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11. Modification of Porous Ultralow-k Film by Vacuum Ultraviolet Emission

12. Benzene bridged hybrid organosilicate films with improved stiffness and small pore size

23. Use of a Thermally Degradable Chemical Vapor Deposited Polymer Film for Low Damage Plasma Processing of Highly Porous Dielectrics

29. Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas.

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