Author: "Ruan, G.M." - Searchworks@Jio Institute Digital Library Search Results

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1. Comparative and integrative study of Langmuir probe and optical emission spectroscopy in a variable magnetic field electron cyclotron resonance chemical vapor deposition process used for depositing hydrogenated amorphous silicon thin films

Author: Hu, L.C., Ruan, G.M., Wei, T.C., Wang, C.J., Lin, Y.W., Lee, C.C., Kawai, Y., and Li, Tomi T.
Published: 2014
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