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Occupational exposure to airborne nanoparticles in semiconductor-manufacturing facilities is of growing concern. Currently, comprehensive information regarding atmospheric concentrations, potential origins, and the physical and chemical properties of nanoparticles in these industrial settings is lacking. This study investigated the occurrence of airborne nanoparticles within a semiconductor-research and -manufacturing facility, during both routine operation and maintenance activities. A Scanning Mobility Particle Sizer was used to monitor size-resolved airborne-nanoparticle number concentrations spanning the range of 6 to 220 nm. Breathing zone filter samples were also collected during maintenance processes and underwent subsequent analyses via Transmission Electron Microscopy and Inductively Coupled Plasma Mass Spectrometry, to discover the size, morphology, and chemical composition of the observed nanoparticles. The findings reveal low levels of airborne nanoparticles during routine operations, but maintenance tasks resulted in substantial concentration surges particularly for plasma-enhanced chemical vapor deposition tools with concentrations up to 11,800 particles/cm3. More than 80% of observed particles were smaller than 30 nm. These smallest particles were predominately composed of metals such as iron, nickel, and copper. Moreover, larger particles above 100 nm were also identified, comprising process-related materials such as silicon and indium. Comparative assessment against established mass-based exposure limits did not yield any exceedances. Current exposure limits do not typically consider size though, and the preponderance of small nanoparticles (<30 nm) would warrant a more size-differentiated exposure-risk assessment. [ABSTRACT FROM AUTHOR]

Occupational exposure to airborne nanoparticles in semiconductor-manufacturing facilities is of growing concern. Currently, comprehensive information regarding atmospheric concentrations, potential origins, and the physical and chemical properties of nanoparticles in these industrial settings is lacking. This study investigated the occurrence of airborne nanoparticles within a semiconductor-research and -manufacturing facility, during both routine operation and maintenance activities. A Scanning Mobility Particle Sizer was used to monitor size-resolved airborne-nanoparticle number concentrations spanning the range of 6 to 220 nm. Breathing zone filter samples were also collected during maintenance processes and underwent subsequent analyses via Transmission Electron Microscopy and Inductively Coupled Plasma Mass Spectrometry, to discover the size, morphology, and chemical composition of the observed nanoparticles. The findings reveal low levels of airborne nanoparticles during routine operations, but maintenance tasks resulted in substantial concentration surges particularly for plasma-enhanced chemical vapor deposition tools with concentrations up to 11,800 particles/cm3. More than 80% of observed particles were smaller than 30 nm. These smallest particles were predominately composed of metals such as iron, nickel, and copper. Moreover, larger particles above 100 nm were also identified, comprising process-related materials such as silicon and indium. Comparative assessment against established mass-based exposure limits did not yield any exceedances. Current exposure limits do not typically consider size though, and the preponderance of small nanoparticles (

The scanning mobility particle sizer (SMPS) is a key instrument for aerosol studies that enables rapid measurement of particle size distribution. When SMPS data are inverted, the smearing effect needs to be considered. Previous studies used numerical methods to deconvolute the smearing effect. In this paper, to reduce the complexity of SMPS data inversion, we derive an analytical formula for de-smearing, and include our de-smearing formula into a full SMPS data inversion scheme. We also propose the voltage step change experiment to characterize the smearing effect of an SMPS. The effectiveness and robustness of our de-smearing approach were demonstrated using experimental data. • A simple analytical formula was derived to deconvolute the smearing effect of SMPS. • This de-smearing formula was integrated into a SMPS data inversion scheme. • The SMPS smearing parameters can be determined by voltage step change experiment. [ABSTRACT FROM AUTHOR]

A detailed experimental characterization of the particle emissions of a EURO 5 light-duty Diesel engine, equipped with a wall flow Diesel Particulate Filter (DPF), is presented. Particle Size Distributions (PSDs) in the range from 4.5 up to 160 nm have been measured at the engine exhaust by means of a Scanning Mobility Particle Sizer, during both DPF accumulation and regeneration phase. During accumulation, the size-dependent DPF removal efficiency has been evaluated by PSDs measurements at both inlet and outlet of the filter. The maximum efficiency was found in the range 10-40 nm. Nevertheless, the DPF ensures a strong reduction in the emissions for the sub-23 nm nanoparticles too, with an efficiency between 91–95%. Unless for the warm-up phase, the engine operating conditions do not have a great impact on the particles emitted due to the high DPF removal efficiency. The measurements carried out during the regeneration phase evidenced that particle emissions strongly depend on DPF temperature. Actually, once the soot burnout temperature is reached, soot oxidation starts and a great amount of particles in terms of PN is released. Overall, PSDs showed an increase in particle number concentration up to two order of magnitude with respect to the emissions measured during the accumulation phase. [ABSTRACT FROM AUTHOR]

