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Quantum sensors based on the nitrogen-vacancy (NV) centre in diamond are rapidly advancing from scientific exploration towards the first generation of commercial applications. While significant progress has been made in developing suitable methods for the manipulation of the NV centre spin state, the detection of the defect luminescence has so far limited the performance of miniaturized sensor architectures. The recent development of photoelectric detection of the NV centre's spin state offers a path to circumvent these limitations, but has to-date required research-grade low current amplifiers to detect the picoampere-scale currents obtained from these systems. Here we report on the photoelectric detection of magnetic resonance (PDMR) with NV ensembles using a complementary metal-oxide semiconductor (CMOS) device. The integrated circuit delivers a digitized output of the diamond sensor with low noise and 50 femtoampere resolution. This integration provides the last missing component on the path to a compact, diamond-based quantum sensor. The device is suited for continuous wave (CW) as well as pulsed operation. We demonstrate its functionality with DC and AC magnetometry up to several megahertz, coherent spin rotation and multi-axial decoupling sequences for quantum sensing., Comment: 4 figures, 10 pages including bibliography, 8 pages not including bibliography

Optical microcavities allow to strongly confine light in small mode volumes and with long photon lifetimes. This confinement significantly enhances the interaction between light and matter inside the cavity, with applications such as optical trapping and cooling of nanoparticles, single-photon emission enhancement, quantum information processing, and sensing. For many applications, open resonators with direct access to the mode volume are necessary. Here we report on a scalable, open-access optical microcavity platform with mode volumes < 30 $\lambda^3$ and finesse approaching $5x10^5$. This result significantly exceeds the highest optical enhancement factors achieved to date for Fabry-P\'erot cavities. The platform provides a building block for high-performance quantum devices relying on strong light-matter interaction.

We report on the detection of free nanoparticles in a micromachined, open-access Fabry-P\'erot microcavity. With a mirror separation of $130\,\mu$m, a radius of curvature of $1.3\,$mm, and a beam waist of $12\,\mu$m, the mode volume of our symmetric infrared cavity is smaller than $15\,$pL. The small beam waist, together with a finesse exceeding 34,000, enables the detection of nano-scale dielectric particles in high vacuum. This device allows monitoring of the motion of individual $150\,$nm radius silica nanospheres in real time. We observe strong coupling between the particles and the cavity field, a precondition for optomechanical control. We discuss the prospects for optical cooling and detection of dielectric particles smaller than $10\,$nm in radius and $1\times10^7\,$amu in mass., Comment: 4 pages, 3 figures

Precise control of tensile stress and intrinsic damping is crucial for the optimal design of nanomechanical systems for sensor applications and quantum optomechanics in particular. In this letter we study the in uence of oxygen plasma on the tensile stress and intrinsic damping of nanomechanical silicon nitride resonators. Oxygen plasma treatments are common steps in micro and nanofabrication. We show that oxygen plasma of only a few minutes oxidizes the silicon nitride surface, creating several nanometer thick silicon dioxide layers with a compressive stress of 1.30(16)GPa. Such oxide layers can cause a reduction of the e ective tensile stress of a 50 nm thick stoichiometric silicon nitride membrane by almost 50%. Additionally, intrinsic damping linearly increases with the silicon dioxide lm thickness. An oxide layer of 1.5nm grown in just 10s in a 50W oxygen plasma almost doubled the intrinsic damping. The oxide surface layer can be e ciently removed in bu ered HF.