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3. Experimental and theoretical investigation of 2D nanoplatelet-based conversion layers for color LED microdisplays

Author

Quesnel, E., Suhm, A., Consonni, M., Reymermier, M., Lorin, G., Laugier, C., Tournaire, M., Le Maitre, P., Lagrange, A., Racine, B., D’Amico, M., Cao, E., Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), CEA/DRT/LITEN, NEXDOT, European Project: 755497,Hilico, and Nexdot

Subjects
[SPI]Engineering Sciences [physics]
Abstract

International audience; In the field of augmented reality, there is a need for very bright color microdisplays to meet the user specifications. Today, one of the most promising technology to manufacture such displays involves a blue micro-LED technology and quantum dots-based color conversion layers. Despite recent progress, the external power conversion efficiencies (EPCE) of these layers remain under ∼25%, below the needs (>40%) to reach a white luminance of 100,000 cd/m$^2$. In this work, we have synthesized CdSe$_x$S$_{1-x}$ nanoplatelet-based conversion layers for red and green conversion, and measured their absorption properties and EPCE performances with respect to layer thickness. On this basis, a model was developed that reliably predicts the layer EPCE while using only few input data, namely the layer absorption coefficients and the photoluminescence quantum yield (PLQY) of color photoresist. It brings a new insight into the conversion process at play at a micro-LED level and provides a simple method for extensive optimization of conversion materials. Finally, this study highlights the outstanding red conversion efficiency of photoresist layers made of core-double shell CdSe$_x$S$_{1-x}$ nanoplatelets with 31% EPCE (45% external PLQY) for 8 µm-thick conversion layer.

Published
2021
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5. Multispectral surface plasmon resonance approach for ultra-thin silver layer characterization: Application to top-emitting OLED cathode.

Author

Taverne, S., Caron, B., Gétin, S., Lartigue, O., Lopez, C., Meunier-Della-Gatta, S., Gorge, V., Reymermier, M., Racine, B., Maindron, T., and Quesnel, E.

Subjects
ORGANIC light emitting diodes, DIELECTRIC thin films, DIELECTRICS, SURFACE plasmon resonance, THIN film deposition
Abstract

While dielectric/metal/dielectric (DMD) multilayer thin films have raised considerable interest as transparent and conductive electrodes in various optoelectronic devices, the knowledge of optical characteristics of thin metallic layers integrated in such structures is still rather approximate. The multispectral surface plasmon resonance characterization approach described in this work precisely aims at providing a rigorous methodology able to accurately determine the optical constants of ultra-thin metallic films. As a practical example, the refractive index and extinction dispersion curves of 8 to 25 nm-thick silver layers have been investigated. As a result, their extreme dependence on the layer thickness is highlighted, in particular in a thickness range close to the critical threshold value (~10nm) where the silver film becomes continuous and its electrical conductance/optical transmittance ratio particularly interesting. To check the validity of the revisited Ag layers constant dispersion curves deduced from this study, they were introduced into a commercial optical model software to simulate the behavior of various optoelectronic building blocks from the simplest ones (DMD electrodes) to much more complex structures [full organic light emitting device (OLED) stacks]. As a result, a much better prediction of the emission spectrum profile as well as the angular emission pattern of top-emitting OLEDs is obtained. On this basis, it is also shown how a redesign of the top encapsulation thin film of OLEDs is necessary to better take benefit from the advanced DMD electrode. These results should particularly interest the micro-OLED display field where bright and directive single color pixel emission is required. [ABSTRACT FROM AUTHOR]

Published
2018
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8. Radio frequency sputter deposition and properties of calcium fluoride thin films

Author

Marechal, N., Quesnel, E., Juliet, P., and Pauleau, Y.

Subjects
Radio -- Research, Sputtering (Physics) -- Research, Calcium -- Research, Physics
Abstract

Radio frequency sputtering of a hot-pressed CaF2 target in pure argon plasma is used in the deposition of calcium fluoride thin films on different substrates. Low power of sputtering causes the formation of cracks and fractures in the target material. Maximum deposition of films is only 2.1 nanometers per minute. Depletion of the films' fluorine content is revealed by Rutherford backscattering spectroscopy. Oxygen content in the film is very low.

Published
1993

13. Influence of the embedding matrix on optical properties of Ge nanocrystals-based nanocomposite.

Author

Parola, S., Quesnel, E., Muffato, V., Bartringer, J., and Slaoui, A.

