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Electrically tunable optical devices present diverse functionalities for manipulating electromagnetic waves by leveraging elements capable of reversibly switching between different optical states. This adaptability in adjusting their responses to electromagnetic waves after fabrication is crucial for developing more efficient and compact optical systems for a broad range of applications including sensing, imaging, telecommunications, and data storage. Chalcogenide-based phase change materials (PCMs) have shown great promise due to their stable, non-volatile phase transition between amorphous and crystalline states. Nonetheless, optimizing the switching parameters of PCM devices and maintaining their stable operation over thousands of cycles with minimal variation can be challenging. In this paper, we report on the critical role of PCM pattern as well as electrical pulse form in achieving reliable and stable switching, extending the operational lifetime of the device beyond 13,000 switching events. To achieve this, we have developed a computer-aided algorithm that monitors optical changes in the device and adjusts the applied voltage in accordance with the phase transformation process, thereby significantly enhancing the lifetime of these reconfigurable devices. Our findings reveal that patterned PCM structures show significantly higher endurance compared to blanket PCM thin films.

Programmable and reconfigurable optics hold significant potential for transforming a broad spectrum of applications, spanning space explorations to biomedical imaging, gas sensing, and optical cloaking. The ability to adjust the optical properties of components like filters, lenses, and beam steering devices could result in dramatic reductions in size, weight, and power consumption in future optoelectronic devices. Among the potential candidates for reconfigurable optics, chalcogenide-based phase change materials (PCMs) offer great promise due to their non-volatile and analogue switching characteristics. Although PCM have found widespread use in electronic data storage, these memory devices are deeply sub-micron-sized. To incorporate phase change materials into free-space optical components, it is essential to scale them up to beyond several hundreds of microns while maintaining reliable switching characteristics. This study demonstrated a non-mechanical, non-volatile transmissive filter based on low-loss PCMs with a 200 $\mu$m$ \times $200 $\mu$m switching area. The device/metafilter can be consistently switched between low- and high-transmission states using electrical pulses with a switching contrast ratio of 5.5 dB. The device was reversibly switched for 1250 cycles before accelerated degradation took place. The work represents an important step toward realizing free-space reconfigurable optics based on PCMs.

Owing to their unique tunable optical properties, chalcogenide phase change materials are increasingly being investigated for optics and photonics applications. However, in situ characterization of their phase transition characteristics is a capability that remains inaccessible to many researchers. In this article, we introduce a multi-functional silicon microheater platform capable of in situ measurement of structural, kinetic, optical, and thermal properties of these materials. The platform can be fabricated leveraging industry-standard silicon foundry manufacturing processes. We fully open-sourced this platform, including complete hardware design and associated software codes., Comment: 13 pages main text, 5 figures +1 (supplementary)

Photonic Random-Access Memories (P-RAM) are an essential component for the on-chip non-von Neumann photonic computing by eliminating optoelectronic conversion losses in data links. Emerging Phase Change Materials (PCMs) have been showed multilevel memory capability, but demonstrations still yield relatively high optical loss and require cumbersome WRITE-ERASE approaches increasing power consumption and system package challenges. Here we demonstrate a multi-state electrically-programmed low-loss non-volatile photonic memory based on a broadband transparent phase change material (Ge2Sb2Se5, GSSe) with ultra-low absorption in the amorphous state. A zero-static-power and electrically-programmed multi-bit P-RAM is demonstrated on a silicon-on-insulator platform, featuring efficient amplitude modulation up to 0.2 dB/{\mu}m and an ultra-low insertion loss of total 0.12 dB for a 4-bit memory showing a 100x improved signal to loss ratio compared to other phase-change-materials based photonic memories. We further optimize the positioning of dual micro-heaters validating performance tradeoffs. Experimentally we demonstrate a half-a million cyclability test showcasing the robust approach of this material and device. Low-loss photonic retention-of-state adds a key feature for photonic functional and programmable circuits impacting many applications including neural networks, LiDAR, and sensors for example.

