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Table-top extreme ultraviolet (EUV) microscopy offers unique opportunities for label-free investigation of biological samples. Here, we demonstrate ptychographic EUV imaging of two dried, unstained model specimens: germlings of a fungus (Aspergillus nidulans), and bacteria (Escherichia coli) cells at 13.5 nm wavelength. We find that the EUV spectral region, which to date has not received much attention for biological imaging, offers sufficient penetration depths for the identification of intracellular features. By implementing a position-correlated ptychography approach, we demonstrate a millimeter-squared field of view enabled by infrared illumination combined with sub-60 nm spatial resolution achieved with EUV illumination on selected regions of interest. The strong element contrast at 13.5 nm wavelength enables the identification of the nanoscale material composition inside the specimens. Our work will advance and facilitate EUV imaging applications and enable further possibilities in life science.

Atomically thin molecular carbon nanomembranes (CNMs) with intrinsic sub-nanometer porosity are considered as promising candidates for next generation filtration and gas separation applications due to their extremely low thickness, energy efficiency and selectivity. CNMs are intrinsically porous which is advantageous over other 2D materials such as graphene and transition metal dichalcogenides where defects and pores need to be introduced after synthesis. It was already discovered that water and helium permeate through 4,4-terphenylthiol (TPT) CNM above the limit of detection. Additionally, the permeation of water vapour was nonlinear against its pressure and 1000 stronger than permeation of helium despite their similar kinetic diameters. However, there was no clear permeation mechanism which could explain permeation of both species. Here, we demonstrate that permeation of all gas species is defined by their adsorption. We performed gas permeation measurements through TPT CNM at different temperatures and found that all measured gases experienced an activation energy barrier which correlated with their kinetic diameters. Furthermore, we identified that entropy loss during adsorption and permeation is the fundamental reason of strong nonlinear permeation of water. Our results also demonstrated that adsorption plays a major role in permeation of all gases, not just water.

Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific absorption edges available in this spectral range. At the same time, EUV radiation has significantly larger penetration depths than electrons. It thus enables a nano-scale view into complex three-dimensional structures that are important for material science, semiconductor metrology, and next-generation nano-devices. Here, we present high-resolution and material-specific microscopy at 13.5 nm wavelength. We combine a highly stable, high photon-flux, table-top EUV source with an interferometrically stabilized ptychography setup. By utilizing structured EUV illumination, we overcome the limitations of conventional EUV focusing optics and demonstrate high-resolution microscopy at a half-pitch lateral resolution of 16 nm. Moreover, we propose mixed-state orthogonal probe relaxation ptychography, enabling robust phase-contrast imaging over wide fields of view and long acquisition times. In this way, the complex transmission of an integrated circuit is precisely reconstructed, allowing for the classification of the material composition of mesoscopic semiconductor systems.

In recent years nanoscale coherent imaging has emerged as an indispensable imaging modality allowing to surpass the resolution limit given by classical imaging optics. At the same time, attosecond science has experienced enormous progress and has revealed the ultrafast dynamics in atoms, molecules, and complex materials. Combining attosecond temporal resolution of pump-probe experiments with nanometer spatial resolution would allow studying ultrafast dynamics on the smallest spatio-temporal scales but has not been demonstrated yet. Unfortunately, the large bandwidth of attosecond pulses usually hinders high-resolution coherent imaging. Here we present a robust holography-enhanced coherent imaging method, which allows combining high quality and high spatial resolution coherent imaging with a large spectral bandwidth. By implementing our method at a high harmonic source we demonstrate, for the first time, a spatial resolution of 34 nm (2.5 {\lambda}) in combination with a spectral bandwidth supporting a Fourier limited pulse duration of only 380 as. The method is single-shot capable, additionally retrieves the spectrum from the measured diffraction pattern, and is thus immune against shot-to-shot fluctuations. This paves the way for an ultrafast view on nanoscale dynamics e.g. ultrafast charge transfer or ultrafast spin currents being relevant for Petahertz electronics and future data storage.

High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the pre-deposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication paves the way towards a simple realization of spatially invariant metasurface-based devices.

Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort ($\leq$ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has a potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.

Ptychography enables coherent diffractive imaging (CDI) of extended samples by raster scanning across the illuminating XUV/X-ray beam thereby generalizing the unique advantages of CDI techniques. Table-top realizations of this method are urgently needed for many applications in sciences and industry. Previously, it was only possible to image features much larger than the illuminating wavelength with table-top ptychography although knife-edge tests suggested sub-wavelength resolution. However, most real-world imaging applications require resolving of the smallest and closely-spaced features of a sample in an extended field of view. In this work, we resolve features as small as 2.5 \lambda (45 nm) by using a table-top ptychography setup and a high-order harmonic XUV source. For the first time, a Rayleigh-type criterion is used as a direct and unambiguous resolution metric for high-resolution table-top setup. This reliably qualifies this imaging system for real-world applications e.g. in biological sciences, material sciences, imaging integrated circuits and semiconductor mask inspection., Comment: 8 pages, 4 figures

We report on the investigation of an advanced circular plasmonic nanoantenna under ultrafast excitation using nonlinear photoemission electron microscopy (PEEM) under near-normal incidence. The circular nanoantenna is enhanced in its performance by a supporting grating and milled out from a gold film. The considered antenna shows a sophisticated physical resonance behavior that is ideal to demonstrate the possibilities of PEEM for the experimental investigations of plasmonic effects on the nanoscale. Field profiles of the antenna resonance for both possible linear polarizations of the incident field are measured with high spatial resolution. In addition, outward propagating Hankel plasmons, which are also excited by the structure, are measured and analyzed. We compare our findings to measurements of an isolated plasmonic nanodisc resonator and scanning near-field optical microscopy (SNOM) measurements of both structures. All results are in very good agreement with numerical simulations as well as analytial models that are also discussed in our paper.

Efficient supercontinuum generation (SCG) requires excitation of solitons at the pump laser wavelength. Quadratic nonlinear waveguides may support an effective self-defocusing nonlinearity so solitons can directly be generated at common ultrafast laser wavelengths without any waveguide dispersion engineering. We here experimentally demonstrate efficient SCG in a standard lithium niobate (LN) waveguide without using quasi-phase matching (QPM). By using femtosecond pumps with wavelengths in the $1.25-1.5 \mu\rm m$ range, where LN has normal dispersion and thus supports self-defocusing solitons, octave-spanning SCG is observed. An optimized mid-IR waveguide design is expected to support even broader spectra. The QPM-free design reduces production complexity, allows longer waveguides, limits undesired spectral resonances and effectively allows using nonlinear crystals where QPM is inefficient or impossible. This result is important for mid-IR SCG, where QPM-free self-defocusing waveguides in common mid-IR nonlinear crystals can support solitons directly at mid-IR ultrafast laser wavelengths, where these waveguides have normal dispersion., Comment: To appear in Optics Letters

We study the physics of a new type of subwavelength nanocavities. They are based on U-shaped metal-insulator-metal waveguides supporting the excitation of surface plasmon polaritons. The waveguides are simultaneously excited from both sides of the U by incident plane waves. Due to their finite length discrete modes emerge within the nanocavity. We show that the excitation symmetry with respect to the cavity ends permits the observation of even and odd modes. Our investigations include near and far field simulations and predict a strong spectral far field response of the comparable small nanoresonators. The strong near field enhancement observed in the cavity at resonance might be suitable to increase the efficiency of nonlinear optical effects, quantum analogies and might facilitate the development of active optical elements, such as active plasmonic elements.