Subjects
*NANOCRYSTALS, *GERMANIUM, *NANOCOMPOSITE materials, *PHOTOLUMINESCENCE, *SPECTRUM analysis, *PHOTOMETRY
Abstract

Germanium nanocrystals were prepared by a nanocluster source and characterized by photoluminescence and spectroscopic photometry methods. The optical measurements were carried out in order to estimate the effective bandgap of the Ge nanocrystals. Both Mie theory and the quantum confinement theory were applied to interpret the extracted absorption data. We found that the quantum confinement theory enables to explain the nanocrystal size and the host matrix dependence of the nanocrystal bandgap. On the other hand, the photoluminescence measurements have not allowed to confirm the bandgap evaluated from absorption data. This is explained as due to the dominant effect of the recombination at the nanocrystals surface. [ABSTRACT FROM AUTHOR]

Published
2013
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16. Modeling metallic nanoparticle synthesis in a magnetron-based nanocluster source by gas condensation of a sputtered vapor.

Author

Quesnel, E, Pauliac-Vaujour, E, and Muffato, V

Subjects
*NANOPARTICLES, *MAGNETRON sputtering, *COPPER, *GAS condensers, *SPUTTERING (Physics), *PHYSICS experiments
Abstract

Copper nanoparticles (NPs) were synthesized by inert-gas condensation of a sputtered metallic vapor using a dedicated commercial reactor. By controlling the time of residence of NPs in the carrier gas phase via the tuning of the collision path length, Cu NPs were produced. They exhibit various and well controlled diameters (3–10 nm) and a relatively narrow size dispersion. On the basis of these experimental results, a detailed modeling of NP nucleation and growth based on the classical nucleation theory was developed. It takes into account the peculiar geometry and thermal profile of the NP reactor. The simulated curves, calculated by a MATLAB® program developed for that purpose, exhibit a good qualitative agreement with experiment. Moreover, they highlight the role of process parameters and the strong influence of the reactor temperature profile on the NP size distribution. In the future, such calculations could be used for the optimization of the NP source design in order to increase its efficiency and reproducibility. [ABSTRACT FROM AUTHOR]

Published
2010
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18. Silver Nanoparticles in Dye-Sensitized Solar Cells

Author

Berginc, M., Opara Krašovec, U., Quesnel, E., and Topic, M.

Subjects
THIN FILM SOLAR CELLS, Organic-based PV
Abstract

28th European Photovoltaic Solar Energy Conference and Exhibition; 2740-2744, A plasmonic effect of silver nanoparticles in dye-sensitized solar cells (DSSCs) is reported. An isopropanol solution of silver nitrate has been used for dip-coating of TiO2 layers. The Ag nanoparticles (NPs) throughout the active layer have been formed after a heat treatment above 100 °C. Absorption measurements, current-voltage characteristics, external quantum efficiency and the amount of adsorbed dye have been applied to examine the plasmonic effect. Firstly, the 220 °C has been determined as the optimal heat treatment temperature of the TiO2-Ag layers, resulting in the most intensive absorption enhancement and it was used for the preparation of the DSSCs. The I-V characterization of the DSSCs revealed an increase of the short circuit current in the presence of Ag nanoparticles, although the amount of the adsorbed dye decreased. These results confirm performance enhancement related to the plasmonic effect. However neither a thin sol-gel TiO2 layer or a poly(4-vinylpyridine) shells could provide effective protection for a long term stability of the Ag nanoparticles against the corrosion of I3 -/I- based electrolyte.

Published
2013
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19. Science and technology roadmap for graphene, related two-dimensional crystals, and hybrid systems

