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Decoherence and parameter fluctuations are two of the mayor obstacles for solid-state quantum computing. In this work, decoherence in superconducting qubits of the transmon type is investigated. For this purpose, a time-multiplexed measurement protocol was developed and applied in long-term measurements. The resulting simultaneous measurement of the qubit's relaxation and dephasing rate, as well as its resonance frequency enables analysis of correlations between these parameters. A spectral noise analysis complements these measurements. Together, the results agree well with the interacting defect model of two-level-systems and yield information about the microscopic origin of the intrinsic decoherence mechanisms in Josephson qubits. Our measurements show inherent correlations between dephasing and fluctuations in qubit frequency on the timescale of seconds to days, which is attributed to the influence of individual defects, located close to conductor edges. Cross-correlation and spectral noise analysis confirm this interpretation and ascribe the source of fluctuation to interactions between thermal fluctuators and surface defects. Single defects reducing the coherence of qubits by up to one order of magnitude are a major challenge for future quantum computers. Non-tunable qubits are intrinsically insensitive to some decoherence channels and thus ideal for this fundamental analysis. However, to widen the focus and contrast the results of different material systems, we pursue the fabrication of voltage controlled gatemon qubits. In the course of this work, the theoretical foundation and technical implementation of transmon qubits based on regular Josephson weak links, and semiconducting nanowires is given. The experimental design and measurement setup are explained in detail. Our findings make continuous re-calibration a necessity in today's solid-state qubits, although new materials or processing techniques might mitigate the problem. However, the results of this work imply that fundamental improvements of qubit parameter stability are necessary in order to realize scalable and coherent qubit circuits.

We present an argon ion beam milling process to remove the native oxide layer forming on aluminum thin films due to their exposure to atmosphere in between lithographic steps. Our cleaning process is readily integrable with conventional fabrication of Josephson junction quantum circuits. From measurements of the internal quality factors of superconducting microwave resonators with and without contacts, we place an upper bound on the residual resistance of an ion beam milled contact of 50 mΩ μm2 at a frequency of 4.5 GHz. Resonators for which only 6% of the total foot-print was exposed to the ion beam milling, in areas of low electric and high magnetic fields, showed quality factors above 106 in the single photon regime, and no degradation compared to single layer samples. We believe these results will enable the development of increasingly complex superconducting circuits for quantum information processing.

We report on the investigation of a superconducting anharmonic multilevel circuit that is coupled to a harmonic readout resonator. We observe multiphoton transitions via virtual energy levels of our system up to the fifth excited state. The back-action of these higher-order excitations on our readout device is analyzed quantitatively and demonstrated to be in accordance with theoretical expectation. By applying a strong microwave drive we achieve multiphoton dressing within our anharmonic circuit which is dynamically coupled by a weak probe tone. The emerging higher-order Rabi sidebands and associated Autler-Townes splittings involving up to five levels of the investigated anharmonic circuit are observed. Experimental results are in good agreement with master-equation simulations.