140 results on '"Setsuhara, Y."'
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2. Nano-crystalline silicon thin films grown by the inductively coupled plasma assisted CFUBM at low temperature
3. High Density Compression of Hollow-Shell Target by Gekko XII and Laser Fusion Research at Ile, Osaka University
4. Plasma Sources in Thin Film Deposition
5. Interface structure of microcrystalline silicon deposited by inductive coupled plasma using internal low inductance antenna
6. Effects of ion energy and arrival rate on the composition of zirconium oxide films prepared by ion-beam assisted deposition
7. Development of internal-antenna-driven large-area RF plasma sources using multiple low-inductance antenna units
8. Mechanical properties of zirconium films prepared by ion-beam assisted deposition
9. Prediction of Single Phase Formation of Non-equilibrium Pseudobinary Nitrides Assisted by Energetic Particle Bombardment
10. Synthesis of (Ti, Al) N films by ion beam assisted deposition
11. A study of ion implantation induced variation of crystalline phase of boron nitride
12. Synthesis of carbon nitride films by high-density helicon wave-excited plasma sputtering
13. Structure refinement and hardness enhancement of titanium nitride films by addition of copper
14. Improved anti-wear performance of nanostructured titanium boron nitride coatings
15. Preparation of aluminum oxide films by ion beam assisted deposition
16. Development of high-density RF plasma and application to PVD
17. Internal-antenna-driven inductive RF discharges for development of large-area high-density plasma sources with suppressed electrostatic coupling
18. Properties of cubic boron nitride films with buffer layer control for stress relaxation using ion-beam-assisted deposition
19. 4.12 - Plasma Sources in Thin Film Deposition
20. Spatio-temporal behaviors of atmospheric-pressure plasma jets for investigation of reactive-species production in liquid
21. Influence of ion energy and arrival rate on x-ray crystallographic properties of thin ZrO[subx] films prepared on Si(111) substrate by ion-beam assisted deposition.
22. Emission spectroscopy of Ar + H2+ C7H8plasmas: C7H8flow rate dependence and pressure dependence
23. Molecular-structure variation of organic materials irradiated with atmospheric pressure plasma
24. Investigation of plasma-organic materials interaction in aqueous solution with atmospheric pressure plasmas
25. Effects of RF Power and Working Pressure on the Properties of Nc-Si:H Thin Films Deposited by an ICP-CVD System
26. The 24th Symposium on Plasma Science for Materials (SPSM-24)
27. Plasma etching resistance of plasma anisotropic CVD carbon films
28. Field Emission Properties of 10-nm Pillars of Organics Fabricated by Pt particles and Plasma Etching
29. Substrate temperature dependence of feature profile of carbon films on substrate with submicron trenches
30. High density compression of hollow pellet by gekko XII at Osaka
31. Erratum to ‘Synthesis of carbon nitride films by high-density helicon wave-excited plasma sputtering’
32. Coherent phonon excitation as nonequilibrium dopant activation process for ultra-shallow junction formation.
33. Formation of carbon nitride films by reactive high-density plasma sputtering with excitation of m=0 mode helicon wave
34. Inductively coupled reactive high-density plasmas designed for sputter deposition
35. Phase variation and properties of (Ti, Al)N films prepared by ion beam assisted deposition
36. Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement
37. Interfacial structure control of cubic boron nitride films prepared by ion-beam assisted deposition
38. Properties of depth-profile controlled boron nitride films prepared by ion-beam assisted deposition
39. Characterization of helicon wave plasma designed for direct current sputtering
40. Advanced Ceramics Sintering Using High-Power Millimeter-Wave Radiation
41. Synthesis of (Ti, Al)N films by ion beam assisted deposition
42. Synthesis of Ti-Al alloys by ion-beam-enhanced deposition
43. Microstructure of titanium oxide films synthesized by ion beam dynamic mixing
44. Titanium oxide films prepared by dynamic ion mixing
45. Synthesis of aluminum oxide thin films by ion beam and vapor deposition technology
46. Rutile‐type TiO2 formation by ion beam dynamic mixing
47. High-density compression experiments at ILE, Osaka
48. Secondary nuclear fusion reactions as evidence of electron degeneracy in highly compressed fusion fuel
49. X‐ray and particle diagnostics of a high‐density plasma by laser implosion (invited)
50. Electron cyclotron resonance plasma enhanced direct current sputtering discharge with magnetic-mirror plasma confinement.
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