1. Correlative Atomic Coordination and Interfacial Charge Polarity in Al2O3/GaN and Al2O3/Si Heterostructures.
- Author
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Wang, Chuanju and Li, Xiaohang
- Subjects
- *
HETEROSTRUCTURES , *OPTOELECTRONIC devices , *ELECTRONIC equipment , *ATOMIC structure , *ATOMIC charges - Abstract
Al2O3 is used to form Al2O3/GaN and Al2O3/Si heterostructures for many electronic and optoelectronic devices. Yet the origins of the positive interfacial charges in the Al2O3/GaN heterostructure and negative interfacial charges in the Al2O3/Si heterostructure are often elusive. Herein, in‐depth studies of the Al2O3/GaN and Al2O3/Si heterostructures are conducted, especially on how the atomic coordination structure affects the interfacial charges. It is discovered that the octahedral [AlO6]9− coordination surpassed tetrahedral [AlO4]5− coordination at the Al2O3/GaN interface, whereas tetrahedral [AlO4]5− coordination dominated at the Al2O3/Si interface. Therefore, the interfacial charge polarity is correlated with the nonstoichiometry atomic coordination of Al2O3 at the two interfaces. This study reveals the atomic origin of charge polarity at high‐k/semiconductor interfaces and could facilitate the development of high‐performance optoelectronic and electronic devices through engineering the atomic coordination structure of the high‐k materials. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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