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The desmear process of removing via residue after laser drill in substrate manufacturing is a critical step for reliability and electrical performance. Cost effective and environmentally clean desmear processes are industry-wide objectives, as the current wet desmear process results in significant chemical waste and regular bath replacement. Here, we evaluated an effective photo desmear method targeting a low total cost of ownership and negligible environmental impact. This method achieves residue and silica free via bottoms with the use of 172nm vacuum ultraviolet light (VUV) photo-chemical ashing followed by water clean. Studies of organic molecular photochemical decomposition by short wavelength UV light are widely reported and have been applied for purposes such as surface cleaning and improving wettability and are naturally extendable to via residue removal. Scanning electron microscope (SEM) and energy dispersed X-ray spectroscopy (EDX) reveal that the application of VUV desmear results in residue free microvia without negatively affecting via shape or the dielectric surface. In addition, the surface remains highly wettable, which aids downstream copper plating. The high reaction rate, absence of wet chemistry, and creation of surfaces amenable for subsequent copper plating make this dry desmear process a strong candidate for future applications in substrate manufacturing. more...

We investigate a strategy for producing organic NLO materials with high chromophore densities by assembling Langmuir monolayers and Langmuir–Blodgett films containing mixtures of two hyperpolarizable chromophore amphiphiles. When deposited at an air–water interface, the amphiphilic molecules are oriented with their molecular hyperpolarizabilities aligned, and their dipole moments antialigned. We find that mixed chromophore Langmuir monolayers are more stable than pure ones, suggesting that electrostatic interactions aid self-assembly and ordering. Upon transfer of the monolayers to glass and silicon substrates, aggregates with well-defined topological features appear. We characterize aggregate formation using fluorescence microscopy, atomic force microscopy, and nonlinear optical ellipsometry, and we propose a mechanism for aggregate formation. Understanding molecular interactions between strong chromophores should enable fabrication strategies that prevent aggregation and optimize chromophore alignment. ... more...

The influence of rotational and geometrical isomerism on the nonlinear optical (NLO) properties, specifically the first-order hyperpolarizability beta, of chromophores of current interest has been investigated with density functional theory (DFT). In the first of this two-part study, the rotational isomerism of a linear chromophore was explored. Calculation of the torsion potentials about two of the rotatable and conformation-changing single bonds in a chromophore demonstrated the near equality of the molecular energies at 0 degrees and 180 degrees rotational angles. To explore the consequences of this near conformational energy degeneracy to NLO behavior, the eight low energy rotational isomers of FTC [Robinson, B. H.; et al. Chem. Phys. 1999, 245, 35] were investigated. This study provides the first-reported DFT-based calculation of the statistical mechanical average of beta over the conformational space of a molecule having substantial nonlinear optical behavior. The influence of the solvent reaction field on rotameric populations and on the beta tensor is reported. In the second part, two molecules having two donors and two acceptors bonded respectively in ortho and meta positions on a central benzene ring are shown to have substantially different beta tensors. These two so-called molecular Xs have different highest occupied molecular orbital to lowest unoccupied molecular orbital (HOMO-LUMO) distributions, and consistent with expectations, it is found that the larger beta(zzz) is associated with a large spatial asymmetry between the HOMOs and LUMOs. Large hyperpolarizability correlates with the HOMO concentrated on the donor groups and the LUMO on the acceptor groups. more...

Efficient noncentrosymmetric arrangement of nonlinear optical (NLO) chromophores with high first-order hyperpolarizability (beta) for increased electro-optical (EO) efficiency has proven challenging as strong dipolar interactions between the chromophores encourage antiparallel alignment, attenuating the macroscopic EO effect. This work explores a novel approach to simultaneously achieve large beta values while providing an adjustable dipole moment by linking a strong neutral-ground-state (NGS) NLO chromophore with positive beta to a zwitterionic (ZWI) chromophore with negative beta in an antiparallel fashion. It is proposed that the overall beta of such a structure will be the sum of the absolute values of the two types of chromophores while the dipole moment will be the difference. Molecules 1-3 were synthesized to test the feasibility of this approach. Molecular dynamics calculations and NMR data supported that the NGS chromophore component and the ZWI chromophore component self-assemble to an antiparallel conformation in chloroform. Calculations showed that the dipole moment of 1 is close to the difference of the two component chromophores. Hyper-Rayleigh scattering (HRS) studies confirmed that the first hyperpolarizability of 1 is close to the sum of the two component chromophores. These results support the idea that an antiparallel-aligned neutral-ground-state chromophore and a zwitterionic chromophore can simultaneously achieve an increase in beta and a decrease of the dipole moment. more...

