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3. Channel strain analysis in high-performance damascene-gate p-metal-oxide-semiconductor field effect transistors using high-spatial resolution Raman spectroscopy.

12. Mobility and Velocity Enhancement Effects of High Uniaxial Stress on Si (100) and (110) Substrates for Short-Channel pFETs

14. Suppression Mechanism of Volume Shrinkage for SOG Film by Plasma Treatment

15. Study of Charge Trap Sites in SiN Films by Hard X-ray Photoelectron Spectroscopy

19. Improvement of CVD SiO2 by Post Deposition Microwave Plasma Treatment

20. Evaluation and Control of Strain in Si Induced by Patterned SiN Stressor

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