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1. 32 x 32 SOl CMOS Image Sensor with Pinned Photodiode on Handle Wafer.

Author

Yong-Soo Cho, Takao, H., Sawada, K., Ishida, M., and Sie-Yung Choi

Subjects
IMAGING systems, SEMICONDUCTOR wafers, COMPLEMENTARY metal oxide semiconductors, PHOTODIODES, IMAGE processing, PIXELS
Abstract

The article details the fabrication of a 32x32 silicon on insulator complementary metal oxide semiconductor active pixel image sensor with a pinned photodiode on a handle wafer. It describes the structure of one pixel which consists of a reset and a source follower transistor on a seed wafer. The article shows that photodiode could be optimized for better quantum efficiency and low dark currents.

Published
2007
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