A macrocyclic trichromophore bundle 1 with parallel-aligned dipole moments has been synthesized to study the influence of aggregation and orientation of a nonlinear optical (NLO) chromophore on its optical properties. The linear and nonlinear optical properties of 1 and a single chromophore standard 2 have been studied by UV-vis absorption, fluorescence, solvatochromic spectrometry, and hyper-Rayleigh scattering (HRS). Reduced first-order hyperpolarizability beta, hypsochromic shift, enhanced solvatochromic shifts, and fluorescence quenching for individual chromophores were observed when 1 was compared with 2. Analysis of the data showed that the transition dipole moment changes only slightly when the chromophores are parallel aligned in the bundle architecture. However, the apparent hyperpolarizability of the individual chromophores decreased significantly by about 20%. The reduction in beta for the individual chromophores in 1 is largely due to the hypsochromic shift, i.e., excitation energy increase of the interband (charge-transfer) energy gap and the reduced difference between the ground-state and excited-state dipole moments. The hypsochromic shift and fluorescence quenching are consistent with exciton theory. Possible reasons for the enhanced solvatochromic shift are discussed. more...

This communication primarily deals with utilizing organic electro-optic (OEO) materials for the fabrication of active wavelength division multiplexing (WDM) transmitter/receiver systems and reconfigurable optical add/drop multiplexers (ROADMs), including the fabrication of hybrid OEO/silicon photonic devices. Fabrication is carried out by a variety of techniques including soft and nanoimprint lithography. The production of conformal and flexible ring microresonator devices is also discussed. The fabrication of passive devices is also briefly reviewed. Critical to the realization of improved performance for devices fabricated from OEO materials has been the improvement of electro-optic activity to values of 300 pm/V (or greater) at telecommunication wavelengths. This improvement in materials has been realized exploiting a theoretically-inspired (quantum and statistical mechanics) paradigm for the design of chromophores with dramatically improved molecular first hyperpolarizability and that exhibit intermolecular electrostatic interactions that promote self-assembly, under the influence of an electric poling field, into noncentrosymmetric macroscopic lattices. New design paradigms have also been developed for improving the glass transition of these materials, which is critical for thermal and photochemical stability and for optimizing processing protocols such as nanoimprint lithography. Ring microresonator devices discussed in this communication were initially fabricated using chromophore guest/polymer host materials characterized by electro-optic coefficients on the order of 50 pm/V (at telecommunication wavelengths). Voltage-controlled optical tuning of the pass band of these ring microresonators was experimental determined to lie in the range 1-10 GHz/V or all-organic and for OEO/silicon photonic devices. With new materials, values approaching 50 GHz/V should be possible. Values as high as 300 GHz/V may ultimately be achievable. more...

The motivation for use of organic electro-optic materials derives from (1) the inherently fast (sub-picosecond) response of π-electron systems in these materials to electrical perturbation making possible device applications with gigahertz and terahertz bandwidths, (2) the potential for exceptionally large (e.g., 1000 pm/V) electro-optic coefficients that would make possible devices operating with millivolt drive voltages, (3) light weight, which is a concern for satellite applications, and (4) versatile processability that permits rapid fabrication of a wide variety of devices including conformal and flexible devices, three dimensional active optical circuitry, hybrid organic/silicon photonic circuitry, and optical circuitry directly integrated with semiconductor VLSI electronics. The most significant concerns associated with the use of organic electro-optic materials relate to thermal and photochemical stability, although materials with glass transition temperatures on the order of 200°C have been demonstrated and photostability necessary for long term operation at telecommunication power levels has been realized. This communication focuses on explaining the theoretical paradigms that have permitted electro-optic coefficients greater than 300 pm/V (at telecommunication wavelengths) to be achieved and on explaining likely improvements in electro-optic activity that will be realized in the next 1-2 years. Systematic modifications of materials to improve thermal and photochemical stability are also discussed. more...

