1. Improved Three-Dimensional Reconstructions in Electron Ptychography through Defocus Series Measurements
- Author
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Schloz, Marcel, Pekin, Thomas C., Brown, Hamish G., Byrne, Dana O., Esser, Bryan D., Terzoudis-Lumsden, Emmanuel, Taniguchi, Takashi, Watanabe, Kenji, Findlay, Scott D., Haas, Benedikt, Ciston, Jim, and Koch, Christoph T.
- Subjects
Physics - Optics ,Condensed Matter - Materials Science ,Physics - Computational Physics - Abstract
A detailed analysis of ptychography for 3D phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychography, regularized ptychography, and multi-mode ptychography. Additionally, we contrast multi-focus ptychography with an alternative method that uses virtual optical sectioning through a reconstructed scattering matrix ($\mathcal{S}$-matrix), which offers more precise 3D structure information compared to conventional ptychography. Our findings from multiple 3D reconstructions based on simulated and experimental data demonstrate that multi-focus ptychography surpasses other techniques, particularly in accurately reconstructing the surfaces and interface regions of thick specimens.
- Published
- 2024