The development of compact and fieldable mid-infrared (mid-IR) spectroscopy devices represents a critical challenge for distributed sensing with applications from gas leak detection to environmental monitoring. Recent work has focused on mid-IR photonic integrated circuit (PIC) sensing platforms and waveguide-integrated mid-IR light sources and detectors based on semiconductors such as PbTe, black phosphorus and tellurene. However, material bandgaps and reliance on SiO$_2$ substrates limit operation to wavelengths $\lambda\lesssim4\,\mu\textrm{m}$. Here we overcome these challenges with a chalcogenide glass-on-CaF$_2$ PIC architecture incorporating split-gate photothermoelectric graphene photodetectors. Our design extends operation to $\lambda=5.2\,\mu\textrm{m}$ with a Johnson noise-limited noise-equivalent power of $1.1\,\mathrm{nW}/\mathrm{Hz}^{1/2}$, no fall-off in photoresponse up to $f = 1\,\mathrm{MHz}$, and a predicted 3-dB bandwidth of $f_{3\textrm{dB}}>1\,\mathrm{GHz}$. This mid-IR PIC platform readily extends to longer wavelengths and opens the door to applications from distributed gas sensing and portable dual comb spectroscopy to weather-resilient free space optical communications., Comment: 15 pages, 11 figures

Energy-efficient programmable photonic integrated circuits (PICs) are the cornerstone of on-chip classical and quantum optical technologies. Optical phase shifters constitute the fundamental building blocks which enable these programmable PICs. Thus far, carrier modulation and thermo-optical effect are the chosen phenomena for ultrafast and low-loss phase shifters, respectively; however, the state and information they carry are lost once the power is turned off-they are volatile. The volatility not only compromises energy efficiency due to their demand for constant power supply, but also precludes them from emerging applications such as in-memory computing. To circumvent this limitation, we introduce a novel phase shifting mechanism that exploits the nonvolatile refractive index modulation upon structural phase transition of Sb$_{2}$Se$_{3}$, a bi-stable transparent phase change material. A zero-static power and electrically-driven phase shifter was realized on a foundry-processed silicon-on-insulator platform, featuring record phase modulation up to 0.09 $\pi$/$\mu$m and a low insertion loss of 0.3 dB/$\pi$, which can be further improved upon streamlined design. We also pioneered a one-step partial amorphization scheme to enhance the speed and energy efficiency of PCM devices. A diverse cohort of programmable photonic devices were demonstrated based on the ultra-compact PCM phase shifter., Comment: 15 pages with 6 figures and 1 table

Metasurfaces have provided a novel and promising platform for the realization of compact and large-scale optical devices. The conventional metasurface design approach assumes periodic boundary conditions for each element, which is inaccurate in most cases since the near-field coupling effects between elements will change when surrounded by non-identical structures. In this paper, we propose a deep learning approach to predict the actual electromagnetic (EM) responses of each target meta-atom placed in a large array with near-field coupling effects taken into account. The predicting neural network takes the physical specifications of the target meta-atom and its neighbors as input, and calculates its phase and amplitude in milliseconds. This approach can be applied to explain metasurfaces' performance deterioration caused by mutual coupling and further used to optimize their efficiencies once combined with optimization algorithms. To demonstrate the efficacy of this methodology, we obtain large improvements in efficiency for a beam deflector and a metalens over the conventional design approach. Moreover, we show the correlations between a metasurface's performance and its design errors caused by mutual coupling are not bound to certain specifications (materials, shapes, etc.). As such, we envision that this approach can be readily applied to explore the mutual coupling effects and improve the performance of various metasurface designs., Comment: 16 pages, 10 figures

The mid-wave infrared (MWIR) spectral region (3-5 {\mu}m) is important to a vast variety of applications in imaging, sensing, spectroscopy, surgery, and optical communications. Efficient third-harmonic generation (THG), converting light from the MWIR range into the near-infrared, a region with mature optical detection and manipulation technologies, offers the opportunity to mitigate a commonly recognized limitation of current MWIR systems. In this work, we present the possibility of boosting THG in the MWIR through a metasurface design. Specifically, we demonstrate a 30-fold enhancement in a highly nonlinear phase change material Ge2Sb2Se4Te1 (GSST), by patterning arrays of subwavelength cylinders supporting a magnetic dipolar resonance. The unprecedented broadband transparency, large refractive index, and remarkably high nonlinear response, together with unique phase-change properties, make GSST-based metasurfaces an appealing solution for reconfigurable and ultra-compact nonlinear devices operating in the MWIR., Comment: 15 pages, 3 figures