There is a need to better understand particle size distributions (PSDs) from turbulent flames from a theoretical, practical and even regulatory perspective. Experiments were conducted on a sooting turbulent non-premixed swirled ethylene flame with secondary (dilution) air injection to investigate exhaust and in-burner PSDs measured with a Scanning Mobility Particle Sizer (SMPS) and soot volume fractions (f v) using extinction measurements. The focus was to understand the effect of systematically changing the amount and location of dilution air injection on the PSDs and f v inside the burner and at the exhaust. The PSDs were also compared with planar Laser Induced Incandescence (LII) calibrated against the average f v. LII provides some supplemental information on the relative soot amounts and spatial distribution among the various flow conditions that helps interpret the results. For the flame with no air dilution, f v drops gradually along the centreline of the burner towards the exhaust and the PSD shows a shift from larger particles to smaller. However, with dilution air f v reduces sharply where the dilution jets meet the burner axis. Downstream of the dilution jets f v reduces gradually and the PSDs remain unchanged until the exhaust. At the exhaust, the flame with no air dilution shows significantly more particles with an f v one to two orders of magnitude greater compared to the Cases with dilution. This dataset provides insights into soot spatial and particle size distributions within turbulent flames of relevance to gas turbine combustion with differing dilution parameters and the effect dilution has on the particle size. Additionally, this work measures f v using both ex situ and in situ techniques, and highlights the difficulties associated with comparing results across the two. The results are useful for validating advanced models for turbulent combustion. [ABSTRACT FROM AUTHOR]

Electronic (e-) cigarettes, also known as electronic nicotine delivery systems, are battery-operated devices that are growing in popularity worldwide. Although e-cigarettes are known to be safer than traditional cigarettes, their potential health risks have not been extensively reviewed yet. In this study, aerosol nanoparticles generated from e-cigarette heaters were characterized. Kanthal A1 (iron + chromium + aluminum) coils, without nicotine solution or a wick, were installed in an e-cigarette atomizer. The operating conditions were varied coil resistances (0.1-1.0 O), a set applied power (10 W), and a stable duty cycle (50%: 5 s on, 5 s off). The size distribution and morphology of particles were collected by a scanning mobility particle sizer and evaluated by transmission electron microscopy, respectively. From an applied power of 10 W and a 50% duty cycle, the size and total number concentration (TNC) of particles emitted increased with greater coil resistances. Within these operating conditions, the average TNC of particles generated exhibited a steep decrease during the first 15 minutes of each trial. The TNC of particles decreased over time because surface oxidation (iron oxide layer) prevented further nanoparticle emission. As a result, a used coil may reduce the risk of the metal exposure from e-cigarettes. The results indicate that our designed and tested e-cigarette generation system is useful for future research that aims to investigate the health impacts of metallic particle inhalation on e-cigarette users. [ABSTRACT FROM AUTHOR]

As the popularity of mixed abrasive slurry (MAS) use in chemical mechanical planarization (CMP) increases, analysis of number concentration and mixing ratios become increasingly important. In this study, the applicability of an electrospray-scanning mobility particle sizer (ES-SMPS) to particle-size analysis of MAS for measuring number concentration and mixing ratio is investigated. Additives to improve the CMP process cause non-volatile residue (NVR) peaks, making it difficult to obtain clear particle-size distributions. Because NVR peaks are affected by the size of the generated droplets, an aerosol generator that produces droplets of different sizes. Compared to atomizers that generate large droplets, an electrospray that generates small droplets minimizes disturbance of NVR peaks, allowing for clear particle-size distributions. Using ES-SMPS, the number concentration and mixing ratio of an MAS were analyzed with no interference from NVR peaks. CMP evaluation of an MAS of a certain number concentration confirmed that using an MAS with a constant number concentration improves the removal rate. Number concentration–based MAS analysis is therefore possible using existing weight concentration–based MAS research and ES-SMPS measurements. Measurement of abrasive number concentrations using ES-SMPS can also provide more realistic information on the number of participating abrasives. [Display omitted] • Size distribution of a mixed abrasive slurry (MAS) was analyzed using an electrospray-scanning mobility particle sizer (ES-SMPS). • Non-volatile residue (NVR) peaks should be considered using SMPS measurements. • Small, mono-disperse droplets generated by electrospray minimize the influence of NVR. • Use of a number concentration-based MAS improves the copper CMP removal rate. [ABSTRACT FROM AUTHOR]

