1. In situ MEMS gradiometer with nanometer-resolution optical detection system
- Author
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Jaume Esteve, H. Guerrero, V. de Manuel, Irene Lucas, Marina Díaz-Michelena, Marta Duch, R.P. del Real, José Antonio Plaza, Christophe Serre, and Humberto Campanella
- Subjects
Microelectromechanical systems ,Signal processing ,Materials science ,Magnetic transducers ,business.industry ,Resolution (electron density) ,Magnetic devices ,Metals and Alloys ,Condensed Matter Physics ,Gradiometer ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Interferometry ,Gradiometers ,MEMS Sensors ,Etching (microfabrication) ,Electronic engineering ,Optoelectronics ,Sensitivity (control systems) ,Electrical and Electronic Engineering ,Proof mass ,business ,Instrumentation - Abstract
Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers. Peerreview
- Published
- 2010
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