Active metasurfaces promise reconfigurable optics with drastically improved compactness, ruggedness, manufacturability, and functionality compared to their traditional bulk counterparts. Optical phase change materials (O-PCMs) offer an appealing material solution for active metasurface devices with their large index contrast and nonvolatile switching characteristics. Here we report what we believe to be the first electrically reconfigurable nonvolatile metasurfaces based on O-PCMs. The O-PCM alloy used in the devices, Ge2Sb2Se4Te1 (GSST), uniquely combines giant non-volatile index modulation capability, broadband low optical loss, and a large reversible switching volume, enabling significantly enhanced light-matter interactions within the active O-PCM medium. Capitalizing on these favorable attributes, we demonstrated continuously tunable active metasurfaces with record half-octave spectral tuning range and large optical contrast of over 400%. We further prototyped a polarization-insensitive phase-gradient metasurface to realize dynamic optical beam steering., Comment: 12 pages, 5 figures

Reconfigurable photonic systems featuring minimal power consumption are crucial for integrated optical devices in real-world technology. Current active devices available in foundries, however, use volatile methods to modulate light, requiring a constant supply of power and significant form factors. Essential aspects to overcoming these issues are the development of nonvolatile optical reconfiguration techniques which are compatible with on-chip integration with different photonic platforms and do not disrupt their optical performances. In this paper, a solution is demonstrated using an optoelectronic framework for nonvolatile tunable photonics that employs undoped-graphene microheaters to thermally and reversibly switch the optical phase-change material Ge$_2$Sb$_2$Se$_4$Te$_1$ (GSST). An in-situ Raman spectroscopy method is utilized to demonstrate, in real-time, reversible switching between four different levels of crystallinity. Moreover, a 3D computational model is developed to precisely interpret the switching characteristics, and to quantify the impact of current saturation on power dissipation, thermal diffusion, and switching speed. This model is used to inform the design of nonvolatile active photonic devices; namely, broadband Si$_3$N$_4$ integrated photonic circuits with small form-factor modulators and reconfigurable metasurfaces displaying 2$\pi$ phase coverage through neural-network-designed GSST meta-atoms. This framework will enable scalable, low-loss nonvolatile applications across a diverse range of photonics platforms., Comment: 22 pages, 5 Figures, 2 tables

Metasurfaces have shown promising potentials in shaping optical wavefronts while remaining compact compared to bulky geometric optics devices. Design of meta-atoms, the fundamental building blocks of metasurfaces, relies on trial-and-error method to achieve target electromagnetic responses. This process includes the characterization of an enormous amount of different meta-atom designs with different physical and geometric parameters, which normally demands huge computational resources. In this paper, a deep learning-based metasurface/meta-atom modeling approach is introduced to significantly reduce the characterization time while maintaining accuracy. Based on a convolutional neural network (CNN) structure, the proposed deep learning network is able to model meta-atoms with free-form 2D patterns and different lattice sizes, material refractive indexes and thicknesses. Moreover, the presented approach features the capability to predict meta-atoms' wide spectrum responses in the timescale of milliseconds, which makes it attractive for applications such as fast meta-atom/metasurface on-demand designs and optimizations.

Active metasurfaces, whose optical properties can be modulated post-fabrication, have emerged as an intensively explored field in recent years. The efforts to date, however, still face major performance limitations in tuning range, optical quality, and efficiency especially for non mechanical actuation mechanisms. In this paper, we introduce an active metasurface platform combining phase tuning covering the full 2$\pi$ range and diffraction-limited performance using an all-dielectric, low-loss architecture based on optical phase change materials (O-PCMs). We present a generic design principle enabling switching of metasurfaces between two arbitrary phase profiles and propose a new figure-of-merit (FOM) tailored for active meta-optics. We implement the approach to realize a high-performance varifocal metalens operating at 5.2 $\mu$m wavelength. The metalens is constructed using Ge2Sb2Se4Te1 (GSST), an O-PCM with a large refractive index contrast ($\Delta$ n > 1) and unique broadband low-loss characteristics in both amorphous and crystalline states. The reconfigurable metalens features focusing efficiencies above 20% at both states for linearly polarized light and a record large switching contrast ratio of 29.5 dB. We further validated aberration-free imaging using the metalens at both optical states, which represents the first experimental demonstration of a non-mechanical active metalens with diffraction-limited performance.

