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International audience; The dielectric properties of aluminium oxide (Al2O3) thin films obtained by plasma-enhanced atomic layer deposition (PEALD) from Al(CH3)3/O2 precursors were investigated while focusing on the influences of thermal annealing under a dioxygen (O2) ambient. PEALD-Al2O3-based metalinsulator-silicon structures/capacitors and pH-sensitive chemical field effect transistors were fabricated to deal respectively with microelectronic applications and measurement in liquid phase. Antagonist results were thus evidenced. On the one hand, dealing with high-k gate materials, optimized dielectric properties, i.e. low fixed charge density (4 × 10 12 cm-2), high dielectric constant (r = 10.2), Fowler-Nordheim conduction and high breakdown electric fields (Ebd = 8.75 MV/cm) were obtained for polycrystalline PEALD Al2O3 films annealed at high temperature (T > 750°C). On the other hand, pH detection properties, i.e. quasi-Nernstian sensitivity (59 mV/pH), low drift (< 1 mV/day) and long lifetime (> 180 days), were optimized for unannealed amorphous PEALD Al2O3 films. These phenomena were associated germination/crystallization phenomena in the deposited amorphous alumina structure as well as to related charge trapping and leakage currents in water-based solutions related to the final Al2O3 polycrystalline structure.

Magnetophoresis-based microfluidic devices offer simple and reliable manipulation of micro-scale objects and provide a large panel of applications, from selective trapping to high-throughput sorting. However, the fabrication and integration of micro-scale magnets in microsystems involve complex and expensive processes. Here we report on an inexpensive and easy-to-handle fabrication process of micrometer-scale permanent magnets, based on the self-organization of NdFeB particles in a polymer matrix (polydimethylsiloxane, PDMS). A study of the inner structure by X-ray tomography revealed a chain-like organization of the particles leading to an array of hard magnetic microstructures with a mean diameter of 4 µm. The magnetic performance of the self-assembled micro-magnets was first estimated by COMSOL simulations. The micro-magnets were then integrated into a microfluidic device where they act as micro-traps. The magnetic forces exerted by the micro-magnets on superparamagnetic beads were measured by colloidal probe atomic force microscopy (AFM) and in operando in the microfluidic system. Forces as high as several nanonewtons were reached. Adding an external millimeter-sized magnet allowed target magnetization and the interaction range to be increased. Then, the integrated micro-magnets were used to study the magnetophoretic trapping efficiency of magnetic beads, providing efficiencies of 100% at 0.5 mL/h and 75% at 1 mL/h. Finally, the micro-magnets were implemented for cell sorting by performing white blood cell depletion.

International audience; Here we report on the development of a lab-on-chip that integrates a dense array of micrometer-sized magnetic traps, with each individual trap generating a magnetic force as high as a few nN on standard superparamagnetic beads. The composite materials embedding traps are prepared from the microstructural engineering of a mixture between iron microparticles and polydimethylsiloxane. This approach breaks with standard microfabrication technologies: it is inexpensive, relatively easy to implement, and offers the ability to modulate the magnetic properties of the composites on a customized basis. The magnetic forces acting on the superparamagnetic beads have been measured following two approaches: first, on-chip through the hydrodynamic determination of the holding magnetic force, simultaneously on a large population of traps; and second, ex situ, by atomic force microscopy equipped with a colloidal probe, on individual traps. The experimental results have been compared with calculations from finite element modeling. Despite the geometrical simplification of the modeled system, both experiments and calculations give consistent values of force, ranging from 0.5 to 5 nN. These findings show that in operando determination of forces is a robust method that gives a high throughput overview of the forces acting in the device. It further demonstrates that the use of such functional composite materials can be a relevant alternative to standard microfabrication technologies, as it leads to competitive magnetophoretic performances.

International audience; The use of contactless magnetic forces meets numerous needs in microelectromechanical systems (MEMS) or microfluidic devices. In this view, heterogeneous materials integrating magnetic nanostructures within a non-magnetic matrix such as polymer can produce local variations of magnetic field, at the sub-micrometer scale. Here we report on the synthesis of magnetic composites using electrospun nanofilaments and a polydimethylsiloxane (PDMS) matrix. Varying the precursor nature and heat treatment conditions, we obtained single phase filaments of Fe, FeNi, and MFe2O4 (M = Co, Fe, Ni). Thanks to a fine investigation of their structure and morphology, it was possible to measure from magnetically-soft (µ0HC ≤ 5 mT) to relatively hard (µ0HC up to 93 mT, MR/MS up to 0.5) behaviors. The common one-dimensional shape of these filaments leads to an anisotropic magnetic response. This can be exploited to achieve self-organization of the filaments in arrays within the non-magnetic matrix. We show the first step towards the development of magnetically anisotropic membranes of PDMS with 0.23 wt% Fe filaments. These composite materials are promising for implementing magnetic functions in microsystems while circumventing complex micro-fabrication steps.

International audience; Here we report on the fabrication of micro-magnet arrays by powder agglomeration in a polymer matrix. The NdFeB@polydimethylsiloxane (PDMS) inner microstructure and the generated magnetic forces were studied, when prepared under two different magnetic field configurations. The initial process uses the classical crosslinking of PDMS mixed with NdFeB powder under a low magnetic field gradient provided by a permanent magnet (LG set-up for low gradient). In contrast, the optimized process uses an intermediate layer, composed of iron microstructures in a PDMS matrix that amplifies and focuses the magnetic field gradient given by the permanent magnet (HG set-up for high gradient). Both processes result in a heterogeneous material that can be described as an array of permanent micro-magnets diluted in a non-magnetic host matrix. The NdFeB@PDMS microstructure was characterized by X-ray tomography and optical microscopy. The magnetic properties were also measured by magnetometry and colloidal probe AFM. Results showed that the HG set-up leads to an array of micro-magnets localized at the surface, with higher compactness and density, resulting in stronger magnetic performances compared to the LG set-up. This technology only implies easy-to-handle and cheap fabrication processes, paving the way for the development of low-cost lab-on-chip devices integrating magnetophoretic trapping functionality.

cited By 0; International audience; Here we report a novel technology to obtain arrays of highly efficient magnetic micro-traps that relies on simple fabrication process. Developed micro-traps consist in chains of iron particles diluted in polydimethylsiloxane (PDMS). We analyzed the microstructure of the composite membrane by X-ray tomography. It revealed the predominance of aligned chain-like agglomerates. Largest traps, with diameter ranging from 4 to 11 µm, are found to be the most efficient. The trap arrays were characterized by a density of 1300 magnetic micro-traps/mm2, an average nearest neighbor distance of 21 µm. Implemented in a microfluidic channel operating at a relatively high flow rate of 0.97 µL/s—a flow velocity of 8.3 mm/s—we measured a trapping efficiency of more than 99.7%, with a throughput of up to 7100 trapped beads/min. These performances are competitive with other approaches like hydrodynamic trapping. The strengths of this technology are its simple fabrication and easy handling.