Background: Relationships among portable scanning mobility particle sizer (P-SMPS), condensation particle counter (CPC), and surface area monitor (SAM), which are different metric measurement devices, were investigated, and two widely used research grade (RG)-SMPSs were compared to harmonize the measurement protocols. Methods: Pearson correlation analysis was performed to compare the relation between P-SMPS, CPC, and SAM and two common RG-SMPS. Results: For laboratory and engineered nanoparticle (ENP) workplaces, correlation among devices showed good relationships. Correlation among devices was fair in unintended nanoparticle (UNP)-emitting workplaces. This is partly explained by the fact that shape of particles was not spherical, although calibration of sampling instruments was performed using spherical particles and the concentration was very high at the UNP workplaces to allow them to aggregate more easily. Chain-like particles were found by scanning electron microscope in UNP workplaces. The CPC or SAM could be used as an alternative instrument instead of SMPS at the ENP-handling workplaces. At the UNP workplaces, where concentration is high, real-time instruments should be used with caution. There are significant differences between the two SMPSs tested. TSI SMPS showed about 20% higher concentration than the Grimm SMPS in all workplaces. Conclusions: For nanoparticle measurement, CPC and SAM might be useful to find source of emission at laboratory and ENP workplaces instead of P-SMPS in the first stage. An SMPS is required to measure with high accuracy. Caution is necessary when comparing data from different nanoparticle measurement devices and RG-SMPSs.

Abstract In this work we present a systematic study of metallic nanoparticle production by spark ablation. We show how to adjust key process parameters to tune the obtained particle size, concentration and mass for various metals and carbon, which we produced in its amorphous form according to Raman spectroscopy, as the present experimental setup offers the possibly for a fast and easy exchange of the electrodes. For nearly all tested materials a mean particle size of below 5 nm can be obtained if proper process conditions are chosen. We show that energy efficiency of the spark ablation process can be increased by higher circuit capacitance and smaller electrode diameters. Furthermore, we correlate the particle mass production during spark ablation with a modified Fourier number. This allows us to compare expected mass yields for different elements and indicates that heat dissipation and especially conduction away from the spark region plays an important role for the particle production. Graphical abstract fx1 Highlights • Particles from 11 different elements: Ag, Al, C, Cu, Hf, Mo, Nb, Sn, Ti, W and Zn. • Characterization of the influence of key process parameters on aerosol properties. • Raman spectroscopy of the produced carbon particles. • Partial dissipation of heat from the spark discharge influences particle production. • Correlation of the produced particle mass with a modified Fourier number. [ABSTRACT FROM AUTHOR]

By combining analytical ultracentrifugation (AUC) in liquid phase and scanning mobility particle sizer (SMPS) in the gas phase, additional information on the particle size and morphology has been obtained for rigid particles. In this paper, we transfer this concept to soft particles, allowing us to analyze the size and molar mass of the short side chain perfluorosulfonic acid ionomer Aquivion® in a dilute aqueous suspension. The determination of the primary size and exact molar mass of this class of polymers is challenging since they are optically transparent and due to the formation of different aggregate structures depending on the concentration and solvent properties. First, validation of AUC and SMPS measurements was carried out using the well-defined biopolymers bovine serum albumin (BSA) and lysozyme (LYZ) to confirm the reliability of the results of the two unique and independent classifying methods. Then, the ionomer Aquivion® was studied using both techniques. From the mean molar mass of 185 ± 14 kDa obtained by AUC, a mean hydrodynamic diameter of 7.6 ± 0.5 nm was calculated. The particle size obtained from SMPS (7.1 nm) agrees very well with the results from AUC showing that the molecule was transferred into the gas phase without significantly changing its structure. In conclusion, the Aquivion® is molecularly dispersed in the used aqueous buffer solution without any aggregate formation in the investigated concentration range (< 2 g l−1). [ABSTRACT FROM AUTHOR]