Metasurfaces have become a promising means for manipulating optical wavefronts in flat and high-performance optical devices. Conventional metasurface device design relies on trial-and-error methods to obtain target electromagnetic (EM) response, an approach that demands significant efforts to investigate the enormous number of possible meta-atom structures. In this paper, a deep neural network approach is introduced that significantly improves on both speed and accuracy compared to techniques currently used to assemble metasurface-based devices. Our neural network approach overcomes three key challenges that have limited previous neural-network-based design schemes: input/output vector dimensional mismatch, accurate EM-wave phase prediction, as well as adaptation to 3-D dielectric structures, and can be generically applied to a wide variety of metasurface device designs across the entire electromagnetic spectrum. Using this new methodology, examples of neural networks capable of producing on-demand designs for meta-atoms, metasurface filters, and phase-change reconfigurable metasurfaces are demonstrated., Comment: 18 pages, 8 figures

Optical phase change materials (O-PCMs), a unique group of materials featuring drastic optical property contrast upon solid-state phase transition, have found widespread adoption in photonic switches and routers, reconfigurable meta-optics, reflective display, and optical neuromorphic computers. Current phase change materials, such as Ge-Sb-Te (GST), exhibit large contrast of both refractive index (delta n) and optical loss (delta k), simultaneously. The coupling of both optical properties fundamentally limits the function and performance of many potential applications. In this article, we introduce a new class of O-PCMs, Ge-Sb-Se-Te (GSST) which breaks this traditional coupling, as demonstrated with an optical figure of merit improvement of more than two orders of magnitude. The first-principle computationally optimized alloy, Ge2Sb2Se4Te1, combines broadband low optical loss (1-18.5 micron), large optical contrast (delta n = 2.0), and significantly improved glass forming ability, enabling an entirely new field of infrared and thermal photonic devices. We further leverage the material to demonstrate nonvolatile integrated optical switches with record low loss and large contrast ratio, as well as an electrically addressed, microsecond switched pixel level spatial light modulator, thereby validating its promise as a platform material for scalable nonvolatile photonics., Comment: 16 pages, 6 figures

Two-dimensional (2-D) materials are of tremendous interest to integrated photonics given their singular optical characteristics spanning light emission, modulation, saturable absorption, and nonlinear optics. To harness their optical properties, these atomically thin materials are usually attached onto prefabricated devices via a transfer process. In this paper, we present a new route for 2-D material integration with planar photonics. Central to this approach is the use of chalcogenide glass, a multifunctional material which can be directly deposited and patterned on a wide variety of 2-D materials and can simultaneously function as the light guiding medium, a gate dielectric, and a passivation layer for 2-D materials. Besides claiming improved fabrication yield and throughput compared to the traditional transfer process, our technique also enables unconventional multilayer device geometries optimally designed for enhancing light-matter interactions in the 2-D layers. Capitalizing on this facile integration method, we demonstrate a series of high-performance glass-on-graphene devices including ultra-broadband on-chip polarizers, energy-efficient thermo-optic switches, as well as graphene-based mid-infrared (mid-IR) waveguide-integrated photodetectors and modulators.

In this letter, we fabricated and characterized chalcogenide glass resonators monolithically integrated on mid-infrared transparent CaF2 substrates. The devices feature an intrinsic Q-factor of 4E5 at 5.2 micron wavelength, which represents the highest Q-factor reported in planar mid-infrared resonators. It is found that moisture can significantly impact the device performance when the device was exposed to an ambient environment, although the high-Q characteristics can be restored after undergoing an annealing treatment. Using these devices, we further demonstrated on-chip cavity-enhanced spectroscopy to quantify mid-IR absorption of ethanol solutions around 5.2 micron wavelength.