1. Experimental comparison of a Shack-Hartmann sensor and a phase-shifting interferometer for large-optics metrology applications
- Author
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Jeffrey A. Koch, Wayne T. Whistler, Richard A. Sacks, Bruce W. Woods, Michael J. Dailey, R. Zacharias, Lynn G. Seppala, Fred R. Holdener, Scott Winters, Erlan S. Bliss, John S. Toeppen, Andrew Grey, Mark Feldman, J.T. Salmon, Bruno M. Van Wonterghem, Lewis Van Atta, and R. W. Presta
- Subjects
Physics ,Diffraction ,business.industry ,Materials Science (miscellaneous) ,Physics::Medical Physics ,Astrophysics::Instrumentation and Methods for Astrophysics ,Measure (physics) ,Physics::Optics ,Lenslet ,Industrial and Manufacturing Engineering ,Metrology ,law.invention ,Telescope ,Interferometry ,Optics ,law ,Astronomical interferometer ,Business and International Management ,business ,Image resolution - Abstract
We performed a direct side-by-side comparison of a Shack-Hartmann wave-front sensor and a phase-shifting interferometer for the purpose of characterizing large optics. An expansion telescope of our own design allowed us to measure the surface figure of a 400-mm-square mirror with both instruments simultaneously. The Shack-Hartmann sensor produced data that closely matched the interferometer data over spatial scales appropriate for the lenslet spacing, and much of the
- Published
- 2008