Quantum and statistical mechanical calculations have been used to guide the improvement of the macroscopic electro-optic activity of organic thin film materials to values greater than 300 pm/V at telecommunication wavelengths. Various quantum mechanical methods (Hartree-Fock, INDO, and density functional theory) have been benchmarked and shown to be reliable for estimating trends in molecular first hyperpolarizability, β, for simple variation of donor, bridge, and acceptor structures of charge-transfer (dipolar) chromophores. β values have been increased significantly over the past five years and quantum mechanical calculations suggest that they can be further significantly improved. Statistical mechanical calculations, including pseudo-atomistic Monte Carlo calculations, have guided the design of the super/supramolecular structures of chromophores so that they assemble, under the influence of electric field poling, into macroscopic lattices with high degrees of acentric order. Indeed, during the past year, chromophores doped into single- and multi-chromophore-containing dendrimer materials to form binary glasses have yielded thin films that exhibit electro-optic activities at telecommunication wavelengths of greater than 300 pm/V. Such materials may be viewed as intermediate between chromophore/polymer composites and crystalline organic chromophore materials. Theory suggests that further improvements of electro-optic activity are possible. Auxiliary properties of these materials, including optical loss, thermal and photochemical stability, and processability are discussed. Such organic electro-optic materials have been incorporated into silicon photonic circuitry for active wavelength division multiplexing, reconfigurable optical add/drop multiplexing, and high bandwidth optical rectification. A variety of all-organic devices, including stripline, cascaded prism, Fabry-Perot etalon, and ring microresonator devices, have been fabricated and evaluated. more...

Theoretical guidance, provided by quantum and statistical mechanical calculations, has aided the recent realization of electro-optic coefficients of greater than 300 pm/V (at 1.3 microns wavelength). This articles attempts to provide physical insight into those recent results and to explore avenues for the further improvement of electro-optic activity by structural modification, including to values of 500 pm/V and beyond. While large electro-optic coefficients are a necessary condition for extensive practical application of organic electro-optic materials, they are not a sufficient condition. Adequate thermal and photochemical stability, modest to low optical loss, and processability are important additional requirements. This article also examines such properties and suggests routes to achieving improved auxiliary properties. more...

The potential of organic electro-optic materials for large electro-optic activity and fast response to applied electric fields (leading to 100 GHz device bandwidths) is important and increasingly well-recognized. In this communication, we demonstrate how quantum and statistical mechanical calculations can be used to guide the systematic improvement of both molecular first hyperpolarizability (β) and macroscopic electro-optic activity (r). Femtosecond time-resolved, wavelength-agile Hyper-Rayleigh Scattering (HRS) measurements have been used to measure β values relative to chloroform and to avoid confusion associated with two photon contributions. Electro-optic coefficients have been characterized by simple reflection (Teng-Man method), attenuated total reflection (ATR), and Mach Zehnder interferometry. "Constant bias" modifications of these techniques have been used to permit investigation of optimized poling conditions. Organic electro-optic materials also afford unique advantages for the fabrication of conformal and flexible devices, for the integration of disparate materials, and for exploitation of novel manufacturing technologies such as soft lithography. Both stripline and ring microresonator structures have been fabricated by soft lithography. The integration of organic electro-optic materials with silicon photonics (both split ring microresonators and photonic bandgap circuitry) has been demonstrated. more...

Density functional theory calculations were used to develop understanding of the effects of differing substitution patterns in multiply donor an d acceptor substituted nonlinear optical chromophores. A novel series type substitution design was presented and evaluated. Calculations were performed for a number of structures and hyperpolarizability values were compared. The data obtained showed an increase in molecular first hyperpoloarizability in multifunctional chromophores based on the series type design as compared with linear molecules constructed from the same donor-bridge-acceptor components. This data was then used to direct the synthesis of novel nonlinear optical chromophores. 1. INTRODUCTION Organic molecules with large hyperpolarizabilities have drawn considerable attention over the past two decades because of their potential use in telecommunications, optical computing, phased array radar, and many other applications. 1 Such applications require thermally robust and photochemically stable materials exhibiting high nonlinear optical response. A popular semi-classical approach to the description of the origin of microscopic nonlinear optical (NLO) effects uses an anharmonic oscillator model. more...