1. Electronic interaction of slow hydrogen, helium, nitrogen, and neon ions with silicon
- Author
-
Eleni Ntemou, Svenja Lohmann, Radek Holeňák, and Daniel Primetzhofer
- Subjects
Atom and Molecular Physics and Optics ,Atom- och molekylfysik och optik - Abstract
We investigate the electronic excitation of silicon by hydrogen, helium, nitrogen, and neon ions for ion energies ranging from several tens to a few hundred kiloelectronvolts. Experiments are carried out in transmission geometry using a time-of-flight medium energy ion scattering system. The targets are self-supporting, single-crystalline Si (100) foils with nominal thicknesses of 50 and 200 nm. Stopping cross-sections (SCSs) are derived and compared with datasets available from the literature and predictions from theory. The results for H projectiles reveal good agreement with literature datasets, within quoted uncertainties. For He projectiles, the results show good agreement with most of the literature data. For N ions, higher values than reported in the literature are measured. For Ne, where literature data are scarce, we extend the velocity regime for which data exist by a factor of two toward higher velocities. The electronic SCS is found to be proportional to ion velocity for all impinging ions, for velocities below the Bohr velocity (v < v0). Comparison with theoretical predictions for a homogeneous free electron gas indicates strong contributions of local energy loss processes different from those expected for electron-hole pair excitation in binary collisions for all ions different from protons.
- Published
- 2023
- Full Text
- View/download PDF