228 results on '"Saile, Volker"'
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2. LIGA
3. Nanofabrication by Self-Assembly
4. Doping and Surface Modification
5. Device Fabrication—An Example
6. Deposition Technologies
7. Etching Technologies
8. Introduction—MEMS, a Historical Perspective
9. Vacuum Technology
10. Enabling Technologies II—Contamination Control
11. Mikrostrukturtechnik und Biomaterialien
12. Gold Helix Photonic Metamaterial as Broadband Circular Polarizer
13. Pump-free transport of magnetic particles in microfluidic channels
14. Micro and Nano Fabrication
15. Electron beam lithography of V-shaped silver nanoantennas
16. Fabrication of cell container arrays with overlaid surface topographies
17. First automated production line for X-ray-LIGA (FELIG) is brought on line
18. Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
19. Why you will use the deep X-ray LIG(A) technology to produce MEMS?
20. Structure quality in deep X-ray lithography applying commercial polyimide-based masks
21. Deep X-Ray Lithography
22. An ultrasonic welding based process for building up a new class of inert fluidic microsensors and -actuators from polymers
23. Advanced Conductivity Detection for Microfluidics
24. LIGA Technology for R&D and Industrial Applications
25. Photoemission study of pristine and photodegraded poly(methyl methacrylate)
26. Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review
27. Microfluidic lab-on-a-chip systems based on polymers—fabrication and application
28. Experimental and full multiple scattering approaches to X-ray absorption near-edge structure spectra of chloronaphthalene in CH 3I solvent
29. Calculated photoelectron angular distributions of ω-( n-pyrrolyl)alkanethiol self-assembled monolayers for distinguishing between different arrangements of the pyrrole groups
30. Angle-resolved photoemission measurements of ω-( n-pyrrolyl)alkanethiol self-assembled monolayers using in-situ sample preparation apparatus
31. Extreme ultraviolet (EUV) sources for lithography based on synchrotron radiation
32. Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007
33. A Novel Optical Beam Concept for Producing Coherent Synchrotron Radiation with Large Energy Spread Beams
34. VUV Monochromators at Synchrotron Radiation Sources
35. Launching into a golden age: gears (mm parts) made by the deep X-ray LIG(A) process
36. Commercialisation of LIGA: a 25-year retrospective
37. Photoemission from doped solid rare gases.
38. Large-aperture two-dimensional x-ray refractive mosaic lenses
39. On the ANKA decision: a response to Braun'sJust for us?
40. BackMatter.
41. FrontMatter.
42. Novel optical materials and devices by direct laser writing
43. Gold helix photonic metamaterial as broadband circular polarizer
44. Fabrication of cell container arrays with overlaid surface topographies
45. Closer to Nature–Bio‐inspired Patterns by Transforming Latent Lithographic Images
46. Novel Optical Materials and Devices by Direct Laser Writing
47. First automated production line for X-ray-LIGA (FELIG) is brought on line
48. A novel fabrication method to integrate super hydrophobic nanostructures into microfluidic systems
49. Transmission hard X-ray microscope with increased view field using planar refractive objectives and condensers made of SU-8 polymer
50. Comparison of measurement methods for microsystem components: application to microstructures made by the deep x-ray lithography process (x-ray LIGA)
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