1. Growth of thick-film AlN substrates by halide vapor transport epitaxy
- Author
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Ravi Kanjolia, J.S. Bailey, Nam X. Nguyen, Michael J. Suscavage, Jeffrey W. Anthis, Lesley M. Smith, Chris Santeufemio, David W. Weyburne, Mitchell Fait, Raj Odedra, Sheng Qi Wang, C. Yapp, Vladimir Tassev, and David Bliss
- Subjects
Inorganic Chemistry ,Crystal ,Materials science ,Scanning electron microscope ,Materials Chemistry ,Analytical chemistry ,Sapphire ,Substrate (electronics) ,Surface finish ,Nitride ,Condensed Matter Physics ,Epitaxy ,Layer (electronics) - Abstract
The development and scaling-up of a process for the growth of large diameter aluminum nitride thick films on 2-in sapphire is described. Optimal growth rates between 10 and 15 μ m/h have been reached by adjustment of the reactor pressure, substrate temperature and gas flows. The layer thickness is determined by in situ laser reflection from the layer surface and ex situ by the curve of reflectivity versus wavelength after growth. The crystal quality is demonstrated by in situ laser reflection, scanning electron microscopy (cross sectional images and thickness) and atomic force microscopy (average roughness before and after polishing in the ranges of 20–50 and 3–8 nm, respectively).
- Published
- 2005
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