width, these three damages were induced into each sheet and the maximum damage width exceeded 80 μm. When using the punch with the sharpened edge and homogeneous edge profile, the wrinkling mode was saved and the total affected layer width was significantly reduced to less than 20 μm. Through the precise embossing experiments, this effect of punch edge profile condition to the induced damages was discussed with a statement on the nanostructuring effect on the reduction of damaged width in electrical amorphous steel sheets. The developed tool with the sharpened edge and homogenous edge condition contributes to the realization of a low iron loss motor with a reduced affected layer width.

A bare AISI420J2 punch often suffers from severe adhesion of metallic titanium as well as titanium oxide debris particles in dry, cold forging of biomedical titanium alloys. This punch was plasma-carburized at 673 K for 14.4 ks to harden it up to 1200 HV on average and to achieve carbon supersaturation in the carburized layer. This plasma-carburized punch was employed in the cold, dry forging of a pure titanium wire into a flat plate while reducing the thickness by 70%. The contact interface width approached the forged workpiece width with increasing the reduction ratio. This smaller bulging deformation reveals that the workpiece is upset by homogeneous plastic flow with a lower friction coefficient. This low-friction and anti-galling forging process was sustained by an in situ solid lubrication mechanism. Unbound free carbon was isolated from the carbon-supersaturated AISI420J2 matrix and deposited as a thin tribofilm to protect the contact interface from mass transfer of metallic titanium.

The AISI316 austenitic stainless steel die was prepared and nitrided at 673 K for 14.4 ks. Through this low temperature plasma nitriding, the AISI316 die was homogeneously hardened up to 1400 HV within its surface layer of 50 μm. This nitrided AISI316 die was utilized to print the tailored micropattern with nanotextures onto its surface by the femtosecond laser processing. Each micropattern consisted of the tailored segments to have unidirectional nanotextures with different orientations. Each segment was recognized by its intrinsic surface plasmonic brilliance to tailored nanotextures. The CNC (Computer Numerical Control) stamping system was used to coin these micropatterns with nanotextures onto the AA1060 aluminum plates with the thickness of 1 mm. SEM (Scanning Electron Microscopy) and optical microscopy were employed to characterize the original micro-/nano-textures on the AISI316 die as well as the coined nanotextured patterns on the AA1060 plate surfaces.

A thick β-SiC CVD (chemical vapor deposition)-coated SiC device was developed as a new punch and die system for dry, cold forging of pure titanium and austenitic stainless-steel works. This β-SiC coating thickness was 4 mm, enough to make mechanical machining of a cavity into β-SiC coating core die. These β-SiC-coated punch and core dies were fixed into the cassette die for dry, cold forging experiments. The stainless steel and titanium wires with diameters of 1.0 mm were employed as the work material. Different from the conventional metallic and ceramic die systems suffering from work material transfer, this system sustained the galling-free cold, dry forging behavior up to a higher reduction of thickness than 30%. The power to stroke the relationship was in situ monitored to describe this forging behavior up to the specified reduction of the wires together with observations on the geometric change from a circular wire to a pentagonal prism bar. Precise scanning electron microscopy-electron-dispersive X-ray spectroscopy (SEM-EDX) analyses were performed to describe the material compatibility on the contact interface between β-SiC coating and elastoplastically deforming works.

In this study, a CVD (Chemical Vapor Deposition)-diamond coated tungsten carbide cobalt (WC (Co)) punch was trimmed to adjust its surface roughness and to significantly reduce its edge curvature for fine piercing by femtosecond laser processing. Through this laser trimming, the surface quality of the diamond coating and the punch edge profile were improved to less than 0.5 μm at the maximum roughness and 2 μm in the edge width, respectively. In parallel with this improvement of surface quality, the side surface of the diamond coating was modified to include nano-textures via the LIPSS (Laser Induced Periodic Surface Structuring) process. Through the fine piercing process, this nanotexture was transcribed onto the pierced hole surface together with fine shearing of the hole by piercing. WLI (White-Light Interferometry) and SEM (Scanning Electron Microscopy) were utilized to describe this transcription of nanotextures during the piercing process. These semiregular nanotextures with an LIPSS period of 300 nm on the pierced hole surface induced a blue colored surface plasmon.

Surface geometry has had an influence on the surface property, in addition to the intrinsic surface energy, of materials. Many physical surface modification methods had been proposed to control the solid surface geometry for modification of surface properties. Recently, short-pulse lasers were utilized to perform nano-texturing onto metallic and polymer substrates for the improvement of surface properties. Most of the papers reported that the hydrophilic metallic surface was modified to have a higher contact angle than 120−150°. Little studies explained the relationship between surface geometry and surface properties. In the present study, the laser micro-/nano-texturing was developed to describe this surface-geometric effect on the static contact angles for pure water. Micropatterns with multi spatial frequencies are designed and synthesized into a microtexture. This tailored microtexture was utilized to prepare for computer aided machining (CAM) data to control the femtosecond laser beams. The nano-length ripples by laser induced periodic surface structuring (LIPSS) supposed onto this microtexture to form the micro-/nano-texture on the AISI304 substrate surface. Computational geometry was employed to describe this geometric profile. The fractal dimension became nearly constant by 2.26 and insensitive to increase of static contact angle (θ) for θ > 150°. Under this defined self-similarity, the micro-/nano-textured surface state was controlled to be super-hydrophobic by increasing the ratio of the highest spatial frequency in microtextures to the lowest one. This controllability of surface property on the stainless steels was supported by tailoring the wavelength and pitch of microtextures. Exposure testing was also used to evaluate the engineering durability of this micro-/nano-textured surface. Little change of the measured fractal dimension during the testing proved that this physically modified AISI304 surface had sufficient stability for its long-term usage in air.

