1. Behavior of volatile dopants (P, Sb) in Czochralski silicon growth
- Author
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M. Porrini, Vladimir V. Voronkov, and Roberto Scala
- Subjects
010302 applied physics ,Dopant ,Silicon ,Chemistry ,Doping ,Evaporation ,Analytical chemistry ,chemistry.chemical_element ,Nanotechnology ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,law.invention ,Inorganic Chemistry ,Antimony ,Electrical resistivity and conductivity ,Impurity ,law ,0103 physical sciences ,Materials Chemistry ,0210 nano-technology ,Czochralski process - Abstract
The evaporation from the silicon melt, during Czochralski process, is an important effect for Phosphorus and Antimony dopants. The evaporation rate γ was deduced from the measured axial profile of the resistivity converted into the concentration. For the heavily doped crystals, the value of γ is very similar for both P and Sb: in the order of 5.5×10 −5 cm/s (which is significantly lower than the previously reported evaporation rates). It was concluded that the rate-limiting step for the evaporation process is neither the evaporation reaction itself nor the impurity transport through the flowing gas, but rather the transport through the melt that strongly depends on the melt convection. For low Phosphorus concentration, the transport through the gas is severely slowed-down – due to a change in the dominant gaseous species, from P 2 to P 1 – and becomes a limiting step. The evaporation rate is decreased and, in fact, becomes negligible.
- Published
- 2017
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