This study synthesizes for the first time results from simultaneous aerosol measurements performed at seven diverse locations distributed all over the Spanish geography. The observations were carried out during two field campaigns in 2012–2013, one-month each and during different seasons. These field campaigns were performed in the framework of the Spanish Network of DMAs (REDMAAS) activities. Measurement sites were grouped as polluted sites (urban background) and clean sites (rural background and high-altitude sites). Seasonal differences were more important at polluted sites, mainly related to meteorology and aerosol sources. Higher total particle concentrations were found during the cold period, driven mainly by Aitken-mode particles (traffic-related aerosol particles). In clean sites, particle concentrations were higher during the warm period. Mild meteorological conditions in combination with the absence of local sources during the cold period make atmospheric nucleation an important contributor to ultrafine particles. These results are reflected in aerosol dynamical processes. Ultrafine particle bursts were frequent in both periods at the clean sites and in the warm period at most polluted sites. Shrinkages processes were identified at three sites (two polluted and one clean site) during the warm period. Meteorology (wind speed and solar radiation) and a highly-volatile aerosol (formed from atmospheric nucleation or traffic emissions) explain this behaviour. Ultrafine particles exhibited a different behaviour at inland and coastal sites. The highest total particle concentrations were observed at coastal sites during the warm period. At these sites, the smallest particle modal diameters and the highest variations of particle number size distributions in the smaller particle size range were also found, particularly in the warm period. This may be the result of the high diffusion conditions and mixing of different air masses (clean and polluted) caused by sea-land breezes. Our findings can be explained by the local and regional characteristics of each site, such as meteorology and aerosol sources (types, proximity …) and the influence of meteorology on atmospheric transformation processes. [ABSTRACT FROM AUTHOR]

In the context of the international experimental campaign Hygroscopic Aerosols to Cloud Droplets (HygrA-CD, 15 May to 22 June 2014), dry aerosol size distributions were measured at Demokritos station (DEM) using a Scanning Mobility Particle Sizer (SMPS) in the size range from 10 to 550 nm (electrical mobility diameter), and an Optical Particle Counter (OPC model Grimm 107 operating at the laser wavelength of 660 nm) to acquire the particle size distribution in the size range of 250 nm to 2.5 μm optical diameter. This work describes a method that was developed to align size distributions in the overlapping range of the SMPS and the OPC, thus allowing us to retrieve the real part of the aerosol equivalent refractive index (ERI). The objective is to show that size distribution data acquired at in situ measurement stations can provide an insight to the physical and chemical properties of aerosol particles, leading to better understanding of aerosol impact on human health and earth radiative balance. The resulting ERI could be used in radiative transfer models to assess aerosol forcing direct effect, as well as an index of aerosol chemical composition. To validate the method, a series of calibration experiments were performed using compounds with known refractive index (RI). This led to a corrected version of the ERI values, ( ERI COR ). The ERI COR values were subsequently compared to model estimates of RI values, based on measured PM 2.5 chemical composition, and to aerosol RI retrieved values by inverted lidar measurements on selected days. [ABSTRACT FROM AUTHOR]

This study suggests a simple self-diagnostic method for identifying the abnormal functioning of a scanning mobility particle sizer (SMPS). Under the operating conditions of a laboratory-made electrostatic precipitator, where the collection efficiency is expected to be at maximum, the efficiency against neutralized particles was measured using a malfunctioning SMPS. The efficiency was compared with the theoretical maximum collection efficiency. The difference in efficiency between experimental and theoretical collection efficiencies was used as an indicator of an SMPS malfunction. Moreover, the effects of the flow rate, neutralizer condition, and inlet particle concentration on the error signal were investigated. The error signal was shown to properly reflect the operational state of the SMPS; thus, a malfunction can be easily confirmed without the need for accurate comparison data. The error signal was also shown to be robust against a radioactive source, period of neutralizer use, and flow rate. The signal was clear when the particle concentration was sufficiently high, but tended to fade with a decrease in the inlet particle concentration. The suggested self-diagnostic method can be used to check the malfunctioning of a SMPS before a main experiment or to determine whether the SMPS requires calibration. [ABSTRACT FROM AUTHOR]