1. Diagnostics of a high-pressure DC magnetron argon discharge with an aluminium cathode
- Author
-
L. Couëdel, Slobodan Mitic, C. Arnas, J. Moreno, Physique des interactions ioniques et moléculaires (PIIM), and Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Materials science ,Physics::Instrumentation and Detectors ,Plasma parameters ,chemistry.chemical_element ,02 engineering and technology ,01 natural sciences ,7. Clean energy ,law.invention ,symbols.namesake ,Physics::Plasma Physics ,law ,Aluminium ,[PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph] ,0103 physical sciences ,Physics::Atomic and Molecular Clusters ,Langmuir probe ,ComputingMilieux_MISCELLANEOUS ,010302 applied physics ,Argon ,Direct current ,Plasma ,021001 nanoscience & nanotechnology ,Atomic and Molecular Physics, and Optics ,Cathode ,chemistry ,Cavity magnetron ,symbols ,Atomic physics ,0210 nano-technology - Abstract
In this article, the plasma parameters of a direct current magnetron discharge in argon at moderate pressure (10 to 40 Pa) using an aluminium cathode are explored. The density of argon excited states, the sputtered aluminium atom density and the electron temperature are estimated using a collisional–radiative model. The electron temperature obtained using optical emission spectroscopic data agrees well with measurements taken using a Langmuir probe. The influence of the discharge parameters, namely the background argon pressure and the discharge current, are discussed.
- Published
- 2021