Author: "Sandstrom, P.W." - Searchworks@Jio Institute Digital Library Search Results

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Author: Landsman, H., Cheng, E., Kulcyk, E., Laundrie, A.W., Rotter, B., Ruckman, L., Sandstrom, P.W., and Varner, G.S.
Published: 2012
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Author: Chen, R.T.S., primary, Sandstrom, P.W., additional, and Hershkowitz, N., additional
Published: 1995
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Author: Sandstrom, P.W., primary, Sridharan, K., additional, and Conrad, J.R., additional
Published: 1993
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Author: Wang, W., Foster, J., Wendt, A.E., Booske, J.H., Onuoha, T., Sandstrom, P.W., Liu, H., Gearhart, S.S., and Hershkowitz, N.
Subjects: MAGNETIC fields, PLASMA gases, SPUTTERING (Physics), COPPER
Abstract: Evaluates the use of multipole magnetic field to enhance an inductively coupled radio frequency argon plasma for ionized magnetron sputtering of copper. Inclusion of Langmuir probe and optical emission spectroscopy measurements; Assumption of constant electron energy distribution function.
Published: 1997
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