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This dissertation explores strategies to create micro-scale tools with integrated electronic and mechanical functionalities. Recently developed approaches to control the shape of flexible micro-structures are employed to fabricate micro-electronic instruments that embed components for sensing and actuation, aiming to expand the toolkit of minimally invasive surgery. This thesis proposes two distinct types of devices that might expand the boundaries of modern surgical interventions and enable new bio-medical applications. First, an electronically integrated micro-catheter is developed. Electronic components for sensing and actuation are embedded into the catheter wall through an alternative fabrication paradigm that takes advantage of a self-rolling polymeric thin-film system. With a diameter of only 0.1 mm, the catheter is capable of delivering fluids in a highly targeted fashion, comprises actuated opposing digits for the efficient manipulation of microscopic objects, and a magnetic sensor for navigation. Employing a specially conceived approach for position tracking, navigation with a high resolution below 0.1 mm is achieved. The fundamental functionalities and mechanical properties of this instrument are evaluated in artificial model environments and ex vivo tissues. The second development explores reshapeable micro-electronic devices. These systems integrate conductive polymer actuators and strain or magnetic sensors to adjust their shape through feedback-driven closed loop control and mechanically interact with their environment. Due to their inherent flexibility and integrated sensory capabilities, these devices are well suited to interface with and manipulate sensitive biological tissues, as demonstrated with an ex vivo nerve bundle, and may facilitate new interventions in neural surgery.:List of Abbreviations 1 Introduction 1.1 Motivation 1.2 Objectives and structure of this dissertation 2 Background 2.1 Tools for minimally invasive surgery 2.1.1 Catheters 2.1.2 Tools for robotic micro-surgery 2.1.3 Flexible electronics for smart surgical tools 2.2 Platforms for shapeable electronics 2.2.1 Shapeable polymer composites 2.2.2 Shapeable electronics 2.2.3 Soft actuators and manipulators 2.3 Sensors for position and shape feedback 2.3.1 Magnetic sensors for position and orientation measurements 2.3.2 Strain gauge sensors 3 Materials and Methods 3.1 Materials for shapeable electronics 3.1.1 Metal-organic sacrificial layer 3.1.2 Polyimide as reinforcing material 3.1.3 Swelling hydrogel for self assembly 3.1.4 Polypyrrole for flexible micro actuators 3.2 Device fabrication techniques 3.2.1 Photolithography 3.2.2 Electron beam deposition 3.2.3 Sputter deposition 3.2.4 Atomic layer deposition 3.2.5 Electro-polymerization of polypyrrole 3.3 Device characterization techniques 3.3.1 Kerr magnetometry 3.3.2 Electro-magnetic characterization of sensors 3.3.3 Electro-chemical analysis of polypyrrole 3.3.4 Preparation of model environments and materials 3.4 Sensor signal evaluation and processing 3.4.1 Signal processing 3.4.2 Cross correlation for phase analysis 3.4.3 PID feedback control 4 Electronically Integrated Self Assembled Micro Catheters 4.1 Design and Fabrication 4.1.1 Fabrication and self assembly 4.1.2 Features and design considerations 4.1.3 Electronic and fluidic connections 4.2 Integrated features and functionalities 4.2.1 Fluidic transport 4.2.2 Bending stability 4.2.3 Actuated micro manipulator 4.3 Magnetic position tracking 4.3.1 Integrated magnetic sensor 4.3.2 Position control with sensor feedback 4.3.3 Introduction of magnetic phase encoded tracking 4.3.4 Experimental realization 4.3.5 Simultaneous magnetic and ultrasound tracking 4.3.6 Discussion, limitations, and perspectives 5 Reshapeable Micro Electronic Devices 5.1 Design and fabrication 5.1.1 Estimation of optimal fabrication parameters 5.1.2 Device Fabrication 5.1.3 Control electronics and software 5.2 Performance of Actuators 5.2.1 Blocking force, speed, and durability 5.2.2 Curvature 5.3 Orientation control with magnetic sensors 5.3.1 Magnetic sensors on actuated device 5.3.2 Reference magnetic field 5.3.3 Feedback control 5.4 Shape control with integrated strain sensors 5.4.1 Strain gauge curvature sensors 5.4.2 Feedback control 5.4.3 Obstacle detection 5.5 Heterogenous integration with active electronics 5.5.1 Fabrication and properties of active matrices 5.5.2 Fabrication and operation of PPy actuators 5.5.3 Site selective actuation 6 Discussion and Outlook 6.1 Integrated self assembled catheters 6.1.1 Outlook 6.2 Reshapeable micro electronic devices 6.2.1 Outlook 7 Conclusion Appendix A1 Processing parameters for polymer stack layers A2 Derivation of magnetic phase profile in 3D Bibliography List of Figures and Tables Acknowledgements Theses List of Publications

Many modern electronic applications rely on functional units arranged in an active-matrix integrated on a single chip. The active-matrix allows numerous identical device pixels to be addressed within a single system. However, next-generation electronics requires heterogeneous integration of dissimilar devices, where sensors, actuators, and display pixels sense and interact with the local environment. Heterogeneous material integration allows the reduction of size, increase of functionality, and enhancement of performance; however, it is challenging since front-end fabrication technologies in microelectronics put extremely high demands on materials, fabrication protocols, and processing environments. To overcome the obstacle in heterogeneous material integration, digital electrochemistry is explored here, which site-selectively carries out electrochemical processes to deposit and address electroactive materials within the pixel array. More specifically, an amorphous indium-gallium-zinc oxide (a-IGZO) thin-film-transistor (TFT) active-matrix is used to address pixels within the matrix and locally control electrochemical reactions for material growth and actuation. The digital electrochemistry procedure is studied in-depth by using polypyrrole (PPy) as a model material. Active-matrix-driven multicolored electrochromic patterns and actuator arrays are fabricated to demonstrate the capabilities of this approach for material integration. The approach can be extended to a broad range of materials and structures, opening up a new path for advanced heterogeneous microsystem integration.

The next generation of biomedical tools requires reshapeable electronics to closely interface with biological tissues. This will offer unique mechanical properties and the ability to conform to irregular geometries while being robust and lightweight. Such devices can be achieved with soft materials and thin-film structures that are able to reshape on demand. However, reshaping at the submillimeter scale remains a challenging task. Herein, shape-controlled microscale devices are demonstrated that integrate electronic sensors and electroactive polymer actuators. The fast and biocompatible actuators are capable of actively reshaping the device into flat or curved geometries. The curvature and position of the devices are monitored with strain or magnetic sensors. The sensor signals are used in a closed feedback loop to control the actuators. The devices are wafer-scale microfabricated resulting in multiple functional units capable of grasping, holding, and releasing biological tissues, as demonstrated with a neuronal bundle.