1. X-ray multilayer monochromator with enhanced performance
- Author
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Andre, Jean-Michel, Benbalagh, Rabah, Barchewitz, Robert, Ravet, Marie-Francoise, Raynal, Alain, Delmotte, Frank, Bridou, Francoise, Julie, Gwenaelle, Bosseboeuf, Alain, Laval, Rene, Soullie, Gerard, Remond, Christian, and Fialin, Michel
- Subjects
Optics -- Research ,Thin films -- Usage ,Lithography -- Research ,Semiconductors -- Etching ,Astronomy ,Physics - Abstract
An x-ray multilayer monochromator with improved resolution and a low specular background is presented. The monochromator consists of a lamellar multilayer amplitude grating with appropriate parameters used at the zeroth diffraction order. The device is fabricated by means of combining deposition of thin films on a nanometer scale, LTV lithography, and reactive ion etching. The performance of this new monochromator at photon energies near 1500 eV is shown. OCIS codes: 340.0340, 300.6560.
- Published
- 2002