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Results are presented on the use of null wire segment holograms for the in-line assessment of mask alignment errors in the integrated circuit fabrication process. Process variations are detected by measuring the light intensity generated by a hologram designed to project a null image. To detect alignment errors, the mask for the wire segment hologram (WSH) is distributed between two mask layers. If the two sets of diffracting structures defined by the masks are transferred to the wafer with perfect registration, the result is an area of light cancellation (null) in the image plane. Increased mask misalignment leads to imperfect wavefront cancellation, which is manifested as an increase in light intensity in the null region. In order to characterize misalignment under controlled conditions, the two portions of the holographic test structure were initially recombined into a single structure but with intentional misalignment between the two portions designed into the mask. The technique was then used to characterize the alignment errors between two separate masks with the actual fabricated offsets measured using atomic force microscopy. Initial results indicate the technique is capable of resolving 0.1-[micro]m mask misalignment for a 1-[micro]m minimum feature process. Index Terms--Computer-generated, hologram, integrated circuit, interconnect, metrology, manufacturing.

This paper presents details of the design and fabrication of test structures specifically designed for the characterization of two distinct digital microfluidic technologies: electro-wetting on dielectric (EWOD) and surface acoustic wave (SAW). A test chip has been fabricated that includes structures with a wide range of dimensions and provides the capability to characterize enhanced droplet manipulation, as well as other integrated functions. The EWOD and SAW devices have been separately characterized first of all to determine whether integration of the technologies affects their individual performance, including device lifetime evaluation. Microfluidic functions have then been demonstrated, including combined EWOD/SAW functions. In particular, this paper details the use of EWOD to anchor droplets, while SAW excitation is applied to perform mixing. The relationship between test structure designs and the droplets anchoring performance has been studied. [ABSTRACT FROM PUBLISHER]

The development of an implantable system designed to deliver drug doses in a controlled manner over an extended time period is reported. Key performance parameters are the physical size, the power consumption and also the ability to perform wireless communications to enable the system to be externally controlled and interrogated. The system has been designed to facilitate wireless power transfer, which is very important for miniaturisation as it removes the need for a battery. [ABSTRACT FROM AUTHOR]

The development of a new test chip is presented, containing structures for the direct measurement of stress in metallic interconnect layers associated with silicon integrated circuit technology. The rotation of the structures provides a simple method of differentiating between tensile and compressive stress. This test chip design has been used to fabricate working structures allowing the study of stresses in aluminum layers before and after sample sintering. The results are presented together with the design, fabrication, and measurement considerations that have arisen during the research. The problems experienced in removing the sacrificial layer material, necessary to release the structures, are discussed along with potential solutions. The sensor structure is suitable for fabrication within a CMOS facility and its inherent scalability makes it potentially suitable for in-line testing of state-of-the-art processes. [ABSTRACT FROM AUTHOR]

Atomic force and scanning electron microscope measurements of electrical structures for the measurement of critical dimension on alternating aperture phase shifting masks are presented. These have been used to explain anomalies that were observed in previously reported work. In addition, the development of a new capacitance test structure which can measure the alignment between the chrome blocking layer and the phase shifting areas etched into the quartz mask substrate is presented. A progressional offset array technique enables the use of this test structure without calibration and this is demonstrated by simulation and measurements. [ABSTRACT FROM AUTHOR]

A wireless power transfer and communication system based on near-field inductive coupling has been designed and implemented. The feasibility of using such a system to remotely control drug release from an implantable drug delivery system is addressed. The architecture of the wireless system is described and the signal attenuation over distance in both water and phosphate buffered saline is studied. Additionally, the health risk due to exposure to radio frequency (RF) radiation is examined using a biological model. The experimental results demonstrate that the system can trigger the release of drug within 5 s, and that such short exposure to RF radiation does not produce any significant (