Author

Ferrari, A.C., Bonaccorso, F., Fal'ko, V., Novoselov, K.S., Roche, S., Boggild, P., Borini, S., Koppens, F.H.L., Palermo, V., Pugno, N., Garrido, J.A., Sordan, R., Bianco, A., Ballerini, L., Prato, M., Lidorikis, E., Kivioja, J., Marinelli, C., Ryhanen, T., Morpurgo, A., Coleman, J.N., Nicolosi, V., Colombo, L., Fert, A., Garcia-Hernandez, M., Bachtold, A., Schneider, G.F., Guinea, F., Dekker, C., Barbone, M., Sun, Z.P., Galiotis, C., Grigorenko, A.N., Konstantatos, G., Kis, A., Katsnelson, M., Vandersypen, L., Loiseau, A., Morandi, V., Neumaier, D., Treossi, E., Pellegrini, V., Polini, M., Tredicucci, A., Williams, G.M., Hong, B.H., Ahn, J.H., Kim, J.M., Zirath, H., Wees, B.J. van, Zant, H. van der, Occhipinti, L., Matteo, A. Di, Kinloch, I.A., Seyller, T., Quesnel, E., Feng, X.L., Teo, K., Rupesinghe, N., Hakonen, P., Neil, S.R.T., Tannock, Q., Lofwandera, T., Kinaret, J., Ferrari, A.C., Bonaccorso, F., Fal'ko, V., Novoselov, K.S., Roche, S., Boggild, P., Borini, S., Koppens, F.H.L., Palermo, V., Pugno, N., Garrido, J.A., Sordan, R., Bianco, A., Ballerini, L., Prato, M., Lidorikis, E., Kivioja, J., Marinelli, C., Ryhanen, T., Morpurgo, A., Coleman, J.N., Nicolosi, V., Colombo, L., Fert, A., Garcia-Hernandez, M., Bachtold, A., Schneider, G.F., Guinea, F., Dekker, C., Barbone, M., Sun, Z.P., Galiotis, C., Grigorenko, A.N., Konstantatos, G., Kis, A., Katsnelson, M., Vandersypen, L., Loiseau, A., Morandi, V., Neumaier, D., Treossi, E., Pellegrini, V., Polini, M., Tredicucci, A., Williams, G.M., Hong, B.H., Ahn, J.H., Kim, J.M., Zirath, H., Wees, B.J. van, Zant, H. van der, Occhipinti, L., Matteo, A. Di, Kinloch, I.A., Seyller, T., Quesnel, E., Feng, X.L., Teo, K., Rupesinghe, N., Hakonen, P., Neil, S.R.T., Tannock, Q., Lofwandera, T., and Kinaret, J.

Abstract

Contains fulltext : 144990.pdf (publisher's version ) (Open Access)

Published
2015

20. Synthesis of germanium nano-crystals using a nanocluster source

Author

Parola, S., Quesnel, E., Muffato, V., Guetaz, L., Raccurt, O., Slaoui, A., Laboratoire des Multimatériaux et Interfaces (LMI), Université Claude Bernard Lyon 1 (UCBL), Université de Lyon-Université de Lyon-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Département des Technologies des NanoMatériaux (DTNM), Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux (LITEN), Institut National de L'Energie Solaire (INES), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Institut National de L'Energie Solaire (INES), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS), Institut d'Electronique du Solide et des Systèmes (InESS), and Centre National de la Recherche Scientifique (CNRS)

Subjects
Advanced Photovoltaics: New Concepts and Ultra-high Efficiency, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, 0210 nano-technology, 7. Clean energy, 01 natural sciences, New Materials, Cells and Modules, ComputingMilieux_MISCELLANEOUS, 0104 chemical sciences
Abstract

25th European Photovoltaic Solar Energy Conference and Exhibition / 5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain; 622-626, Recent advances in next generation solar cells are aiming at developing multi-bandgap structures based on quantum dots. For that purpose, numerous studies are interested in producing Si or Ge nano-crystals (NCs) but the reported fabrication processes at high temperature do not suit well the solar cells applications. Here, we report on the synthesis of Ge-NCs by means of a nanocluster source working room temperature. The control of the mean NCs size and size dispersion (± 13.2 %) was ensured by the source parameters in combination with an in-situ mass spectrometer. HRTEM observations evidenced nicely crystallized Ge NCs. Thus, first Ge NCs-alumina nanocomposite materials have been fabricated that exhibit a quantum confinement effect. PL spectroscopy measurements revealed a visible emission corresponding to a NCs bandgap of 2.88eV.

Published
2010

21. Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blank

Author

Farys, V., Charpin, C., Richard, Murielle, Robic, J.Y, Muffato, V., Quesnel, E., Postnikov, S., Schiavone, Patrick, Besacier, M., Smaali, Rafik, Naulleau, P., Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Freescale Semiconductor (FREESCALE SEMICONDUCTOR), Freescale Semiconductor Inc., Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Georgia Tech Lorraine [Metz], Université de Franche-Comté (UFC), and Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS)

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2005

22. Printability of Non-Smoothed Buried Defect in EUVL Mask Blank

Author

Farys, V., Charpin-Nicolle, C., Richard, Murielle, Robic, J.y, Quesnel, E., Postnikov, S., Schiavone, P., Naulleau, P., Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), and Clot, Marielle

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2005

23. Highly sensitive detection technique of buried defects in extreme ultra violet masks using at wavelength scanning dark-field microscopy

Author

Farys, V., Schiavone, P., Polack, F., Idir, M., Bertolo, M., Bianco, A., La Rosa, S., Cautero, G., Vannuffel, C., Quesnel, E., Muffato, V., Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2005

24. Detection of buried defect using actinic darfkfield microscopy

Author

Farys, V., Schiavone, P., Polack, F., Vannuffel, C., Quesnel, E., Bertolo, M., Laboratoire des technologies de la microélectronique (LTM), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), and Clot, Marielle

