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Electron backscatter diffraction (EBSD) has developed over the last few decades into a valuable crystallographic characterisation method for a wide range of sample types. Despite these advances, issues such as the complexity of sample preparation, relatively slow acquisition, and damage in beam-sensitive samples, still limit the quantity and quality of interpretable data that can be obtained. To mitigate these issues, here we propose a method based on the subsampling of probe positions and subsequent reconstruction of an incomplete dataset. The missing probe locations (or pixels in the image) are recovered via an inpainting process using a dictionary-learning based method called beta-process factor analysis (BPFA). To investigate the robustness of both our inpainting method and Hough-based indexing, we simulate subsampled and noisy EBSD datasets from a real fully sampled Ni-superalloy dataset for different subsampling ratios of probe positions using both Gaussian and Poisson noise models. We find that zero solution pixel detection (inpainting un-indexed pixels) enables higher quality reconstructions to be obtained. Numerical tests confirm high quality reconstruction of band contrast and inverse pole figure maps from only 10% of the probe positions, with the potential to reduce this to 5% if only inverse pole figure maps are needed. These results show the potential application of this method in EBSD, allowing for faster analysis and extending the use of this technique to beam sensitive materials.

Despite the widespread use of Scanning Transmission Electron Microscopy (STEM) for observing the structure of materials at the atomic scale, a detailed understanding of some relevant electron beam damage mechanisms is limited. Recent reports suggest that certain types of damage can be modeled as a diffusion process and that the accumulation effects of this process must be kept low in order to reduce damage. We therefore develop an explicit mathematical formulation of spatiotemporal diffusion processes in STEM that take into account both instrument and sample parameters. Furthermore, our framework can aid the design of Diffusion Controlled Sampling (DCS) strategies using optimally selected probe positions in STEM, that constrain the cumulative diffusion distribution. Numerical simulations highlight the variability of the cumulative diffusion distribution for different experimental STEM configurations. These analytical and numerical frameworks can subsequently be used for careful design of 2- and 4-dimensional STEM experiments where beam damage is minimised., Comment: Main document: 29 pages, 12 figures; Supplementary document: 18 pages, 5 figures

Here we show that compressive sensing allow 4-dimensional (4-D) STEM data to be obtained and accurately reconstructed with both high-speed and low fluence. The methodology needed to achieve these results compared to conventional 4-D approaches requires only that a random subset of probe locations is acquired from the typical regular scanning grid, which immediately generates both higher speed and the lower fluence experimentally. We also consider downsampling of the detector, showing that oversampling is inherent within convergent beam electron diffraction (CBED) patterns, and that detector downsampling does not reduce precision but allows faster experimental data acquisition. Analysis of an experimental atomic resolution yttrium silicide data-set shows that it is possible to recover over 25dB peak signal-to-noise in the recovered phase using 0.3% of the total data.

Traditional image acquisition for cryo focused ion-beam scanning electron microscopy tomography often sees thousands of images being captured over a period of many hours, with immense data sets being produced. When imaging beam sensitive materials, these images are often compromised by additional constraints related to beam damage and the devitrification of the material during imaging, which renders data acquisition both costly and unreliable. Subsampling and inpainting are proposed as solutions for both of these aspects, allowing fast and low-dose imaging to take place in the FIB-SEM without an appreciable low in image quality. In this work, experimental data is presented which validates subsampling and inpainting as a useful tool for convenient and reliable data acquisition in a FIB-SEM, with new methods of handling 3-dimensional data being employed in context of dictionary learning and inpainting algorithms using a newly developed microscope control software and data recovery algorithm., Comment: In submission to "Microscopy and Microanalysis" journal. Authorship reviewed from previous submission

