1. High electromechanical coupling factor Lamb wave resonator.
- Author
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Cao, Tengbo, Ding, Rui, Gao, Feng, Xuan, Weipeng, Wan, Qing, Luo, Jack, Luo, Yuxuan, Khelif, Abdelkrim, Bermak, Amine, and Dong, Shurong
- Subjects
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EULER angles , *LITHIUM niobate , *SOUND waves , *FINITE element method , *RESONATORS - Abstract
Lamb wave resonators (LWRs) based on lithium niobate on insulator (LNOI) substrates operating in an A1 mode at frequencies above 5 GHz typically exhibit high electromechanical coupling coefficients (K2) ranging from 20% to 30%. This makes them promising candidates to replace current bulk acoustic wave technology in next-generation broadband RF filters. However, the K2 of conventional LWRs still struggles to meet application requirements for bandwidths exceeding 1 GHz, such as WiFi-6E. This paper presents an analytical optimization approach for rapid and comprehensive scanning of the full 3D Euler space to find the maximum effective K2 of LWR devices. Such a full scan is difficult to achieve by the conventional time-consuming finite element method (FEM). The K2 results for a selected subset of Euler angles obtained through this analytical approach align with FEM simulation results. The optimized results show that LWRs on LNOI can achieve the highest K2 of 59.92% at Euler angles of (0, −151°, −60°), providing bandwidths exceeding 1 GHz at 5 GHz. To validate this optimization approach, LWRs with various orientations were fabricated on both 41° YX-cut and Z-cut LNOI wafers, with measured K2 values at different Euler angles agreeing well with both analytical and FEM results. The proposed K2 optimization method serves as a valuable guideline for selecting substrate cuts and device orientations in the design of ultra-broadband filters for next-generation telecommunications. [ABSTRACT FROM AUTHOR]
- Published
- 2024
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