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2003

25. Detection of defects on EUV lithography mask by dark field microscopy at 13.1 nm

Author

Farys, V., Vannuffel, C., Quesnel, E., Muffato, V., Besson, P., Idir, M., Bertolo, M., Bianco, A., La Rosa, S., Polack, F., Laboratoire des technologies de la microélectronique (LTM), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Clot, Marielle, and Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS)

Published
2002

26. Ultraviolet optical and microstructural properties of MgF 2 and LaF 3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation

Author

Ristau, D., Gunster, S., Bosch, S., Duparre, A., Masetti, E., Ferre-Borrull, J., Kiriakidis, G., Peiro, F., Quesnel, E., Tikhonravov, A., and Publica

Subjects
thin film, optical property, materials characterization, process characterization
Abstract

Single layers of MgF2 and LaF3 were deposited upon superpolished fused-silica and CaF2 substrates by ion-beam sputtering (IBS) as well as by boat and electron beam (e-beam) evaporation and were characterized by a variety of complementary analytical techniques. Besides undergoing photometric and ellipsometric inspection, the samples were investigated at 193 and 633 nm by an optical scatter measurement facility. The structural properties were assessed with atomic-force microscopy, x-ray diffraction, TEM techniques that involved conventional thinning methods for the layers. For measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed. The dispersion behavior of both deposition materials, which was determined on the basis of various independent photometric measurements and data reduction techniques, is in good agreement with that published in the literature and with the bulk properties of the materials. The refractive indices of the MgF2 coating s ranged from 1.415 to 1.440 for the wavelength of the ArF excimer laser (193 nm) and from 1.435 to 1.465 for the wavelength of the F2 excimer laser (157 nm). For single layers of LaF3 the refractive indices extended from 1.67 to 1.70 at 193 nm to ~1.80 at 157 nm. The IBS process achieves the best homogeneity and the lowest surface roughness values (close to 1 nmrms ) of the processes compared in the joint experiment. In contrast to MgF2 boat and e-beam evaporated coatings, which exhibit tensile mechanical stress ranging from 300 to 400 MPa, IBS coatings exhibit high compressive stress of as much as 910 MPa. A similar tendency was found for coating stress in LaF3 single layers. Experimental results are discussed with respect to the microstructural and compositional properties as well as to the surface topography of the coatings.

Published
2002

27. Optoelectronic properties of p-i-n heterojunctions based on germanium nanocrystals

Author

Parola, S., Quesnel, E., Muffato, V., Xie, Ling, Leifer, Klaus, Coignus, J., Slaoui, A., Parola, S., Quesnel, E., Muffato, V., Xie, Ling, Leifer, Klaus, Coignus, J., and Slaoui, A.

Abstract

We investigated the possibility of using physical vapour deposited Ge nanocrystals (NCs) in optoelectronic devices such as solar cells. We have prepared p-i-n heterojunctions based on p(+)-doped Si substrate/undoped Ge NCs/ZnO: Al layer stacks and their optoelectronic properties were characterised. Under light, the generation of photo-carriers from the Ge NCs themselves was demonstrated. The photovoltaic behaviour of the p-i-n structure was also highlighted, with a measured Voc of 224 mV compared to 580 mV in theory. The discrepancy between theory and experiment was discussed on the basis of TEM observations, optical and carrier generation measurements as well as modelling.

Published
2013
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28. Reduction of defect density and optimisation of EUV mask absorbing layers

Author

Hue, J., Quesnel, E., Schiavone, P., Muffato, V., Vannuffel, C., Robic, J.y, Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), and Clot, Marielle

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2001

29. Development Program of EUV Mask in PREUVE

Author

Robic, J.Y, Besson, P., Gobil, Y., Heitzmann, M., Quesnel, E., Hue, J., Muffato, V., Renaud, D., Schiavone, P., Clot, Marielle, Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), and Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)

Subjects
ComputingMilieux_MISCELLANEOUS
Abstract

International audience

Published
2000

33. Ultra-high density carbon nanotubes on Al-Cu for advanced vias

Author

Dijon, J, primary, Okuno, H, additional, Fayolle, M, additional, Vo, T, additional, Pontcharra, J, additional, Acquaviva, D, additional, Bouvet, D, additional, Ionescu, A M, additional, Esconjauregui, C S, additional, Capraro, B, additional, Quesnel, E, additional, and Robertson, J, additional

Published
2010
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37. Phase-shift mask for EUV lithography

Author

Constancias, C., primary, Richard, M., additional, Joyeux, D., additional, Chiaroni, J., additional, Blanc, R., additional, Robic, J. Y., additional, Quesnel, E., additional, and Muffato, V., additional

Published
2006
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