Miniature products and components must be surface treated to improve their wear resistance and corrosion toughness. Among various processes, low-temperature plasma nitriding was employed to harden the outer and inner surfaces of micro-nozzles and to strengthen the micro-springs. A table-top nitriding system was developed even for simultaneous treatment of nozzles and springs. A single AISI316 micro-nozzle was nitrided at 673 K for 7.2 ks to have a surface hardness of 2000 HV0.02 and nitrogen solute content up to 10 mass%. In particular, the inner and outer surfaces of a micro-nozzle outlet were uniformly nitrided. In addition, the surface contact angle increased from 40° for bare stainless steels to 104° only by low-temperature plasma nitriding. A stack of micro-nozzles was simultaneously nitrided for mass production. Micro-springs were also nitrided to improve their stiffness for medical application.

Packaging using thermoplastic molding for hollowed GaN chips were requested for a leak-proof micro-joining between plastic molds and copper-based substrates. The design and engineering of micro-textures is a key technology for putting leak-proof packaging into practice. In the present paper, a micro-meshing punch array was prepared using plasma-nitriding-assisted printing. Two-dimensional original patterns were screen-printed onto an AISI316 die substrate and plasma nitrided at 673 K for 14.4 ks (or 4 h). The unprinted surfaces were selectively nitrogen super-saturated to have more nitrogen content than 5 mass% and a higher hardness than 1200 HV. The printed surfaces were selectively sand blasted to fabricate the micro-meshing punch array for micro-embossing. A computer numerically controlled stamping system was utilized to describe the micro-embossing behavior onto copper substrates and to investigate how the micro-textures on the array was transcribed onto the copper. Reduction of takt time as well as flexibility in the micro-grooving were discussed with reference to the picosecond laser machining and mechanical milling processes.

A diamond-like carbon (DLC) film, coated on a AISI420-J2 stainless steel substrate and vertically aligned graphite (VAG), was structured by high-density plasma oxidation to work as a DLC-punch for micro-stamping and DLC-nozzle array for micro-dispensing, in addition to acting as a copper-plated thermal spreader, respectively. Thick DLC films were micro-patterned by maskless lithography and directly plasma-etched to remove the unmasked regions. Thick VAG (Ca plates were micro-patterned by screen-printing and selectively etched to activate the surface. Raman spectroscopy as well as electric resistivity measurement proved that there was no degradation of VAG by this surface activation. Wet plating was utilized to prove that copper wettability was improved by this surface treatment.

Martensitic stainless steel type AISI420 was plasma nitrided at 673 K for 3.6 ks to investigate the initial stage of the nitrogen supersaturation process without the formation of iron and chromium nitrides. SEM-EDX, electron back-scattering diffraction (EBSD), and TEM analyses were utilized to characterize the microstructure of the nitrided layer across the nitriding front end. The original coarse-grained, fully martensitic microstructure turned to be α’- γ two phase and fine-grained by high nitrogen concentration. Below this homogeneously nitrided layer, α’-grains were modified in geometry to be aligned along the plastic slip lines together with the α’ to γ-phase transformation at these highly strained zones. Most of these α’-grains in the two-phase microstructure had a nano-laminated structure with the width of 50 nm.

Huge amount of CVD-diamond coated milling tools were used for machining of CFRP and CFRTP sheets and blocks in the airplane and automotive industries. Because of chipping and tooth-tip damage in the diamond coatings during those dry machining processes, the tools must be exchanged with new ones to preserve the geometric accuracy in practice. WC (Co) substrate in these used tools had to be recycled to lower the production cost; reliable ashing process was necessary to remove only the used diamond coatings without significant damages even to the tooth tip of substrate. Furthermore, fast-rate ashing became a key to shorten the leading time for exchange of milling and drilling tools. High density oxygen plasma ashing method with use of the hollow cathode device was proposed to remove the used diamond coating with the film thickness of 10 μm. Both the emissive-light optical spectroscopy and the Langmuir probe method were employed to make quantitative diagnosis on the generated oxygen plasmas. The average ion density increased up to more than 1x1017 m-3, higher than the conventional plasma states by one order. Activated oxygen atom had overwhelming population among the generated species in this high plasmas density. This high density oxygen flux was responsible for complete and fast-rate removal of CVD diamond coating; e.g. the average ashing rate turned to be more than 10 μm/hour. The short-shank, end-milling tools were employed to describe this ashing behavior with time. Corresponding to the variation of CO-peak intensity in the measured spectra by on-line spectroscopy, the diamond film thickness reduced monotonically with time up to 3.6 ks. The removal rate gradually decreased with time in the final stage. Fine tuning of oxygen plasma processing conditions was capable to reduce the damage depth of tool teeth tips down to 1 μm, significantly less than the standard tolerance of 5 μm.