15 results on '"Schlax, Michael P."'
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2. Mechanical analysis of hard pellicles for 157-nm lithography
3. Mechanical analysis of hard pellicles for 157-nm lithography.
4. Experimental model verification of the thermal response of optical reticles.
5. Film stress changes during anodic bonding of NGL masks.
6. Comparison of substrate curvature and resonant frequency thin film stress mapping techniques.
7. Film stress changes during anodic bonding of NGL masks
8. Stress mapping techniques for the SCALPEL mask membrane system
9. Finite element modeling of SCALPEL masks
10. Modal analysis of the SCALPEL mask using experimental and numerical methods
11. Dynamic characterization of step-induced vibrations of x-ray mask membranes
12. Stress mapping techniques for the SCALPEL mask membrane system.
13. Dynamic characterization of step-induced vibrations of x-ray mask membranes.
14. Reproduction and the carbon legacies of individuals
15. Geographical Variability of the First Baroclinic Rossby Radius of Deformation
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