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We investigated the Si-doped InAs quantum dots (QDs) grown by molecular beam epitaxy and the annealing effects on the QD size distribution through photoluminescence (PL) spectroscopy. A double-peak feature in PL was observed from as-grown InAs QDs with Si-doping, and excitation intensity dependence of PL indicated that the double-peak feature is related to the ground-state emission from InAs QDs with bimodal size distribution. The PL spectrum from Si-doped InAs QDs subjected to annealing treatment at 800°C in nitrogen ambient showed three additional PL peaks and blue-shift of the double-peak feature observed from as-grown sample. The excitation-intensity-dependent PL and consideration of thermal stability of carriers through temperature-dependent PL measurement demonstrated that three additional peaks come from the InAs QDs with three new branches of QD occurring during annealing process.

InAs epilayers with thicknesses of 400, 500, 750, and 1500 nm were grown on GaAs by molecular beam epitaxy and their properties were investigated by reflection high-energy electron diffraction and photoluminescence (PL). For all InAs epilayers, the PL peak position measured at 10 K is blue-shifted from that of bulk InAs, which could be largely due to the residual strain in the epilayer. InAs epilayers have PL peaks red-shifted to lower energy as the thickness of InAs layer is increased. This is the first observation on PL of sub-μm thick InAs epilayers grown on GaAs substrate. While the PL peak position of 400 nm thick InAs layer is linearly blue-shifted toward higher energy with increase in excitation intensity ranging from 10 to 140 mW, those of thicker InAs epilayers are gradually blue-shifted and then, saturated above a power of 75 mW.

We have studied infrared photoluminescence (PL) and x-ray diffraction (XRD) of 400 nm and 1500 nm thick InAs epilayers on GaAs, and 4 nm thick InAs on graded InGaAs layer with total thickness of 300 nm grown by molecular beam epitaxy. The PL peak positions of 400 nm, 1500 nm and 4 nm InAs epilayer measured at 10 K are blue-shifted from that of InAs bulk by 6.5, 4.5, and 6 meV, respectively, which can be largely explained by the residual strain in the epilayer. The residual strain caused by the lattice mismatch between InAs and GaAs or graded InGaAs/GaAs was observed from XRD measurements. While the PL peak position of 400 nm thick InAs layer is linearly shifted toward higher energy with increase in excitation intensity ranging from 10 to 140 mW, those of 4 nm InAs epilayer on InGaAs and 1500 nm InAs layer on GaAs is gradually blue-shifted and then, saturated above a power of 75 mW. These results suggest that adopting a graded InGaAs layer between InAs and GaAs can efficiently reduce the strain due to lattice mismatch in the structure of InAs/GaAs.