1. Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Film
- Author
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Rubio-Giménez, V., Arnauts, G., Wang, M., (0000-0002-7277-7287) Oliveros Mata, E. S., Huang, X., Lan, T., Tietze, M. L., Kravchenko, D. E., Smets, J., Wauteraerts, N., Khadiev, A., Novikov, D. V., (0000-0002-7177-4308) Makarov, D., Dong, R., Ameloot, R., Rubio-Giménez, V., Arnauts, G., Wang, M., (0000-0002-7277-7287) Oliveros Mata, E. S., Huang, X., Lan, T., Tietze, M. L., Kravchenko, D. E., Smets, J., Wauteraerts, N., Khadiev, A., Novikov, D. V., (0000-0002-7177-4308) Makarov, D., Dong, R., and Ameloot, R.
- Abstract
Crystalline coordination polymers with high electrical conductivities and charge carrier mobilities might open new opportunities for electronic devices. However, current solvent-based synthesis methods hinder compatibility with microfabrication standards. Here, we describe a solvent-free chemical vapor deposition method to prepare high-quality films of the two-dimensional conjugated coordination polymer Cu-BHT (BHT = benzenehexanothiolate). This approach involves the conversion of a metal oxide precursor into Cu-BHT nanofilms with a controllable thickness (20–85 nm) and low roughness (<10 nm) through exposure to the vaporized organic linker. Moreover, the restricted metal ion mobility during the vapor–solid reaction enables high-resolution patterning via both bottom-up lithography, including the fabrication of micron-sized Hall bar and electrode patterns to accurately evaluate the conductivity and mobility values of the Cu-BHT films.
- Published
- 2023