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We compare, for the first time, the effects of 63 MeV protons on 1st generation and 3rd generation SiGe HBTs irradiated at both liquid nitrogen temperature (77 K) and at room temperature (300 K). The 1st generation SiGe HBTs irradiated at 77 K show less degradation than when irradiated at 300 K. Conversely, the 3rd generation SiGe HBTs exhibits an opposite trend, and the devices irradiated at 77 K show enhanced degradation compared to those irradiated at 300 K. The emitter-base spacer regions for these two SiGe technologies are fundamentally different in construction, and apparently are responsible for the observed differences in temperature-dependent radiation response. At practical circuit biases, both SiGe technology generations show only minimal degradation for both at 77 K and 300 K exposure, to Mrad dose levels, and are thus potentially useful for electronics applications requiring simultaneous cryogenic temperature operation and significant total dose radiation exposure. Index Terms--Interface trapped charge, irradiation, low temperature, proton irradiation, SiGe HBT.

A comprehensive investigation of the effects of proton irradiation on the performance of SiGe BiCMOS precision voltage references intended for extreme environment operational conditions is presented. The voltage reference circuits were designed in two distinct SiGe BiCMOS technology platforms (first generation (50 GHz) and third generation (200 GHz)) in order to investigate the effect of technology scaling. The circuits were irradiated at both room temperature and at 77 K. Measurement results from the experiments indicate that the proton-induced changes in the SiGe bandgap references are minor, even down to cryogenic temperatures, clearly good news for the potential application of SiGe mixed-signal circuits in emerging extreme environments. Index Terms--BiCMOS analog integrated circuits, heterojuction bipolar transistors, proton radiation effects.

The off-state drain current leakage characteristics of 130 nm CMOS technology are investigated using x-ray irradiation and operating temperature as variables. Radiation-induced interface traps in the gate oxide to gate-drain overlap region strongly enhance the off-state leakage as a function of gate bias. Due to the thin gate oxide in these 130 nm devices, we find that drain-edge direct tunneling is more plausible than conventional gate-induced-drain-leakage in explaining the observed increase in drain leakage. Radiation-induced traps in the shallow trench isolation oxide create parasitic channels in the p-well and produce another source of off-state drain leakage with increasing total dose. The drain current increase from both the gate overlap region and the shallow trench edge are enhanced with increasing total dose and suppressed by cooling. Index Terms--CMOS, cryogenic, GIDL, off-state leakage current, shallow trench isolation, STI, total dose radiation effects.

We present an investigation of the observed variations in the total dose tolerance of the emitter-base spacer and shallow trench isolation oxides in a commercial 200 GHz SiGe HBT technology. Proton, gamma, and X-ray irradiations at varying dose rates are found to produce drastically different degradation signatures at the various oxide interfaces. Extraction and analysis of the radiation-induced excess base current, as well as low-frequency noise, are used to probe the underlying physical mechanisms. Two-dimensional calibrated device simulations are employed to correlate the observed results to the spatial distributions of carrier recombination in forward- and inverse-mode operation for both pre- and post-irradiation levels. Possible explanations of our observations are offered and the implications for hardness assurance testing are discussed. Index Terms--Dose enhancement, hardness assurance, low-frequency noise, silicon-germanium (SiGe), hetero-junction bipolar transistor, total ionizing dose.

We present the results of gamma irradiation on third-generation, 200 GHz SiGe HBTs. Pre- and post-radiation dc figures-of-merit are used to quantify the tolerance of the raised extrinsic base structure to Co-60 gamma rays for varying device geometries. Additionally, the impact of technology scaling on the observed radiation response is addressed through comparisons to second generation, 120 GHz SiGe HBTs. Comparisons to previous proton-induced degradation results in these 200 GHz SiGe HBTs are also made, and indicate that the STI isolation oxide of the device shows increased degradation following Co-60 irradiation. The EB spacer oxide, on the other hand, demonstrates increased susceptibility to proton damage. Low dose rate proton testing was also performed and indicate that although there is a proton dose rate effect present in these devices, it cannot fully explain the observed trends. Similar trends have previously been observed for buried oxides and isolation oxides in several MOS technologies and have been attributed to increased charge yield in these oxides for 1.2 MeV Co-60 gamma rays when compared to 63 MeV protons. Index Terms--EB spacer, ELDRS, gamma radiation, proton radiation, radiation sources, SiGe, SiGe HBT, shallow trench isolation, technology scaling.

Two thousand arrays of second generation (6HP) silicon-germanium heterojunction bipolar transistors (SiGe HBTs) were exposed to 63 MeV hydrogen ions at a fluence ranging from 1×1012 to 5×1013 cm-2. The dc electrical measurements, such as Gummel characteristics, excess base current (Δ IB=IBpost-IBpre), current gain (hFE), neutral base recombination, avalanche multiplication factor (M-1) and output characteristics (VCE-IC), were systematically studied before and after hydrogen ion irradiation. The SiGe HBT showed 80% degradation in forward-mode dc current gain after a total dose of 5×1013 cm-2 hydrogen ion irradiation. [ABSTRACT FROM AUTHOR]

The effects of 8 MeV electrons and 60 and 95 MeV oxygen ions on the electrical properties of Si npn RF power transistors have been investigated as a function of fluence. The dc current gain (hFE), displacement damage factor, excess base current (Δ IB=IBpost-IBpre), excess collector current (Δ IC=ICpost-ICpre), collector saturation current (ICS) and deep level transient spectroscopy trap signatures of the irradiated transistors were systematically evaluated. [ABSTRACT FROM AUTHOR]