Despite advancements in electron backscatter diffraction (EBSD) detector speeds, the acquisition rates of 4-Dimensional (4D) EBSD data, i.e., a collection of 2-dimensional (2D) diffraction maps for every position of a convergent electron probe on the sample, is limited by the capacity of the detector. Such 4D data enables computation of, e.g., band contrast and Inverse Pole Figure (IPF) maps, used for material characterisation. In this work we propose a fast acquisition method of EBSD data through subsampling 2-D probe positions and inpainting. We investigate reconstruction of both band contrast and IPF maps using an unsupervised Bayesian dictionary learning approach, i.e., Beta process factor analysis. Numerical simulations achieve high quality reconstructed images from 10% subsampled data., Comment: Presented in ISCS23

Subsampling and fast scanning in the scanning transmission electron microscope is problematic due to scan coil hysteresis - the mismatch between the actual and assumed location of the electron probe beam as a function of the history of the scan. Hysteresis limits the resolution of the microscope and can induce artefacts in our images, particularly during flyback. In this work, we aim to provide insights on the effects of hysteresis during image formation. To accomplish this, a simulation has been developed to model a scanning system as a damped double-harmonic oscillator, with the simulation being capable of managing many microscope dependant parameters to study the effect on the resultant scan trajectories. The model developed shows that the trajectory of the electron beam probe is not obvious and the relationship between scanning pattern and probe trajectory is complex., Comment: Presented in ISCS23

High quality scanning transmission electron microscopy (STEM) data acquisition and analysis has become increasingly important due to the commercial demand for investigating the properties of complex materials such as battery cathodes; however, multidimensional techniques (such as 4-D STEM) which can improve resolution and sample information are ultimately limited by the beam-damage properties of the materials or the signal-to-noise ratio of the result. subsampling offers a solution to this problem by retaining high signal, but distributing the dose across the sample such that the damage can be reduced. It is for these reasons that we propose a method of subsampling for 4-D STEM, which can take advantage of the redundancy within said data to recover functionally identical results to the ground truth. We apply these ideas to a simulated 4-D STEM data set of a LiMnO2 sample and we obtained high quality reconstruction of phase images using 12.5% subsampling., Comment: 3 pages, 2 figures

Cryo Focused Ion-Beam Scanning Electron Microscopy (cryo FIB-SEM) enables three-dimensional and nanoscale imaging of biological specimens via a slice and view mechanism. The FIB-SEM experiments are, however, limited by a slow (typically, several hours) acquisition process and the high electron doses imposed on the beam sensitive specimen can cause damage. In this work, we present a compressive sensing variant of cryo FIB-SEM capable of reducing the operational electron dose and increasing speed. We propose two Targeted Sampling (TS) strategies that leverage the reconstructed image of the previous sample layer as a prior for designing the next subsampling mask. Our image recovery is based on a blind Bayesian dictionary learning approach, i.e., Beta Process Factor Analysis (BPFA). This method is experimentally viable due to our ultra-fast GPU-based implementation of BPFA. Simulations on artificial compressive FIB-SEM measurements validate the success of proposed methods: the operational electron dose can be reduced by up to 20 times. These methods have large implications for the cryo FIB-SEM community, in which the imaging of beam sensitive biological materials without beam damage is crucial., Comment: Submitted to ICASSP 2023

Recently it has been shown that precise dose control and an increase in the overall acquisition speed of atomic resolution scanning transmission electron microscope (STEM) images can be achieved by acquiring only a small fraction of the pixels in the image experimentally and then reconstructing the full image using an inpainting algorithm. In this paper, we apply the same inpainting approach (a form of compressed sensing) to simulated, sub-sampled atomic resolution STEM images. We find that it is possible to significantly sub-sample the area that is simulated, the number of g-vectors contributing the image, and the number of frozen phonon configurations contributing to the final image while still producing an acceptable fit to a fully sampled simulation. Here we discuss the parameters that we use and how the resulting simulations can be quantifiably compared to the full simulations. As with any Compressed Sensing methodology, care must be taken to ensure that isolated events are not excluded from the process, but the observed increase in simulation speed provides significant opportunities for real time simulations, image classification and analytics to be performed as a supplement to experiments on a microscope to be developed in the future., Comment: 20 pages (includes 3 supplementary pages), 15 figures (includes 5 supplementary figures), submitted to Ultramicroscopy